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SEMI E30-1103 © SEMI 1992, 2003 5 Section 7 — SECS Message Subset This section provides a composite list of the SECS-II messages required to implement all capabilities defined in the GEM standard. Section 8 — GEM Complia…
SEMI E30-1103 © SEMI 1992, 2003
4
The GEM standard is intended to specify the following:
— A model of the behavior to be exhibited by
semiconductor manufacturing equipment in a
SECS-II communication environment,
— A description of information and control functions
needed in a semiconductor manufacturing
environment,
— A definition of the basic SECS-II communications
capabilities of semiconductor manufacturing
equipment,
— A single consistent means of accomplishing an
action when SECS-II provides multiple possible
methods, and
— Standard message dialogues necessary to achieve
useful communications capabilities.
The GEM standard contains two types of requirements:
— fundamental GEM requirements and
— requirements of additional GEM capabilities.
The fundamental GEM requirements form the
foundation of the GEM standard. The additional GEM
capabilities provide functionality required for some
types of factory automation or functionality applicable
to specific types of equipment. A detailed list of the
fundamental GEM requirements and additional GEM
capabilities can be found in Chapter 8, GEM
Compliance. Figure 1.2 illustrates the components of
the GEM standard.
Figure 1.2
GEM Components
Equipment suppliers should work with their customers
to determine which additional GEM capabilities should
be implemented for a specific type of equipment.
Because the capabilities defined in the GEM standard
were specifically developed to meet the factory
automation requirements of semiconductor
manufacturers, it is anticipated that most device
manufacturers will require most of the GEM
capabilities that apply to a particular type of equipment.
Some device manufacturers may not require all the
GEM capabilities due to differences in their factory
automation strategies.
1.4 Overview — The GEM standard is divided into
sections as described below.
Section 1 — Introduction
This section provides the revision history, scope and
intent of the GEM standard. It also provides an
overview of the structure of the document and a list of
related documents.
Section 2 — Definitions
This section provides definitions of terms used
throughout the document.
Section 3 — State Models
This section describes the conventions used throughout
this document to depict state models. It also describes
the basic state models that apply to all semiconductor
manufacturing equipment and that pertain to more than
a single capability. State models describe the behavior
of the equipment from a host perspective.
Section 4 — Capabilities and Scenarios
This section provides a detailed description of the
communications capabilities defined for semiconductor
manufacturing equipment. The description of each
capability includes the purpose, definitions,
requirements, and scenarios that shall be supported.
Section 5 — Data Definitions
This section provides a reference to the Data Item
Dictionary and Variable Item Dictionary found in
SEMI Standard E5. The first subsection shows those
data items from SECS-II which have been restricted in
their use (i.e., allowed formats). The second subsection
lists variable data items that are available to the host for
data collection and shows any restrictions on their
SECS-II definitions.
Section 6 — Collection Events
This section provides a list of required collection events
and their associated data.
SEMI E30-1103 © SEMI 1992, 2003
5
Section 7 — SECS Message Subset
This section provides a composite list of the SECS-II
messages required to implement all capabilities defined
in the GEM standard.
Section 8 — GEM Compliance
This section describes the fundamental GEM
requirements and additional GEM capabilities and
provides references to other sections of the standard
where detailed requirements are located. This section
also defines standard terminology and documentation
that can be used by equipment suppliers and device
manufacturers to describe compliance with this
standard.
Section A — Application Notes
These sections provide additional explanatory
information and examples.
Section A.1 — Factory Operational Script
This section provides an overview of how the required
SECS capabilities may be used in the context of a
typical factory operation sequence. This section is
organized according to the sequence in which actions
are typically performed.
Section A.2 — Equipment Front Panel
This section provides guidance in implementing the
required front panel buttons, indicators, and switches as
defined in this document. A summary of the front panel
requirements is provided.
Section A.3 — Examples of Equipment Alarms
This section provides examples of alarms related to
various equipment configurations.
Section A.4 — Trace Data Collection Example
This section provides an example of trace initialization
by the host and the periodic trace data messages that
might be sent by the equipment.
Section A.5 — Harel Notation
This section explains David Harel’s “Statechart”
notation that is used throughout this document to depict
state models.
Section A.6 — Example Control Model Application
This section provides one example of a host’s
interaction with an equipment’s control model.
Section A.7 — Examples of Limits Monitoring
This section contains four limits monitoring examples
to help clarify the use of limits and to illustrate typical
applications.
1.5 Applicable Documents
1.5.1 SEMI Standards — The following SEMI
standards are related to the GEM standard. The specific
portions of these standards referenced by GEM
constitute provisions of the GEM standard.
SEMI E4 — SEMI Equipment Communications
Standard 1 — Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications
Standard 2 — Message Content (SECS-II)
SEMI E13 — Standard for SEMI Equipment
Communication Standard Message Service (SMS)
SEMI E23 — Specification for Cassette Transfer
Parallel I/O Interface
1.5.2 Other References
Harel, D., “Statecharts: A Visual Formalism for
Complex Systems,” Science of Computer Programming
8 (1987) 231-274
1
.
