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SEMI E32-0997 © SEMI 1994 , 1997 28 4.5.2 T ransferJob Object — The att r i butes of the TransferJob object are defi ned in Table 4.6. A TransferJob is created by th e eq uipment when it accepts a transfer job create req…

SEMI E32-0997 © SEMI 1994, 199727

Event Typical Data

Committed To Transfer TRAtomicID, Timestamp

Waiting for StartHandoff TRAtomicID, Timestamp

Transfer Job Paused Timestamp

Transfer Job Started Timestamp

Atomic Transfer Started TRAtomicID, Timestamp

Atomic Transfer Complete TRAtomicID, Timestamp

TRJobMS — Identifies which transfer job milestone is

being alerted to the host. Possible values are:

• Transfer Job Started.

• Transfer Job Complete.

TRObjType — Identifies the type of object to be

transferred. This parameter is used only in cases where

a port is capable of transfers involving different object

types. As an example, a list of possible values might

include:

• Wafer Reticle Cassette

• 100 mm Wafer Carrier

• 125 mm Wafer Carrier

• 150 mm Wafer Carrier

• 200 mm Wafer Carrier

• 100 mm Wafer

• 125 mm Wafer

• 150 mm Wafer

• 200 mm Wafer

Attributes: (Note: Some parameters above are also

attributes.)

Name — Each equipment must have a unique Name

attribute, a factory-defined Text string.

TRAtomicList — List of the atomic transfers

(TRAtomicIDs) contained within the specified transfer

job. This is an attribute of a transfer job and is specified

in the GetAttribute service.

TRAtomicState — Attribute of an atomic transfer.

Possible values are defined by the state models defined

in Sections 4.2.3 and 4.3.3.

TRJobState — An attribute of transfer job. Possible

values are defined by the state models defined in

Sections 4.2.2 and 4.3.2.

4.5 Object Attribute Definitions — This section

defines the attributes of those objects required for

Material Movement Management: Equipment,

TransferJob, and AtomicTransfer.

4.5.1 Equipment — The attributes of the Equipment

object are defined in Table 4.5.

Table 4.5 Equipment Object Definition Table

Attribute Name Definition Access Requirement Form

ObjType Object type. RO Y Text = “Equipment”

ObjID User-definable name. RW Y Text

SEMI E32-0997 © SEMI 1994, 1997 28

4.5.2 TransferJob Object — The attributes of the TransferJob object are defined in Table 4.6. A TransferJob is

created by the equipment when it accepts a transfer job create request from the host, and its attributes are based upon

that request.

Table 4.6 TransferJob Object Definition Table

Attribute Name Definition Access Requirement Form

ObjType Object type. RO Y Text = “TransferJob”

ObjID Textual version of TRJobID. RO Y Text

TRJobID Identifier assigned by the equipment. RO Y Unsigned integer

TRJobName Host-created job identifier. RO Y Text

TRJobState Current state. RO Y Enumerated:

TRJobQueued,

TRJobActive,

TRJobComplete

TRAtomicList List of (TRAtomicID). RO Y List of unsigned integers

4.5.3 AtomicTransfer Object — The attributes of the AtomicTransfer object are defined in Table 4.7.

AtomicTransfer objects are created by the equipment when it accepts a transfer job create request from the host, and

its attributes are based upon that request.

Table 4.7 Atomic Transfer Object Definition Table

Attribute Name Definition Access Requirement Form

ObjType Object type. RO Y Text = “AtomicTransfer”

ObjID Textual version of TRAtomicID. RO Y Text

TRAtomicID Identifier assigned by the equipment. RO Y Unsigned integer

TRAtomicState Current state. RO Y Enumerated:

TRAtomicActive,

TRAtomicComplete

TRLink Assigned by the host to identify an atomic transfer. RO Y Unsigned integer

TRPort Material I/O Port identifier. RO Y Unsigned integer

TRObjName Textual identifier of transfer object. RO N Text

TRObjType Material type of transfer object. RO N Enumerated

TRRole Equipment’s role. RO Y Enumerated:

Primary or Secondary

TRRecipe Recipe identifier for transfer recipe. RO N Text

TRPartner Name of equipment’s partner. RO Y Text

TRPartnerPort Identifier for partner’s port. RO N Unsigned integer

TRDirection Indicates whether the equipment will send or receive. RO Y Enumerated:

Send

Receive

TRType Indicated the equipment is to be active or passive. RO Y Enumerated:

Passive

Active

TRLocation Identifies location on the equipment of the source (or

destination) of the transfer object.

