semi合集-English.pdf - 第408页

SEMI E52-0703 © SEMI 1995, 2003 44 MIXED GAS NAME SYMBOL CODE 4% HYDROGEN/ARGON 4% H2/Ar 0700 4% HYDROGEN/HELIUM 4% H2/He 0606 4% HYDROGEN/NITROGEN 4% H2/N2 0607 4% NITROGEN/HYDROGEN 4% N2/H2 0608 4% OXYGEN/CARBON TETRAF…

100%1 / 7923
SEMI E52-0703 © SEMI 1995, 2003 43
MIXED GAS NAME SYMBOL CODE
25%PHOSPHINE/SILANE 25%PH3/SiH4 0517
25%PROPANE/PROPYLENE 25%C3H8/C3H6 0830
25%TRICHLOROSILANE/HYDROGEN 25%SiHCI3/H2 0680
3%AMMONIA/NITROGEN 3%NH3/N2 0831
3%ARSINE/ARGON 3%AsH3/Ar 0688
3%ARSINE/HYDROGEN 3%AsH3/H2 0665
3%BORON TRICHLORIDE/HYDROGEN 3%BCl3/H2 0832
3%DIBORANE/5%SILANE/NITROGEN 3%B2H6/5%SiH4/N2 0659
3%DIBORANE/HYDROGEN 3%B2H6/H2 0657
3%DIBORANE/NITROGEN 3%B2H6/N2 0595
3%ETHYLENE/HELIUM 3%C2H4/He 0878
3%HYDROGEN/ARGON 3%H2/Ar 0833
3%HYDROGEN/HELIUM 3%H2/He 0596
3%HYDROGEN/NITROGEN 3%H2/N2 0597
3%NITROGEN/HYDROGEN 3%N2/H2 0672
3%OXYGEN/HELIUM 3%O2/He 0598
3%OZONE/AIR 3%O3/Air 0599
3%PHOSPHINE/5%SILANE/NITROGEN 3%PH3/5%SiH4/N2 0671
3%PHOSPHINE/ARGON 3%PH3/Ar 0534
3%PHOSPHINE/HELIUM 3%PH3/He 0834
3%PHOSPHINE/NITROGEN 3%PH3/N2 0600
3%PHOSPHINE/SILANE 3%PH3/SiH4 0601
3%PROPANE/HYDROGEN 3%C3H8/H2 0872
3%SILANE/HELIUM 3%SiH4/He 0602
3%SILANE/HYDROGEN 3%SiH4/H2 0870
3.5%CARBON DIOXIDE/HELIUM 3.5%CO2/He 0835
3.5%HYDROGEN/NITROGEN 3.5%H2/N2 0768
30% ISOBUTANE/HELIUM 30%CH(CH3)3/He 0836
30%CARBON DIOXIDE/AIR 30%CO2/Air 0508
30%GERMANE/ARGON 30%GeH4/Ar 0837
30%HELIUM/OXYGEN 30%He/O2 0603
30%NITROGEN TRIFLUORIDE/NITROGEN 30%NF3/N2 0661
30%OXYGEN/HELIUM 30%O2/He 0604
30%OXYGEN/HYDROGEN 30%O2/H2 0637
30%PHOSPHINE/SILANE 30%PH3/SiH4 0896
30%PROPANE/BUTANE 30%C3H8/C4H10 0885
30%SILANE/ARGON 30%SiH4/Ar 0838
30%SILANE/NITROGEN 30%SiH4/N2 0839
30%TRICHLOROSILANE/HYDROGEN 30%SiHCl3/H2 0877
30%TRIMETHYLSILANE/HYDROGEN 30%(CH3)3SiH/H2 0874
32%SILICON TETRACHLORIDE/HYDROGEN 32%SiCl4/O2 0892
33.3%HYDROGEN/CARBON MONOXIDE 33.3%H2/CO 0840
35%PHOSPHINE/SILANE 35%PH3/SiH4 0841
4%DIBORANE/NITROGEN 4%B2H6/N2 0605
4%HELIUM/NITROGEN 4%He/N2 0738
SEMI E52-0703 © SEMI 1995, 2003 44
MIXED GAS NAME SYMBOL CODE
4%HYDROGEN/ARGON 4%H2/Ar 0700
4%HYDROGEN/HELIUM 4%H2/He 0606
4%HYDROGEN/NITROGEN 4%H2/N2 0607
4%NITROGEN/HYDROGEN 4%N2/H2 0608
4%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 4%O2/CF4 0609
4%PHOSPHINE/ARGON 4%PH3/Ar 0691
4%PHOSPHINE/HELIUM 4%PH3/He 0610
4%PHOSPHINE/NITROGEN 4%PH3/N2 0535
4%PHOSPHINE/SILANE 4%PH3/SiH4 0611
4%SILANE/NITROGEN 4%SiH4/N2 0842
4%TETRAFLUOROETHANE (FREON-
134A)/44%PENTAFLUOROETHANE (FREON-125)/ ETHANE,1,1,1-
TRIFLUORO-(HFC-143a) 4%C2H2F4/44%C2HF5/C2H3F3 0884
4.5%PHOSPHINE/NITROGEN 4.5%PH3/N2 0528
4.6%SULFUR DIOXIDE/NITROGEN 4.6%SO2/N2 0906
40%ARGON/TUNGSTEN HEXAFLUORIDE 40%Ar/WF6 0503
40%GERMANE/ARGON 40%GeH4/Ar 0751
40%GERMANE/NITROGEN 40%GeH4/N2 0895
40%HELIUM/SILANE 40%He/SiH4 0612
