semi合集-English.pdf - 第4285页
SEMI F80-1103 © SEMI 2003 5 Figure 11 Procedure 7.2.6 Figure 12 Procedure 7.2.7 8 Reporting Results 8.1 Th e following items shall be stated on the test report. • Test d ate and time, • Name of an operator, • Test te mpe…
SEMI F80-1103 © SEMI 2003 4
7.2 Case (2) — This is the test method in consideration
of gas change in the gas delivery system.
7.2.1 A recommended test flow schematic is shown in
Figure 8.
7.2.2 The test is to evaluate a gas change performance
in the gas delivery systems by using process line.
7.2.3 Set each component for the following condition
before starting the test. APV1, APV2, APV3, APV4,
and APV5 are closed condition. Rest of the components
in the System Under Test are open condition. Supply
Gas A to the upstream of APV1. Supply Gas B to the
upstream of APV2. (See Figure 8.)
7.2.4 Open APV5 and flow Gas A from Bypass line.
(1) Close PV2 and PV4, open APV3, and vacuum the
System Under Test. (2) (See Figure 9.)
7.2.5 (a) Close APV3, open APV1, and flow Gas A to
process line. (b) Close APV1, open APV3, and vacuum
process line. Then, close APV3, open and close APV1,
and open APV3. (c) Repeat this operation (b) 3 times
and close APV3 to sufficiently fill process line with
Gas A. (3) (See Figure 10.)
7.2.6 Open APV1and close APV5. Then open APV4
and flow Gas A to the System Under Test. Measure the
concentration of Gas A by measuring equipment. (See
Figure 11.)
7.2.7 Close APV1, open APV2, and flow Gas B to the
System Under Test. The measuring equipment
continuously monitors the Gas A concentration. Record
the time to achieve required concentration for Gas A
from the start of flowing Gas B. (See Figure 12.)
Figure 8
Gas Change/Purge Efficiency Test Schematic Case 2
(1)
(2)
Figure 9
Procedure 7.2.4
(3)
Figure 10
Procedure 7.2.5
SEMI F80-1103 © SEMI 2003 5
Figure 11
Procedure 7.2.6
Figure 12
Procedure 7.2.7
8 Reporting Results
8.1 The following items shall be stated on the test
report.
• Test date and time,
• Name of an operator,
• Test temperature,
• Flow rate of Gas A and Gas B,
• Name of Gas A and Gas B,
• Pressure of Gas A and Gas B,
• Name of the measuring equipment and model,
• Measuring condition of the measuring equipment
(ex. APIMS: Scan time, Mass range, and
measuring range),
• Minimum detectable limit of the measuring
equipment, and
• Relationship between gas concentration and test
time.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F81-1103 © SEMI 2003 1
SEMI F81-1103
SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF
GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION
SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on September 3, 2003. Initially available at www.semi.org October 2003; to be published
November 2003.
1 Purpose
1.1 The purpose of this specification is to provide
visual inspection and acceptance criteria for gas
tungsten arc (GTA) welds of stainless steel and other
corrosion resistant metals and alloys (CRAs) in fluid
(liquid or gas) distribution systems in semiconductor
manufacturing applications. These criteria are meant to
ensure that welds are of sufficient quality to provide the
required system purity, weld integrity, and weld
strength for use in semiconductor manufacturing
applications.
2 Scope
2.1 This specification defines inspection and
acceptance criteria for GTA autogenous butt joint welds
of stainless steel and other CRAs in fluid distribution
systems. The fluid distribution system includes tubing,
pipe, fittings, valves, subassemblies and components
that contain and distribute fluid.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 The stainless steels covered by this specification
are limited to the austenitic and superaustenitic grades
of stainless steel.
3.2 Corrosion resistant metals and alloys covered by
this specification are limited to solid solution grades of
nickel alloys and solid solution grades of titanium
alloys.
3.3 This specification applies only to autogenous GTA
circumferential butt joint welds performed on fluid
distribution system components 6 inches (150 mm) or
less in diameter.
3.4 This specification applies only to automatic,
mechanized, or machine GTA welding processes.
3.5 This specification applies only to welds performed
with no fillers and no fluxes.
3.6 This specification does not apply to pressure vessel
or process chamber welds.
4 Referenced Standards
NOTE 1: The following documents become part of the guide
to the extent that they are included herein.
4.1 SEMI Standard
SEMI F78 — Practice for Gas Tungsten Arc (GTA)
Welding of Fluid Distribution Systems in
Semiconductor Manufacturing Applications
4.2 ASME Standard
1
BPE — Bioprocessing Equipment Standard
4.3 AWS Standard
2
AWS QC-1 — Standard for AWS Certification of
Welding Inspectors
AWS A3.0 — Standard Welding Terms and Definitions
4.4 ASNT Standard
3
ASNT SNT-TC-1A — Guideline to Personnel
Qualification and Certification in NDT
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
1 American Society of Mechanical Engineers, Three Park Avenue,
New York, NY 10016-5990, USA. Telephone: 800.843.2763
(U.S./Canada), 95.800.843.2763 (Mexico), 973.882.1167 (outside
North America), Website: www.asme.org
2 American Welding Society, 550 NW LeJeune Road, P.O. Box
351040, Miami, Florida 33135