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SEMI E37.1-0702 © SEMI 1995, 2002 1 SEMI E37.1-0702 HIGH-SPEED SECS MESSAGE SE RVICE SINGLE SELECTED- SESSION MODE (HSMS- SS or HSMS-SSS) This standard was technically approved by the G lobal Information and Control Co m…

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SEMI E37-0303 © SEM 1995, 2003 21
Feature SECS-I HSMS
Header Ten-byte header on each block of a message.
Header bytes 4-5 contains E-Bit and Block
Number.
One ten-byte Header for the entire message. Header
bytes 4–5 contain PType and SType. Header bytes
2–3 are W-Bit, Stream, and Function when SType =
0 (Data Message). For SType not equal to 0 (Control
Message), bytes 2–3 have other uses. No R-Bit.
Maximum message size Limited to approximately 7.9 million bytes
(32767 blocks times 244 text bytes per block).
Message size limited by 4-byte message length
(approximately 4 GBytes). Local implementation of
TCP/IP and HSMS may further limit this in practice.
Protocol Parameters
(Common)
T3 Reply Timeout Device ID T3 Reply Timeout Session ID (analogous to Device
ID).
Protocol Parameters
(SECS-I only)
Baud Rate
T1 Inter-Character Timeout
T2 Block Protocol Timeout
T4 Inter-Block Timeout
RTY Retry Count
Host/Equipment
Not used in HSMS. Corresponding issues addressed
by TCP/IP layers.
Protocol Parameters
(HSMS Only)
Not needed by SECS-I. IP Address and Port of Passive Entity.
T5 Connect Separation Timeout.
T6 Control Transaction Timeout.
T7 NOT SELECTED Timeout.
T8 Network Intercharacter Timeout.
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E37.1-0702 © SEMI 1995, 2002 1
SEMI E37.1-0702
HIGH-SPEED SECS MESSAGE SERVICE SINGLE SELECTED-
SESSION MODE (HSMS-SS or HSMS-SSS)
This standard was technically approved by the Global Information and Control Committee and is the direct
responsibility of the Japan Information and Control Committee. Current edition approved by the Japan
Regional Standards Committee on April 26, 2002. Initially available at www.semi.org June 2002; to be
published July 2002. Originally published in 1995; previoulsy published in 1996.
1 Purpose
1.1 HSMS-SS provides a means for independent
manufacturers to produce implementations which can
be connected without requiring specific knowledge of
one another.
1.2 HSMS-SS is intended as an alternative to SEMI E4
(SECS-I) for applications where higher speed
communication is needed.
1.3 HSMS-SS is intended as an alternative to SEMI
E13 (SECS Message Services) for applications where
TCP/IP is preferred over OSI as a communications
basis.
2 Scope
2.1 High-Speed SECS Message Services Single-
Session Mode (HSMS-SS) is a subsidiary standard to
High-Speed SECS Message Services (HSMS) Generic
Services.
2.2 These standards do not purport to address safety
issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Reference Standards
NOTE 1: Unless otherwise indicated, all documents cited
shall be the latest published versions.
3.1 SEMI Standards
SEMI E4 — SEMI Equipment Communication
Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communication
Standard 2 Message Content (SECS-II)
SEMI E37 — High-Speed SECS Message Services
(HSMS) Generic Services
4 Terminology
4.1 Definitions
4.1.1 device ID — a 15-bit field in the message header
used to identify a subentity within the equipment.
4.2 In addition, all definitions for HSMS Generic
Services apply.
4.3 Note that the terms HSMS and HSMS generic
services both refer to the HSMS Generic Services
standard definition (SEMI E37).
5 HSMS-SS Overview and State Machine
5.1 This definition defines the HSMS-SS-specific use
of HSMS Generic Services suitable for applications
requiring a simple SECS-I replacement. The purpose of
this standard is to explicitly limit the capabilities of the
HSMS Generic Services to the minimum necessary for
this type of application. Specifically, HSMS imposes
the following limitations:
1. HSMS-SS eliminates the use of a number of HSMS
procedures. Deselect is not to be used to end HSMS-
SS communications (use Separate instead), and the
Reject procedure is optional.
2. HSMS-SS limits certain other procedures such as
Select to simplify operation for the specific case of
SECS-I replacement.
5.2 The remainder of this document describes these
limitations in more detail.
5.3 HSMS-SS State Machine — The HSMS-SS
behavior and state machine differ from that specified in
the HSMS Generic Services in the following ways:
1. The SelectionCounter defined in HSMS Generic
Services is not required.
2. Various transitions are defined differently as
illustrated in the HSMS-SS state machine illustrated
below.
SEMI E37.1-0702 © SEMI 1995, 2002 2
5.4 The HSMS-SS state machine is illustrated in the diagram below.
Figure 1
5.5 State Transition Table for Passive Mode Connect
Table 1 HSMS-SS Passive Mode Connect State Transitions
# Old State New State Trigger Actions
1
—
TCP/IP NOT
CONNECTED
Initialization
2 TCP/IP NOT
CONNECTED
HSMS NOT
SELECTED
TCP/IP Connect Succeeds:
1. TCP/IP “accept” succeeds.
Start T7 timeout.
3 HSMS NOT
SELECTED
HSMS
SELECTED
HSMS Select Succeeds:
1. Receive Select.req and decide to
allow it.
1. Cancel T7 timeout; and
2. Send Select.rsp with zero
SelectStatus.
4 HSMS NOT
SELECTED
TCP/IP NOT
CONNECTED
HSMS Select Fails:
1. T7 Timeout waiting for Select.req;
or
2. Receive Select.req and decide to
reject it and send Select.rsp with non-
zero SelectStatus; or
3. Receive any HSMS message other
than Select.req; or
4. Receive HSMS message length not
equal to 10; or
5. Receive bad HSMS message header;
or
6. T8 timeout waiting for TCP/IP; or
7. Other unrecoverable TCP/IP Error
(entity-specific).
1. Close TCP/IP connection.