semi合集-English.pdf - 第5977页
SEMI P42-0304 © SEMI 2004 10 <xsd:enumeration valu e="um"/> <xsd:enum eration value="inch"/> </xsd:restrict ion> </xsd:simpleTy pe> </xsd:schem a> NOTICE: SEMI makes no w…
SEMI P42-0304 © SEMI 2004 9
<xsd:sequence>
<xsd:element name="AlignmentMarkInformation"
type="rfd:AlignmentMarkInformationType" minOccurs="0" maxOccurs="unbounded"/>
<xsd:element name="MarkUseRule" type="rfd:MarkUseRuleType"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="AlignmentMarkInformationType">
<xsd:sequence>
<xsd:element name="AlignmentMarkID" type="xsd:ID"/>
<xsd:element name="Group" type="xsd:string"/>
<xsd:element name="WaferMarkType" type="xsd:string"/>
<xsd:element name="WaferMarkPosition" type="rfd:WaferMarkPositionType"/>
<xsd:element name="Comment" type="xsd:string"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="MarkUseRuleType">
<xsd:sequence>
<xsd:element name="FileName" type="xsd:string"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="WaferMarkPositionType">
<xsd:sequence>
<xsd:element name="X-Mark" type="rfd:XYUnitType"/>
<xsd:element name="Y-Mark" type="rfd:XYUnitType"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<!-- ======================= AlignmentUSEMark ============================ -->
<xsd:complexType name="AlignmentUSEMarkType">
<xsd:sequence>
<xsd:element name="AlignmentMarkInformation"
type="rfd:AlignmentMarkInformationType" minOccurs="0" maxOccurs="unbounded"/>
</xsd:sequence>
</xsd:complexType>
<!-- ============================ Common ================================== -->
<!-- ============================XYUnitType================================ -->
<xsd:complexType name="XYUnitType">
<xsd:sequence>
<xsd:element name="X" type="xsd:double"/>
<xsd:element name="Y" type="xsd:double"/>
</xsd:sequence>
</xsd:complexType>
<!-- ============================XYCodeType================================ -->
<xsd:complexType name="XYCodeType">
<xsd:sequence>
<xsd:element name="X" type="xsd:double"/>
<xsd:element name="Y" type="xsd:double"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<!-- =====================UnitTypeType======================================= -->
<xsd:simpleType name="UnitTypeType">
<xsd:restriction base="xsd:string">
<xsd:enumeration value="mm"/>
SEMI P42-0304 © SEMI 2004 10
<xsd:enumeration value="um"/>
<xsd:enumeration value="inch"/>
</xsd:restriction>
</xsd:simpleType>
</xsd:schema>
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
SEMI P42-0304 © SEMI 2004 11
RELATED INFORMATION 1
APPLICATION NOTES
NOTICE: This related information is not an official part of SEMI P42 and was derived from work by the
originating task force. This related information was approved for publication by full letter ballot procedures on
January 9, 2004.
R1-1 Diagram Sample of Reticle Frame Data
WaferType
WaferInformation
EdgeClearance
WaferThickness
WaferRotation
Clearance
UnitType
WaferSize
Size
UnitType
Thickness
UnitType
C
R
ShotMapArray
ShotMapOffset
X
Y
UnitType
ShotMapInformarion
StepPitch
X
Y
UnitType
FormulationInformation
Date
Person
UseEx
p
osureMachine
MachineTypeInformation