RO N Unsigned integer

TRAutoStart Indicates whether the equipment may automatically start

the handoff without waiting for a StartHandoff

command.

RO Y Boolean:

Automatically start (TRUE).

Wait for StartHandoff (FALSE).

SEMI E32-0997 © SEMI 1994, 199729

5 Micro Level

5.1 Micro Level Concepts — The micro level of

material movement is defined below to allow for

interaction between transfer partners on a step–by–step

basis during a handoff. It was designed to be used in

conjunction with the macro level defined above but

may instead be used with some other transfer

coordination mechanism.

5.1.1 Micro Level Definitions

Handoff — The process by which the transfer object

moves from the sending transfer partner to the receiving

transfer partner. The terms “handoff” and “micro level”

refer to the same transfer activity.

Micro Move — One of a sequence of moves required

during a micro level process to effect the transfer of an

object. This is normally associated with physical

activity within the transfer envelope.

5.1.2 Micro Level Description — While the macro

level of material movement deals with coordination and

preparation for a transfer, the micro level addresses the

physical synchronization between two transfer partners

during an atomic transfer. To control these physical

interactions properly, communication between the

transfer partners is required. Using these

communications, the partners shall ensure that both are

ready to perform the same specific transfer, that both

agree on the mechanism, and that movement within the

transfer envelope is properly coordinated.

There are three parts to the micro level interaction

between transfer partners. Each of the three parts must

occur in some form for the micro level to integrate

properly with the macro level.

1. The first part is the exchange of “I'm ready” type

messages, so that the partners can be sure that

starting the transfer is appropriate.

2. The second part of the micro level interaction is the

coordination of the physical transfer. During a

transfer, control of the transfer envelope may

belong to only one partner at any time. Joint or

parallel movement is never allowed in this space

The transfer itself is a series of steps called micro

moves. Each step typically contains all the

activities one partner can perform before the other

must act. If the secondary partner is passive during

the move, no micro level communications are

needed for part two, since the primary partner shall

control the transfer envelope during the entire

physical transfer.

13 The space outside the transfer envelope is not restricted, and some

preparations for the next micro move may be possible in this space.

3. The third part of the micro level interaction is the

verification that the transfer is complete.

The micro transfer mechanism assumes that the

secondary partner will recognize and respond to some

list of micro commands known to the primary partner.

These commands might range from the very specific

(e.g., “reach out and grasp the transfer object”) to the

very general (e.g., “perform the next step in your

sequence”).

5.2 Micro Level Behavior

5.2.1 Micro Level Communications — This section

provides baseline definitions of the communications

needed by the micro level of material movement. More

detailed definitions of the messaging services can be

found in Section 5.4 below. Refer to Figure 5.1 while

reading the message definitions. In the figure, the

messages in italics are macro level messages provided

for reference. The bolded messages are the micro level

messages.

The prefix “HO” (for HandOff) is appended to the

names of micro level messages to differentiate them

from the “TR” transfer messages.

HOReady — Upon completion of any setup operations,

each transfer partner shall declare to the other that it is

prepared for the specified atomic transfer. Either

partner may make this declaration first. When the

HOReady exchange has been made, the primary partner

shall start the transfer. The HOReady messages include

a transfer identifier (see TRLink), which the partners

match up. Looking back at the macro level atomic

transfer state diagram (Figure 4.6), the combination of

having sent and received a HOReady message for the

specific transfer will spur the transition from the

SETUP to AWAITING TRANSFER PARTNER states.

It is possible that an equipment will receive a HOReady

message from its partner before it has received the

corresponding Transfer Job Create request from the

host (e.g., setup is instantaneous). An equipment shall

be able to retain such a received message for a time to

allow the host to deliver the corresponding Transfer Job

Create request.

HOCommand — The HOCommand is the mechanism

by which the primary transfer partner orchestrates the

sequence of micro moves necessary for the transfer.

The primary transfer partner shall successively perform

its own micro move, then direct its partner to perform

its next move. Thus, the partners may alternate control

of the transfer envelope during the transfer. If the

secondary partner is passive during the entire transfer

and the primary performs all physical activity, no

HOCommands are required — they are implicitly