semi合集-English.pdf - 第4523页
SEMI D25-0600 E © SEMI 2000, 2003 6 Spacer T ype Interleaf T ype G las s S u b s t r a t e S pa ce r Prot ec t i ve Packaging G la ss S u b s t r a t e I nt erl e a f Figure 4 Separator Contact T ypes
SEMI D25-0600
E
© SEMI 2000, 2003 5
Glass Substrate
Lid
Figure 2
Full Box Type
4 Corner Supporter Type 2 Edge Supporter Type
Figure 3
Partial Box Type
SEMI D25-0600
E
© SEMI 2000, 2003 6
Spacer Type
Interleaf Type
Glass Substrate
Spacer
Protective
Packaging
Glass Substrate
Interleaf
Figure 4
Separator Contact Types
SEMI D25-0600
E
© SEMI 2000, 2003 7
x
y
z
x
y
z
≤ 1200
≤
1100
950
800
≤
830
Unit: mm
Skid
100
<150
Figure 5
Packing Box Concept