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SEMI E1-0697 © SEMI 1979, 2003 3 Figure 1 Wafer Carrier Outline — General Usage NOTE: Used in conjunction with Tab le 1. Table 2 Symbols Outline F or Auto Transport Usage Specifications Figure 1A Reference Description Ov…

SEMI E1-0697 © SEMI 1979, 2003 2

2.2.18 pocket depth — The distance from the pocket

flat to its own pocket nose, not to the opposite pocket.

(See Figure 1, C2.)

2.2.19 pocket flat — The width of the pocket along the

vertical walls at its narrowest distance. (See Figure 1,

C3.)

2.2.20 pocket nose — The top of the mass of material

between adjacent pockets.

2.2.21 pocket nose radius — The radius on the pocket

nose.

2.2.22 pocket size — The distance between opposite

pocket flats. (See Figure 1, C4.)

2.2.23 pocket spacing — The distance between pocket

centerlines. (See Figure 1, B2.)

2.2.24 pocket width — The width of the pocket at its

widest distance. (See Figure 1, C1.)

2.2.25 top face — The plane or surface of the carrier

from which side wafers enter into or out of the carrier.

2.2.26 track clearance — The unobstructed area

between the two carrier sides on the bar end. (See

Figure 1, D6; Figure 1a, D6a, D6b, D6c.)

2.2.27 wafer carrier — A device for the holding of

wafers for various processing steps in semiconductor

manufacturing.

2.2.28 wafer tilt — The possible unparallel position of

the wafer in relation to the bar end of the carrier when

the carrier is resting on the bar end. (Not shown in

Figure 1.)

2.2.29 wafer transfer — The act of relocating wafers

from one carrier into another. This can be accomplished

by several methods.

Table 1 Symbols Outline General Usage

Figure 1

Reference

Description

Overall Dimensions

A1 Length

A2 Width (with/without flange)

A3 Height (excluding pin)

Capacity

B1 Pockets per carrier

B2 Pocket spacing

B3 Center distance from the 1st to last pocket

Detail Dimensions

C1 Pocket width

C2 Pocket depth

C3 Pocket flat

C4 Pocket size

C5 Pin and hole location (width)

C6 Pin and hole location (length)

C7 Pin diameter and height

C8 Hole or slot

C9 Pin and hole center distance from pocket

center line

Machine Fit Specifications

D1 From the outside of the bar end to the

center line of the 1st pocket

D2 From the center line of the 1st pocket to the

closest point on the crossbar or web

D3 From the bar end of the carrier to the start

of the crossbar

D4 Center of the crossbar to the top face of the

carrier

D5 Crossbar specifications

D5a Bar web width on type II crossbar, or width

of the type III crossbar

D5b Bar width

D6 Track clearance

D7 Edge perimeter distance

Not shown — Wafer Tilt

SEMI E1-0697 © SEMI 1979, 2003 3

Figure 1

Wafer Carrier Outline — General Usage

NOTE: Used in conjunction with Table 1.

Table 2 Symbols Outline For Auto Transport Usage

Specifications

Figure 1A

Reference

Description

Overall Dimensions

A1 Length

A2a Width (with flange)

A2b Body width (measured at the crossbar)

A3 Height (excluding pin)

Capacity

Figure 1A

Reference

Description

B1 Pockets per carrier

B2 Pocket spacing (non-accumulative)

B3 Center distance from the 1st to last pocket

Detail Dimensions

C1 Pocket width

C2 Pocket depth

C3 Pocket flat

C4 Pocket size

SEMI E1-0697 © SEMI 1979, 2003 4

Figure 1A

Reference

Description

C5 Center of pin to center of hole

C6 Center pin to pin and hole to hole

Diameter of pin (2×) times height of pin

C8 Diameter of hole

C9 Center of pin/hole to center of first pocket

Machine Fit Specifications

D1a From the outside plane of the bar end to

the center line of the 1st pocket opening

D1b Slot parallelism-coincident tolerance for

center line of slots

D2a From the center line of the 1st pocket to

the closest point on the crossbar or web

D2b From the center of the 25th pocket to the

closest point on the endwall

D3a The step from the bar end of the carrier to

the crossbar (the tolerance indicates

allowable bow)

D3b The step from the bar end of the carrier to

the crossbar (the tolerance indicates the

allowable deviation measured at a

maximum distance of 1/2" from the

crossbar/sidewall junction)

D4a From the bottom of the carrier to the

center of the crossbar, measured at the bar

end of the carrier

D4b From the bottom of the carrier to the

center of a nominal 125 mm wafer,

measured with wafer in place and carrier

sitting on bottom

D5a Bar web width which is the mass of

material which may be present on the

crossbar and is measured perpendicular to

the top surface

D5b Bar width measured perpendicular to the

top surface

D5c From the bar end of the carrier to the

surface of the bar web (the tolerance

indicates allowable bow)

D6a Track clearance which is the unobstructed

area between the two carrier sides on the

bar end and the distance between the two

sides at the bottom of the carrier for the

entire length of the carrier

D6b On the bar end surface, the distance

between the two struts perpendicular to the

crossbar

D6c On the bar end surface, the thickness of

each of the two struts perpendicular to the

crossbar

D6d On the bar end surface, the length of each

of the two struts

endicular to and

Figure 1A

Reference

Description

extending above the crossbar

D6e On the bar end surface, the length of each

of the two struts perpendicular to and

extending below the crossbar

D6f Radius allowed on the crossbar

D6g The overall width at the bottom of the

carrier measured within 3/8 inch from the

bottom

Wafer Tilt The allowable deviation of the wafer from

a parallel position in relation to the plane

of the bar end of the carrier, when said

wafer properly positioned and carrier is

resting on the bar end. Wafer is said to be

properly positioned when it is fully

inserted in pocket and is centered.

Wafer

Center

The allowable deviation of the center point

of the wafer from the center line to the

carrier (see Section A.A. Figure 5) when

carrier is resting on bottom and wafer is

fully inserted.

Detailed Dimensions

Handling Slots

Dimensions

The handle slots are located on the bar end

and the opposite endwall of the carrier.

There are two slots on each end. These

slots are intended to be used as points for

engaging the carrier and picking it up.

Currently, these slots are used in both

manual and automated systems.

Dimensions D7a through D7d detail this

feature.

Pickup Flanges

Dimensions

The pickup flanges are located on the

endwall of the carrier only. They are not

present on the bar end. There are two

flanges on the endwall. These flanges are

intended to be used for engaging the

carrier and picking it up. Currently, these

flanges are used in both manual and

automated systems. Dimensions D8a

through D8e detail this feature.

Center Alignment Features

Dimensions

This feature is located on the bottom

sidewalls of the carrier. The center

alignment feature is used to find the

location of the first pocket. It is intended to

be used while the carrier is resting on its

bottom. This feature is used in conjunction

with wafer transfer machines and pick and

place equipment. Dimensions D9a through

D9k detail this feature.