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SEMI E127-0705 © SEMI 2003, 2005 36 14.3.5.4 SummaryD ata — The content of a row represents a set of measurem ents, and properties of thos e measurements, taken at a single site. SummaryData is information that su mmariz…

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SEMI E127-0705 © SEMI 2003, 2005 35
Table 14 Attribute Elements for IMM Data Table Object
Attribute Name Definition Access Reqd Form
RegionDef Defines a region where a sequence of rows
represent measurements within that region.
RO Y Structure consisting of
RegionID
FirstRowID
FirstRowNum
LastRowNum
RegionID A text string that uniquely defines a region.
May be recipe-defined.
RO Y Text. For tables containing
measurements from both sides of a
substrate, the text shall begin with
either “Front” or “Back”. Additional
text may be added to represent
regions within the front or back side.
FirstRowID Row identifier for 1
st
row in the region. RO Y Any simple form except floating
point.
FirstRowNum The sequence number of the first row within
the region as it appears within a table. The first
row in the table has a sequence number of 1,
the second row has a sequence number of 2,
etc.
RO Y Positive integer.
LastRowNum The sequence number of the last row within the
region as it appears within a table.
RO Y Positive integer.
SummaryData Name and value of a specific summary
element.
RO Y Structure consisting of
SummaryDataName
SummaryDataValue
SummaryDataForm
SummaryDataUnits.
SummaryDataName Name of a specific element of summary data. RO Y Text.
SummaryDataValue Actual value of SummaryDataItem. RO Y Any valid form of data.
SummaryDataForm Identifies the data form of SummaryDataValue. RO Y Enumerated per SEMI E39 Data
Form definitions.
SummaryDataUnits Identifies the units, if any, in which
SummaryDataValue is expressed.
RO Y Enumerated text per SEMI E5, §9.
14.3.5.3 RegionRanges — A region is a group or set of site measurement and can be represented within a table by a
sequential set of rows. To describe a region, it is only necessary to define these rows. Completion of measurements
with a region corresponds to transition 3 in the IMM Data Table Object State Model.
14.3.5.3.1 RegionID — The identifier of a region is required for tables containing measurements made at both sides
of a substrate. In addition, it is useful for other applications to be able to quickly identify the region of primary
interest. In the former case, standard text strings are required. In the second case, identifiers are typically defined
by the measurement recipe, but this is not a requirement.
14.3.5.3.2 FirstRowID — A SEMI E58-compliant table requires the first entry within a row to be unique among all
first row entries within the table. In addition, it must have a simple form (numeric, text, or Boolean) and can not be
floating point. This requirement allows the first entry to be used as a row identifier. Using the row identifier
FirstRowID within RegionDef provides a double check for the client when counting rows.
14.3.5.3.3 FirstRowNum and LastRowNum — All rows appear in a certain sequence within a table. There is a first
row, a second row, etc. In a table with n rows of data, the last row would be the nth row. In a generic SEMI E58
table, rows are not required to be ordered, but for an IMM Data Table Object, rows appear in exactly the same
sequence as measurements were made. Providing the row numbers of the first and last rows allow an external
application to count rows quickly. Verification of the counting accuracy occurs through the provision of the
FirstRowID. If the LastRowNum of one region is i, then the FirstRowNum of the FirstRow of the following region
will have a FirstRowNum value of i + 1.
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14.3.5.4 SummaryData — The content of a row represents a set of measurements, and properties of those
measurements, taken at a single site. SummaryData is information that summarizes the row content, typically
statistically. This is often the information examined first by applications such as Advanced Process Control.
14.3.5.4.1 Examples of SummaryData include:
<“MeanThickness”, .002, “float”, “mm”>
<“StdDevThickness”, .0005, “float”, “mm”>
14.4 IMM Data Table Object Event Variables
14.4.1 Table 15 specifies variables in alphabetical order that shall be available for events associated with all
subtypes of IMM Data Table Object. The Event column identifies any specific state model associated with the
variable.