40%HYDROGEN/HELIUM 40%H2/He 0725
40%OXYGEN/HEXAFLUOROETHANE(FREON-116) 40%O2/C2F6 0505
40%OXYGEN/SULFUR HEXAFLUORIDE 40%O2/SF6 0642
40%SILANE/HELIUM 40%SiH4/He 0702
5%ACETONE/NITROGEN 5%C3H6O-m)/N2 0711
5%AMMONIA/NITROGEN 5%NH3/N2 0843
5%ARSINE/HYDROGEN 5%AsH3/H2 0614
5%BENZENE/NITROGEN 5%C6H6/N2 0712
5%BORON TRICHLORIDE/HYDROGEN 5%BCI3/H2 0616
5%BORON TRIFLUORIDE/HELIUM 5%BF3/He 0776
5%CARBON DIOXIDE/10%OXYGEN/NITROGEN 5%CO2/10%O2/N2 0867
5%CARBON DIOXIDE/15%OXYGEN/NITROGEN 5%CO2/15%O2/N2 0734
5%CARBON DIOXIDE/5%OXYGEN/NITROGEN 5%CO2/5%O2/N2 0865
5%CARBON DIOXIDE/NITROGEN 5%CO2/N2 0618
5%CARBON MONOXIDE/ARGON 5%CO/Ar 0844
5%CARBON MONOXIDE/NITROGEN 5%CO/N2 0862
5%CHLORINE/HELIUM 5%CI2/He 0719
5%DIBORANE/5%SILANE/NITROGEN 5%B2H6/5%SiH4/N2 0876
5%DIBORANE/ARGON 5%B2H6/Ar 0615
5%DIBORANE/HELIUM 5%B2H6/He 0766
5%DIBORANE/HYDROGEN 5%B2H6/H2 0722
5%DIBORANE/NITROGEN 5%B2H6/N2 0654
5%DIBORANE/SILANE 5%B2H6/SiH4 0683
5%DICHLOROSILANE/ARGON 5%SiH2CI2/Ar 0628
5%ETHENE/NITROGEN 5%C2H4/N2 0845
5%FLUORINE/ARGON 5%F2/Ar 0761
5%FLUORINE/HELIUM 5%F2/He 0720
SEMI E52-0703 © SEMI 1995, 2003 45
MIXED GAS NAME SYMBOL CODE
5%FLUORINE/NITROGEN 5%F2/N2 0732
5%FLUORINE/NITROGEN TRIFLUORIDE 5%F2/NF3 0669
5%GERMANE/HELIUM 5%GeH4/He 0765
5%HELIUM/ARGON 5%He/Ar 0846
5%HELIUM/NITROGEN 5%He/N2 0752
5%HEXAFLUOROETHANE/OXYGEN 5%C2F6/O2 0785
5%HYDROGEN CHLORIDE/NITROGEN 5%HCI/N2 0726
5%HYDROGEN SELENIDE/HYDROGEN 5%H2Se/H2 0510
5%HYDROGEN/ARGON 5%H2/Ar 0619
5%HYDROGEN/HELIUM 5%H2/He 0762
5%HYDROGEN/NITROGEN 5%H2/N2 0542
5%METHANE/HELIUM 5%CH4/He 0699
5%NITROGEN/HYDROGEN 5%N2/H2 0621
5%NITROGEN/PHOSPHINE 5%N2/PH3 0622
5%OXYGEN/ARGON 5%O2/Ar 0623
5%OXYGEN/CARBON TETRAFLUORIDE 5%O2/CF4 0753
5%OXYGEN/HELIUM 5%O2/He 0779
5%OZONE/OXYGEN 5%O3/O2 0624
5%PHOSPHINE/5%SILANE/NITROGEN 5%PH3/5%SiH4/N2 0625
5%PHOSPHINE/ARGON 5%PH3/Ar 0626
5%PHOSPHINE/HELIUM 5%PH3/He 0693
5%PHOSPHINE/HYDROGEN 5%PH3/H2 0709
5%PHOSPHINE/NITROGEN 5%PH3/N2 0501
5%PHOSPHINE/SILANE 5%PH3/SiH4 0627
5%PHOSPHORUS PENTAFLUORIDE/HELIUM 5%PF5/He 0777
5%PROPANE/HYDROGEN 5%C3H8/H2 0617
5%SILANE/ARGON 5%SiH4/Ar 0629
5%SILANE/HELIUM 5%SiH4/He 0780
5%SILANE/HYDROGEN 5%SiH4/H2 0847
5%SILANE/NITROGEN 5%SiH4/N2 0773
5%SULFUR DIOXIDE/HELIUM 5%SO2/He 0763
5%TETRAETHYLORTHOSILICATE(TEOS)/NITROGEN 5%Si(C2H5O)4/N2 0523
5%TRICHLOROSILANE/HYDROGEN 5%SiHCI3/H2 0679
5%TRIETHYLANTIMONY(TESb)/HYDROGEN 5%(C2H5)3Sb/H2 0524
5%WATER VAPOR/AIR 5%H2O/Air 0567
5.5%ARSENIC TRICHLORIDE/HYDROGEN 5.5%AsCl3/H2 0890
50%CARBON DIOXIDE/NITROGEN 50%CO2/N2 0848
50%FLUORINE/ARGON 50%F2/Ar 0756
50%FLUORINE/HELIUM 50%F2/He 0757
50%FLUORINE/NITROGEN 50%F2/N2 0760
50%FLUOROFORM/ARGON 50%CHF3/Ar 0686
50%GERMANE/ARGON 50%GeH4/Ar 0747
50%HELIUM/ARGON 50%He/Ar 0849
50%HELIUM/OXYGEN 50%He/O2 0630
50%HEXAFLUOROETHANE/OXYGEN 50%C2F6/O2 0769