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SEMI E84-0305 © SEMI 1999, 2005 44 Table A1-8 Example Active Equipment Error Messages No. Time r Name Equipment Error Me ssage 1 TA1 TA1 Timeout – L_REQ/U_REQ signal did not turn ON within specified time. (TA1 = xxx) 2 T…

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SEMI E84-0305 © SEMI 1999, 2005 43
No. Description of Passive Equipment HO_AVBL Signal Response
9 Manual Placement of a FOUP onto a Load Port in Auto Access Mode OFF
10 ES Signal OFF OFF
#1
During normal load/unload operation the presence and placement sensors may turn on/off for a very short period.
A1-4.5 ES Signal
A1-4.5.1 The ES signal allows the Passive Equipment to signify to the Active Equipment any specific instance
where the material, product, or operation is in jeopardy. The ES Signal is not loadport specific but rather tool
specific. That means, for example, if an EMO is pressed on the Passive Equipment the ES signal should be OFF on
all SEMI E84 loadports. Table A1-7 shows some specific scenarios for the ES Signal.
Table A1-7 Example ES Signal Scenarios
No. Description ES Signal Response
1 EMO button is pressed. OFF
2
Interlocked maintenance door or interlocked panel on the Passive
Equipment is opened
OFF
3
Carrier Handling Robot is in Error at the load port (internal buffer
equipment or stocker)
OFF
A1-4.6 L_REQ and U_REQ Signals
A1-4.6.1 When the L_REQ and U_REQ signals are turned OFF they verify the completion of the Load/Unload
sequence as indicated by the presence/placement sensors on the load port.
A1-4.6.1.1
Here are some practical examples of using these signals.
1) During a Load both Presence and Placement sensors are ON once the carrier is detected. This should signal the
L_REQ signal to turn OFF. The L_REQ signal should typically not turn OFF unless both the presence and
placement sensors are ON.
2) When delivering, the Active Equipment should not release the FOUP until L_REQ is OFF.
3) During an Unload both Presence and Placement sensors are OFF once the carrier is not detected. This should
signal the U_REQ signal to turn OFF. The U_REQ signal should typically not turn OFF unless both the presence
and placement sensors are OFF.
4) The L_REQ and U_REQ signals should turn off immediately after the presence and placement sensors have
turned ON (load) or OFF (unload). There should be no delay timer between the presence and placement sensor
ON/OFF and L_REQ / U_REQ OFF.
5) During an Unload, once the active vehicle has fully gripped the FOUP, in most cases the vehicle should ignore
the response from the U_REQ signal until completion of its move. For example, the OHT vehicle should not stop
150 mm – 300 mm above the loadport, check the status of U_REQ and then complete its move. The OHT should
fully complete its move, check U_REQ and finish the E84 sequence. If the U_REQ signal is still high after the
completion of its move and the active vehicle can be certain the carrier is safely and securely contained aboard the
vehicle, in some cases the vehicle should abort the E84 sequence and continue normally to its destination.
A1-4.7
Error Messages
A1-4.7.1 Interlock timeouts are required to detect handoff sequence errors between the active and passive
equipment. When these timeouts occur, an error message shall be displayed to the user including the following
information: Timer Name, Timer Description, and current Timer setting. Some examples of error messages are
listed in Tables A1-8, A1-9, and A1-10.
SEMI E84-0305 © SEMI 1999, 2005 44
Table A1-8 Example Active Equipment Error Messages
No. Timer Name Equipment Error Message
1 TA1 TA1 Timeout – L_REQ/U_REQ signal did not turn ON within specified time. (TA1 = xxx)
2 TA2 TA2 Timeout – READY signal did not turn ON within specified time. (TA2 = xxx)
3 TA3 TA3 Timeout – READY signal did not turn OFF within specified time. (TA3 = xxx)
#1
“xxx” refers to the time in seconds that the specific timer was set to.
