semi合集-English.pdf - 第5590页

SEMI P10-0705 © SEMI 1990, 2005 85 < x s : e l e m e n t n a m e = " Eu v M e a n P e a k R e f l e c t i v i t y " t y p e = " x s : s t r i n g " / > < x s : e l e m e n t n a m e = " …

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SEMI P10-0705 © SEMI 1990, 2005 84
< xs: enum erat ion value= "CH ROM E" / >
< xs: enum erat ion value= "RESI ST" / >
< xs: enum erat ion value= "ATTEN UATOR" / >
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< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= " p1 0 St a r t " t ype= "x s:st r ing" use= " re quire d"
fixed
= "St a rt Coa t ing" / >
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fixed
= "EndCoa t in g" / >
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< xs: elem ent nam e= "EuvMm rW avelengt h" type= "xs:st r in g"
/ >
SEMI P10-0705 © SEMI 1990, 2005 85
< xs: elem ent nam e= "EuvMe a nPea k Re flect ivit y"
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/ >
< xs: elem ent nam e= "EuvEx pa nsionCoeff" t ype= "x s:st ring" / >
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use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Eu vBla nkType " / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
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< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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= "En dW a ferEx posu r eD a t e " / >
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< xs: elem ent nam e= "
Aim Flux I nt e nsit yD elt a "
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< xs: elem ent nam e= "Aim CdD elt a " type= " xs:double" / >
< / xs: sequence>
SEMI P10-0705 © SEMI 1990, 2005 86
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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< xs: elem ent nam e= "EquipSit e Reqd" type= "x s:st ring"
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- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent nam e= "Lit hoM ode lRe qd"
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< xs: elem ent nam e= "Lit hoM odeReqd"
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< xs: elem ent nam e= "EquipSit e Use d" type= "xs:st r in g"
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< xs: elem ent nam e= "Lit hoM ode Use d" t ype= "x s:st ring"
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< xs: elem ent nam e= "Mach ine Se r ia lN um be r" type= "xs:st r in g"
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= " 0 " / >
< xs: elem ent nam e= " M a sk Se r ia lN um ber"
type
= " xs:unsigne dLong" m inOccurs= "0 " / >
< xs: elem ent nam e= "Proce ss" t ype= "x s:string" m inOccurs= "0 "
/ >
< xs: elem ent nam e= "W r it e D a t e Tim e " t ype= "x s:da t e Tim e"
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< xs: elem ent nam e= "Ela pse dW r it e Tim e"
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= " x s:unsigne dI nt" m inOccurs= "0 " / >
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= "St a rt Lit hoI nform a t ion" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
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