semi合集-English.pdf - 第1188页

SEMI E5-1104 © SEMI 1982, 2004 130 Stream,Function Name (Mnemonic) Direction S6,F28 Trace Report Send Acknowledge S,H->E Description The host Acknowledges receipt of the Trace Repo rt. Structure <TRID> Exception…

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SEMI E5-1104 © SEMI 1982, 2004 129
Stream,Function Name (Mnemonic) Direction
S6,F27 Trace Report Send (TRS) M,H<-E,[reply]
Description
The equipment sends a completed Trace Report to the host.
Structure
L,3
1. <DATAID>
2. <TRID>
3. L,n (n cannot exceed group size specified by S2F53)
1. L,p (p is the number of reports for each trace sample)
1. L,2
1. <RPTID
1
>
2. L,m (number of items in this data report)
1. <V
1
>
.
.
m. <V
m
>
.
.
p. L,2
1. <RPTID
p
>
2. L,m
1. <V
1
>
.
.
m. <V
m
>
.
.
n. L,p (p is the number of reports for each trace sample)
1. L,2
1. <RPTID
1
>
2. L,m (number of items in this data report)
1. <V
1
>
.
.
m. <V
m
>
.
.
p. L,2
1. <RPTID
p
>
2. L,m
1. <V
1
>
.
.
m. <V
m
>
Exception
The lists of variables associated with a unique RPTID are also unique. This structure illustrates the form of the message, so in
general, V
1
for RPTID
a
and V
1
for RPTID
b
do not reference the same variable.
SEMI E5-1104 © SEMI 1982, 2004 130
Stream,Function Name (Mnemonic) Direction
S6,F28 Trace Report Send Acknowledge S,H->E
Description
The host Acknowledges receipt of the Trace Report.
Structure
<TRID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F29 Trace Report Request (TRR) S,H->E
Description
Request that the data reports assigned to the trace report be sampled and returned to the host.
Structure
<TRID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F30 Trace Report Data (TRD) M,H<-E
Description
Message containing the requested data reports associated with the TRID of trace data report definition.
Structure
L,3
1. <TRID>
2. L,n (n = number data reports defined for this TRID)
1. L,2
1. <RPTID
1
>
2. L,m (m = number of items in this RPTID)
1. <V
1
>
.
.
m. <V
m
>
.
.
n. L,2
1. <RPTID
n
>
2. L,m (m = number of items in this RPTID)
1. <V
1
>
.
.
m. <V
m
>
3. <ERRCODE>
Exception
If TRID is unknown, a zero-length list (n = 0) shall be sent. Item 3 (ERRCODE) shall be set to zero length when there is no
error.
10.11 Stream 7 Process Program Management — The functions in this stream are used to manage and transfer
process programs. Process programs are the equipment-specific descriptions that determine the procedure to be
conducted on the material by a single piece of equipment. Methods are provided to transfer programs as well as
establish the link between the process program and the material to be processed with that program.
SEMI E5-1104 © SEMI 1982, 2004 131
Stream,Function Name (Mnemonic) Direction
S7,F0 Abort Transaction (S7F0) S,H<->E
Description
Same form as S1,F0
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S7,F1 Process Program Load Inquire (PPI) S,H<->E,reply
Description
This message is used to initiate the transfer of a process program or to select from stored programs. The message may be used to
initiate the transfer of an unformatted process program (S7,F3/S7,F4) or a formatted process program
(S7,F23/S7,F24),(S7,F31/S7,F32).
Structure
L,2
1. <PPID>
2. <LENGTH>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F2 Process Program Load Grant (PPG) S,H<->E
Description
This message gives permission for the process program to be loaded.
Structure
<PPGNT>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F3 Process Program Send (PPS) M,H<->E,reply
Description
The program is sent. If S7,F3 is multi-block, it must be preceded by the S7,F1/S7,F2 Inquire/Grant transaction.
Structure
L,2
1. <PPID>
2. <PPBODY>
Exception
None