Table A1-9 Example Passive Equipment Error Messages
No. Timer Name Equipment Error Message
1 TP1 TP1 Timeout – TR_REQ signal did not turn ON within specified time. (TP1 = xxx)
2 TP2 TP2 Timeout – BUSY signal did not turn ON within specified time. (TP2 = xxx)
3 TP3 TP3 Timeout – Carrier was not detected/removed within specified time. (TP3 = xxx)
4 TP4 TP4 Timeout – BUSY signal did not turn OFF within specified time. (TP4 = xxx)
5 TP5 TP5 Timeout – VALID signal did not turn OFF within specified time. (TP5 = xxx)
6 TP6 TP6 Timeout – VALID signal did not turn ON within specified time. (TP6 = xxx)
#1
“xxx” refers to the time in seconds that the specific timer was set to.
Table A1-10 Example Delay Timer Error Messages
No. Timer Name Equipment Error Message
1 TD0 TD0 Timeout – VALID signal did not turn ON within specified time. (TD0 = xxx)
2 TD1 TD1 Timeout – VALID signal did not turn ON within specified time. (TD1 = xxx)
#1
“xxx” refers to the time in seconds that the specific timer was set to.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that some implementations of this standard may involve use of
inventions covered by U.S. patents 4,306,292 and other patents issued or pending, held by Texas Instruments
Incorporated. By publication of this standard, SEMI takes no position respecting either the applicability or the
validity of these or other patent rights asserted in connection with any item mentioned in this standard. Users of this
standard are expressly advised that determination of any such patent rights, and the risk of infringement of such
rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
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consent of SEMI.
SEMI E86-0200 © SEMI 1999, 20001
SEMI E86-0200
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK FACTORY
LABOR COMPONENT
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on October 21, 1999. Initially available at www.semi.org
January 2000; to be published February 2000. Originally published September 1999.
1 Purpose
1.1 The Factory Labor Component provides the
capability to support the qualification and management
of available, qualified human resources for manufact-
uring operations.
1.2 The technical content of this ballot addresses the
portion of the CIM Framework domain specified in
SEMI E81, Provisional Specification for CIM
Framework Domain Architecture, concerned with
management of the availability of qualified factory
personnel. This specification provides the interfaces
required by Manufacturing Execution Systems to:
• Configure the Person resource model.
− Each Person’s name (or appropriate alias),
identification, department, role, etc. There
may be cases where identifying information
should not be used to associate a person with
the required factory labor records.
− Each Person’s initial skills and authorization to
perform jobs and access data.
− Each Person’s initial assignment to other
factory resources (such as specific machines or
factory areas).
− Each Person’s medical qualifications.
• Define skill maintenance tasks and what triggers
them.
• Track and report the Person’s skills, authorization,
and assignments and record these in the Person’s
histories.
• Support assignment of Persons to factory jobs and
monitor and record job progress (from the
perspective of the Person’s role).
• Monitor skill maintenance triggers (such as expired
skill certification) and recommend skill mainten-
ance jobs.
• Execute triggered skill maintenance jobs.
− Change Person capabilities (before and after
training).
− Execute and monitor skill maintenance jobs
(training, certification testing) and report job
progress.
− Record skill maintenance triggers and job
results in Person’s skill maintenance histories.
• Collect and report Person and skill performance
(utilization and effectiveness).
• Maintain relationships between Persons and system
security for identity authentication and
authorization.
2 Scope
2.1 Specifically, this component provides the services
to:
• Manage the assignment of qualified and available
labor resources for factory operations.
• Manage the training and medical requirements for
factory operations.
• Support the maintenance of personnel information
(full name, employee number, department, shift
assignment, machines qualified to operate, course
and medical examination records).
• Support the maintenance of personnel skill qual-
ification histories (courses and medical examina-
tions successfully completed) of factory personnel.
2.2 The Factory Labor Component is divided into two
subcomponents:
• Person Management, which tracks, logs, and main-
tains availability and task assignment for factory
operations personnel within the manufacturing
facility. Also provides support for the management
of personnel information, training, and medical
qualifications.
• Skill Management, which provides support for the
management of training and medical requirements
for factory operations.
2.3 Figure 1 depicts the relationships between these
two components and their interaction with other CIM
Framework components defined in the Section 7.2
Functional Partitioning of SEMI E81, Provisional