NOTICE: As listed or revised, all documents cited
shall be the latest publications of adopted standards.
2 Definitions
2.1 alarm — An alarm is related to any abnormal
situation on the equipment that may endanger people,
equipment, or material being processed. Such abnormal
situations are defined by the equipment manufacturer
based on physical safety limitations. Equipment
activities potentially impacted by the presence of an
alarm shall be inhibited.
2.1.1 Note that exceeding control limits associated
with process tolerance does not constitute an alarm nor
do normal equipment events such as the start or
completion of processing.
2.2 capabilities — Capabilities are operations
performed by semiconductor manufacturing equipment.
These operations are initiated through the
communications interface using sequences of SECS-II
messages (or scenarios). An example of a capability is
the setting and clearing of alarms.
2.3 collection event — A collection event is an event
(or grouping of related events) on the equipment that is
considered to be significant to the host.
2.4 communication failure — A communication failure
is said to occur when an established communications
link is broken. Such failures are protocol specific. Refer
to the appropriate protocol standard (e.g., SEMI E4 or
1 Elsevier Science, P.O. Box 945, New York, NY 10159-0945,
http://www.elvesier.nl/homepage/browse.htt
SEMI E30-1103 © SEMI 1992, 2003
6
SEMI E37) for a protocol-specific definition of
communication failure.
2.5 communication fault — A communication fault
occurs when the equipment does not receive an
expected message, or when either a transaction timer or
a conversation timer expires.
2.6 control — To control is to exercise directing
influence.
2.7 equipment model — An equipment model is a
definition based on capabilities, scenarios, and SECS-II
messages that manufacturing equipment should perform
to support an automated manufacturing environment.
(See also Generic Equipment Model.)
2.8 event — An event is a detectable occurrence
significant to the equipment.
2.9 GEM compliance — The term “GEM Compliance”
is defined with respect to individual GEM capabilities
to indicate adherence to the GEM standard for a
specific capability. Section 8 includes more detail on
GEM Compliance.
2.10 Generic Equipment Model — The Generic
Equipment Model is used as a reference model for any
type of equipment. It contains functionality that can
apply to most equipment, but does not address unique
requirements of specific equipment.
2.11 host — The SEMI E4 and E5 standards define
Host as “the intelligent system that communicates with
the equipment.”
2.12 message fault — A message fault occurs when the
equipment receives a message that it cannot process
because of a defect in the message.
2.13 operational script — An operational script is a
collection of scenarios arranged in a sequence typical of
actual factory operations. Example sequences are
system initialization powerup, machine setup, and
processing.
2.14 operator — A human who operates the equipment
to perform its intended function (e.g., processing). The
operator typically interacts with the equipment via the
equipment supplied operator console.
2.15 process unit — A process unit refers to the
material that is typically processed as a unit via single
run command, process program, etc. Common process
units are wafers, cassettes, magazines, and boats.
2.16 processing cycle — A processing cycle is a
sequence wherein all of the material contained in a
typical process unit is processed. This is often used as a
measure of action or time.
2.17 scenario — A scenario is a group of SECS-II
messages arranged in a sequence to perform a
capability. Other information may also be included in a
scenario for clarity.
2.18 SECS-I — SEMI Equipment Communications
Standard 1 (SEMI E4). This standard specifies a
method for a message transfer protocol with electrical
signal levels based upon EIA RS232-C.
2.19 SECS-II — SEMI Equipment Communications
Standard 2 (SEMI E5). This standard specifies a group
of messages and the respective syntax and semantics
for those messages relating to semiconductor
manufacturing equipment control.
2.20 SMS — SECS Message Service. An alternative to
SECS-I to be used when sending SECS-II formatted
messages over a network.
2.21 state model — A State Model is a collection of
states and state transitions that combine to describe the
behavior of a system. This model includes definition of
the conditions that delineate a state, the
actions/reactions possible within a state, the events that
trigger transitions to other states, and the process of
transitioning between states.
2.22 system default — Refers to state(s) in the
equipment behavioral model that are expected to be
active at the end of system initialization. It also refers to
the value(s) that specified equipment variables are
expected to contain at the end of system initialization.
2.23 system initialization — The process that an
equipment performs at power-up, system activation,
and/or system reset. This process is expected to prepare
the equipment to operate properly and according to the
equipment behavioral models.
2.24 user — A human or humans who represent the
factory and enforce the factory operation model. A user
is considered to be responsible for many setup and
configuration activities that cause the equipment to best
conform to factory operations practices.
3 State Models
The following sections contain state models for
semiconductor manufacturing equipment. These state
models describe the behavior of the equipment from a
host perspective in a compact and easy to understand
format. State models for different equipment will be
identical in some areas (e.g., communications), but may
vary in other areas (e.g., processing). It is desirable to
divide the equipment into parallel components that can
be modeled separately and then combined. An example
of a component overview of an equipment is provided
as Figure 3.0.