semi合集-English.pdf - 第2609页

SEMI E91-0600 © SEMI 1999 , 2000 14 9.5.2 An exa mple of Waiting Previo u s D ata event report S6,F11 in the procedure above is shown below: 9.5.2.1 Ex a mple: S6,F11 L,3 1. <DAT AI D> 2. <CEID> :Waiting Prev…

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SEMI E91-0600 © SEMI 1999, 200013
:
n. <Data
n
>
9.4 Uploading (Reporting) Result Data
9.4.1 Result Data is reported by S6,F11 upon completion of the inspection in each wafer.
9.4.1.1 Example:
L,3
1. <DATAID>
2. <CEID>:Wafer End
3. L,a
1. L,2
1. <RPTID1>
2. L,7
1. <LOTID>
2. <PROCID>
3. <IDTYP>
4. <MID>
5. <ROWCOLCT>
6. <REFDIEPOS>
7. <ResultData>
:
a. L,2
1. <RPTIDa>
2. L,b
1. <LOC>
2. <PRODID>
3. <WAFSIZE>
4. <FLATTYPE>
5. <FLATANGL>
6. <REFDIECOORD>
7. <BINLIST>
:
b. <Vb>
9.5 Downloading Instruction Data
9.5.1 If the past inspection result is required in processing a wafer, the equipment obtains instructed data from the
host in the following procedure.
Comment Host Equipment Comment
Transfer a wafer.
The equipment is ready to receive
previous result data for a wafer
concerned.
S6,F11 “Waiting Previous Data (wait for
reception of previous result data)” event
report.
Check event. S6,F12
Instruction data download
(PRE-DATA_DOWNLOAD)
S2,F49
S2,F50 Reception response.
The processing is performed based on
instruction data.
SEMI E91-0600 © SEMI 1999, 2000 14
9.5.2 An example of Waiting Previo us Data event report S6,F11 in the procedure above is shown below:
9.5.2.1 Example:
S6,F11
L,3
1. <DATAID>
2. <CEID> :Waiting Previous Data
3. L,2
1. <RPTID1>
2. L,4
1. <LOTID> :Prober Job ID
2. <PROCID>
3. <MID>
4. <IDTYP>
9.5.3 An example of remote command S2,F49 used in the procedure above is shown below.
9.5.3.1 Example:
S2,F49
L,4
1. <DATAID>
2. <OBJSPEC> :a null length item.
3. < RCMD> :“PRE-DATA_DOWNLOAD”
2. L,n
1. L,2
1. <CPNAME
1
>
2. <CEPVAL
1
>
:
n. L,2
1. <CPNAME
n
> :PreviousResultData
2. L,b
1. <CPVAL
n1
>
:
b. <CPVAL
nb
>
9.6 Map Data Item Variable Table
Table 11 Map Data Item Variable Table
Variable Name Description Format Comments
LOTID Lot ID (Prober Job ID) A[30]
PROCID Process ID A[20]
LOC Cassette location U1
PRODID Product name (i.e., Device type) A[24]
SLOTNO Slot position in the cassette A[2] MID
WAFERNO Wafer number A[2] MID
WAFERID Wafer ID A[32] MID
IDTYP ID type to recognize a wafer. A[8] “SLOTNO” or “WAFERNO” or “WAFERID”
WAFSIZE Wafer size A[3] Unit is mm
FLAT Flat or Notch A[5] “FLAT” or “NOTCH”
FLATANGLE Flat angle A[3] Range from “000” to “359”. Unit is degree.
ROW Row count U2
COLUMN Column count U2
SEMI E91-0600 © SEMI 1999, 200015
DIESIZE_X Die Size X A[1,6] Unit is micron
DIESIZE_Y Die Size X A[1,6] Unit is micron
REFDIECOORD_X X coordinator of reference die A[1,4]
REFDIECOORD_Y Y coordinator of reference die A[1,4]
REFDIEPOS_X X address of reference die from wafer center I4 Unit is micron
REFDIEPOS_Y Y address of reference die from wafer center I4 Unit is micron
BINLIST Bin value array containing pass/fail
information.
B[n]
ResultData Result data B[m]
NOTE 1: One of these three OPT items needs to be specified.
9.6.1 The data structure of ResultDa ta is selectable with soft-switch as below:
(i) X,Y,BIN,...,X,Y,BIN
(ii) X,Y,N,BIN,BIN,...,BIN
(iii) BIN,BIN,...,BIN
9.6.2 The BIN data is a binary array and defined by an equipment supplier. For example, BIN data may include an
attribute of die (skip, on-wafer, etc.), pass or fail information and bin code.
9.7 Data Item Variable Table
Table12 Data Item Variable Table
Variable Name Description Class Format Comments
BinType Constant which specifies the kind of the
data structure of ResultData.
ECV U1 0= X, Y, BIN, ..., X, Y, BIN
1= X, Y, N, BIN, BIN, ..., BIN
2= BIN, BIN, ..., BIN
10 Remote Commands
10.1 The purpose of this section is t o identify remote commands, command parameters, and valid commands
versus states in the processing state models. The specification in this section is provisional. This will be revised in
the near future.
10.2 Requirements
10.2.1 The prober must support the GEM-required remote commands. (Some of the GEM required remote
commands are restated here to define PSEM specific requirements.)
10.2.2 All the remote commands defined by PSEM are required.
10.2.3 The alphanumeric strings defined by PSEM for remote commands (RMCD) and command parameter
(CPNAME) are required.
10.2.4 If additional remote command s are supported, then the “Remote Command Versus Valid States” matrix
must be generated for these additional commands. Place an “X” in the table for each state in which a given
command is valid.
10.3 Remote Commands Descriptions
10.3.1 ABORT — This command terminates the current processing. ABORT makes no guarantee about completion
of the current process.
10.3.2 JOB_CANCEL — Instruct to d elete Prober Job before starting processing.
10.3.3 JOB_CREATE — Instruct to create Prober Job in batch processing unit (usually, unit of one cassette). This
allows management data for batch processing unit to be instructed to the prober.