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SEMI E37.2-95 © SEMI 1995, 2003 5 RELATED INFORMATION 1 APPLICATION NOTES NOTICE: This related information is not an official part of SEMI E37.2 and is n ot intended to modify or supercede the official standard. Publicat…

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SEMI E37.2-95 © SEMI 1995, 2003 4
10 HSMS-GS Documentation
10.1 An HSMS-GS implementation is required to
document the following information in addition to the
information required by HSMS.
1. The Session Entity List — specifically the number
of Session Entities available for HSMS-GS
communication and the value of their particular
Session Entity ID’s.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
SEMI E37.2-95 © SEMI 1995, 2003 5
RELATED INFORMATION 1
APPLICATION NOTES
NOTICE: This related information is not an official part of SEMI E37.2 and is not intended to modify or supercede the official
standard. Publication was authorized by full letter ballot procedures. Determination of the suitability of the material is solely the
responsibility of the user.
R1-1 Supporting Both HSMS-GS and HSMS-SS
Simultaneously
R1-1.1 In certain applications, the equipment
manufacturer may be faced with a requirement of
providing both HSMS-GS and HSMS-SS
communications interfaces. For example, a cluster tool
may use HSMS-GS as the intra-tool communications
and HSMS-SS as a GEM interface to the factory.
However, implementing a communications facility that
is simultaneously HSMS-SS- and HSMS-GS-
compliant is straightforward.
R1-1.2 Assuming that one has implemented an HSMS-
GS, a simple test can be added to the first Select.req
received by the equipment. If it is a Select for any
particular SessionID, then operate as HSMS-GS. If its
value is a -1, then copy the contents of the Session
Entity List corresponding TCP/IP IP address and port
number into the Selected Entity List. The Selection
Counter would be set to a special value, such as -1, to
indicate selection in this manner. The Separate would
provide the reverse function. If the passive entity is
implemented as an HSMS-SS node and the active entity
is an implementation that supports both modes of
operation, it must be explicitly configured to initiate the
Select with a Session ID of -1 and must have a Session
Entity List containing the Device IDs of all the
available sub-devices within the passive mode entity.
R1-1.3 In the local API for the case where the
equipment must originate the select, a configuration
parameter for the equipment could indicate which mode
to use for a particular remote target.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproductio
of the contents in whole or in part is forbidden without express writte
n
consent of SEMI.
SEMI E38-1296 © SEMI 1995, 19961
SEMI E38-1296
CLUSTER TOOL MODULE COMMUNICATIONS (CTMC)
1 Purpose
1.1 Cluster tools fulfill a need for modularity and
flexibility in semiconductor manufacturing equipment.
This standard addresses the communications with and
among modules within a cluster tool for automated
control.
1.2 The module communications services defined here
will enable standard interoperability of modules from
independent suppliers. Together with other cluster tool
standards, this is intended to result in the emergence of
standards-compliant interoperable sub-systems. They
should allow applications software to be developed
which can assume the existence of these services and
allow software products to be developed to offer them.
1.3 The adoption of the standards described will
greatly reduce the effort required to integrate cluster
tool components from independent suppliers.
Compliance requires support of a minimal, but specific,
set of standard services.
2 Scope
2.1 Cluster tool module communications address only
communications with and among modules within a
cluster tool and not the communications between the
cluster tool and the factory. It is the modules and their
interrelations which are modeled and not the cluster
tool seen as a single equipment.
2.2 This standard does not specify cluster controller
functionality (e.g., scheduling, human machine
interface, cluster tool recipe editing, and management)
but will enable development of standards in this area.
The cluster controller is included only to the extent that
it represents the entity or entities responsible for
supervisory control of the modules in a cluster tool.
2.3 This standard identifies the communications
services necessary to achieve automated control of
independent transport, process, and cassette modules in
a cluster tool. It defines the essential module
architecture and the concepts and models on which the
communications services are based.
2.4 The scope includes primary control services for
material processing in process modules, material
movement within the cluster tool, and material
input/output with the factory. Support services also
exist to enable recipe handling, resolution of exception
conditions, event reporting, and data access.
2.5 A reliable communications environment is
required for distributed control and is specified in
supplementary standards.
2.6 This standard specifies the application of more
general service standards as required within a cluster
tool. This includes the limitations imposed by the
cluster tool architecture and the fundamental
functionality needed for compliance. The details of the
general services, protocols, and communication
environment elements are defined in the corresponding
standards documents referenced.
2.7 This version of the standard is provisional because
a number of the general services on which it relies are
not yet standardized. The sections referring to these
services have been omitted until they have become
standards. These sections will be balloted separately
with the corresponding general services and
incorporated into this provisional standard.
2.8 The communication between the cluster tool as a
single equipment and the factory is beyond the scope of
cluster tool module communications standardized here
and should follow the applicable SEMI standards
(GEM, MMMS).
2.9 These standards place no restriction on where,
within the cluster tool control architecture, this specific
set of definitions is implemented. However, to have
complete compliance to the standards in the area of the
communications interface definitions, the entire layered
structure as outlined in this document must be
implemented.
3 Referenced Documents
3.1 SEMI Standards
SEMI E21 — Cluster Tool Module Interface:
Mechanical Interface and Wafer Transport Standard
SEMI E22 — Cluster Tool Module Interface: Transport
Module End Effector Exclusion Volume Standard
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E32 — Material Movement Management
Standard
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services