semi合集-English.pdf - 第666页

SEMI E85-0705 © SEMI 1999, 2005 20 NOTE: Dimension D10 will be 150 mm or 230 mm as specified by the user. Figure 12 Detailed Views of Center Exclusion Volume (where D6 = minimum to allow for the ca rrier to seat on all 3…

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SEMI E85-0705 © SEMI 1999, 2005 19
NOTE: Dimension D10 will be 150 mm or 230 mm as specified by the user.
Figure 11
Detailed Views of Center Exclusion Volume
(where D6 > minimum to allow for transfer from both sides)
SEMI E85-0705 © SEMI 1999, 2005 20
NOTE: Dimension D10 will be 150 mm or 230 mm as specified by the user.
Figure 12
Detailed Views of Center Exclusion Volume
(where D6 = minimum to allow for the carrier to seat on all 3 kinematic pins)
SEMI E85-0705 © SEMI 1999, 2005 21
Option A
Option C
Over the Rail Type
Option C
Suspended Type
Stocker
Transport
vehicle
C
5
HDP is
inclined
T
3
HDP is inclined
Stocker
H
2
C
3
A
A
BDP is inclined
Stocker
Transport
vehicle
H
4
HDP is
inclined
C
5
D
10
H
2
T
3
BDP is inclined
BDP is inclined
A
A
A
A
NOTE: The cross section views (A-A) of the exclusion volumes are the same as the views shown in the FOUP
Figures 19.
Figure 13
Views Illustrating Open Cassette Options