Table 15 Event Variables for IMM Data Table Objects
Variable Name Description Type Event Comment
DataItem
i
Column data for I = 1,n. Dependent on
specific column
format.
IMMDTOSM:T2. Actual data from row, all n
columns, for transition 2 only.
DateTime The date and time that the event
occurred.
Conforms to the
clock format in
SEMI E98.
All.
GroupNum Identifies the group associated with
the event.
Unsigned
integer.
IMMDTOSM:T3. For transition 3 only.
IMM_ID ObjID of this IMM. Text. All transitions of
IMMDTOSM.
LotID Value of LotID for the table
associated with the event.
Text. All.
RecipeID Recipe identifier for the recipe being
used for measurement, conversion,
or substrate calibration.
Text. All transitions of
IMMDTOSM.
RowNum Identifies the row associated with
the event.
Unsigned
integer.
IMMDTOSM:T2. For transition 2 only.
SubstID Value of SubstID for the table
associated with the event.
Text. All. Identifies the associated substrate.
SubstIDRead Value of SubstIDRead for the table
associated with the event.
Text. All. Identifies the substrate ID value as
read. SubstID may be in the form
of a SEMI E90 default ID.
TableID ObjID of the table associated with
the event.
Text. All transitions of
IMMDTOSM.
Identifies the table with the event.
TableType ObjType of the table associated with
the event.
Text. All transitions of
IMMDTOSM.
Subtype of IMM Data Table
object.
14.5 Types of IMM Data Table Objects
14.5.1 All of the data generated by both the physical measuring process and a software data conversion process is
placed into an IMM Data Table subtype. As shown in Figures 8 and 9, the IMM Data Table object has three
concrete subtypes, the IMM Calibration Data Table, IMM Raw Data Table, and IMM Converted Data Table objects.
All IMM Data Table objects shall be one of these three subtypes.
14.5.1.1 A limited set of required information shall be provided in row data:
site location where measurement was made (x,y coordinates, or x,y,z coordinates).
substrate side measured, where this varies from one set of sites to another within one table.
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14.5.2 All subtypes of the IMM Data Table inherit the attributes and state model of the IMM Data Table object.
Additional attributes are also defined for each subtype in the following sections.
14.5.3 IMM Raw Data Table Object
14.5.3.1 The IMM Raw Data Table object holds the sensor-based measurements collected during the physical
measurement process. Table 16 defines the attributes for the IMM Raw Data object.
Table 16 IMM Raw Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y String assigned by IMM.
ObjType Type of Object. RO Y Text = “TableIMM_RawData”.
MeasurementRecipeID Identifies the measurement recipe. RO Y Text.
14.5.4 IMM Converted Data Table Object
14.5.4.1 The IMM Converted Data Table Object holds the data that is converted into information needed for
analysis of the substrate properties for advanced process control and post-mortem problem solving. Its attributes are
defined in Table 17.
Table 17 IMM Converted Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text assigned by the IMM.
ObjType Type of Object. RO Y Text = “TableIMM_ConvertedData”.
ConversionRecipeID Conversion Recipe identifier (may
be the name of the IMM recipe).
RW Y Text.
FeatureType Type of feature extracted. RO Y Enumerated text:
“CD linewidth”
“Thickness”
“Reflectivity”
“GoodnessOfFit”
….
RawDataTable ObjID of IMM Raw Data Table
object.
RO Y Text.
14.5.4.2 Event Variables for Conversion Data Table Objects — Table 18 specifies event variables required for
Conversion Data Table Objects in addition to those defined in Table 15.
Table 18 Event Variables for Conversion Data Table Object
Variable Name Description Type Event Comment
DateTime The date and time that the event
occurred.
Conforms to the clock
format in SEMI E98.
All.
FeatureType Type of feature extracted –
corresponds to the attribute of
the same name.
Enumerated text All events of the
IMMDTSM.
14.5.5 IMM Calibration Data
14.5.5.1 The IMM Calibration Data object is used to hold the results of a formal substrate calibration process
performed on a known good wafer. It includes both expected and actual data. Its attributes are defined in Table 19.