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SEMI E115-0302 E © SEMI 2002 14 RF out R A B Port 2 Port 1 Port 1 Port 2 Perform Calibrations at End of A dditional Test Cables Load Simulator Input Connection Outpu t Connec tion C2 C1 Netw ork An a l yz e r NOTE 1: Bot…

SEMI E115-0302

0.0

10.0

20.0

30.0

40.0

50.0

0 500 1000 1500

Real Impedance (ohms)

C1 Capacitance (pF)

NOTE 1: The real impedance varies from 1.2 ohms to close to 50 ohms.

Figure R1-3

Example Plot of the Real Part of the Load Impedance as a Function of the C1 Shunt Capacitor in the Load

Simulator

-40.0

-35.0

-30.0

-25.0

-20.0

-15.0

-10.0

-5.0

0.0

0 500 1000 1500

C2 = 500 pF

C2 = 1000 pF

C2 = 1500 pF

Reactive Impedance (ohms)

C1 Capacitance (pF)

NOTE 1: The C2 capacitance is at the indicated fixed value for each set of data. For this example, the reactive impedance varies

from around –40 ohms to –5 ohms. Decreasing C2 to 100 pF reduces the reactance to less than –100 ohms.

Figure R1-4

Example Plot of the Reactive Part of the Load Impedance as a Function of the C1 Shunt Capacitance in the

Load Simulator

SEMI E115-0302

RF out R

Port 2Port 1

Port 1

Port 2

Perform Calibrations

at End of Additional

Test Cables

Load Simulator

Input Connection

Output Connection

Network

Analyzer

NOTE 1: Both the Port 1 and Port 2 outputs need to be used for the measurement. Additional test cables are needed for the

transmission calibration between the two ports. The input connection of the Load Simulator attaches to Port 1 of the Network

Analyzer. The output connection of Load Simulator attaches to Port 2 of the Network Analyzer.

Figure R1-5

Schematic of a Load Simulator Test Setup for the Load Impedance and Efficiency Measurement

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SEMI E116-0705 © SEMI 2002, 2005 1

SEMI E116-0705

PROVISIONAL SPECIFICATION FOR EQUIPMENT PERFORMANCE

TRACKING

This specification was technically approved by the global Information & Control Committee. This edition

was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was

available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published July 2002;

previously published November 2004.

1 Purpose

1.1 This document provides specification for implementing basic equipment performance tracking for production

equipment. Provisions in this document enable the host computer to track basic equipment performance in an

automated and consistent matter, without operator or host input. This document provides specification for

equipment suppliers to:

 Track basic equipment states (no operator or host input required).

 Track basic equipment states in a modular manner, for both major modules and the overall equipment.

 Report basic equipment state changes to a host computer, at both module and equipment level.

 Report equipment’s time in state to a host computer, at both module and equipment level.

 Report reasons to a host computer for why equipment is blocked from performing its task, at both module and

equipment level.

1.2 Equipment users require the ability to track equipment performance without dependence on user input to

eliminate inaccuracies due to incorrect or untimely input from the user. The ability to track equipment performance

without user input is essential in 300 mm wafer factories where operational scenarios require minimal manual

interaction. EPT defines concepts, behavior, and message services that enable the host computer to obtain the

equipment data required for equipment performance tracking in an automated and consistent matter without operator

or host input.

1.3 EPT enables factory managers to identify the current states of factory equipment, both at the equipment level

and at the module level (e.g., processing chambers), without dependence on user input. EPT enables factory

engineers to evaluate the time that equipment and modules spent in different states and identify areas for

improvement. EPT enables factory engineers to obtain directly from the equipment the reasons why the equipment

or module is prevented from performing. EPT provides industrial engineers the equipment data which, when

combined with external data from the Manufacturing Execution System (MES), will enable accurate calculation of

SEMI E10 states and SEMI E79 metrics at the equipment-level and the module-level. EPT enables automation

engineers to develop reusable host interfaces by using a standardized collection event and data variables to collect

equipment state data.

2 Scope

2.1 The Scope of this standard is to define equipment behavior states and the data required to track basic equipment

performance for production equipment. These requirements are intended to facilitate equipment-level and module-

level state tracking and to communicate state information to the host for simple equipment performance tracking,

without requiring host or operator input.

2.2 Specifically, this document provides:

 An Equipment Performance Tracking (EPT) state model that defines triggers for state changes.

 Specification of data variables required to communicate basic equipment performance data to the host

computer.

 Specification of event messages used to communicate basic equipment performance data to the host computer.

 Requirements for EPT compliance.