semi合集-English.pdf - 第2958页
SEMI E109.1-0704 © SEMI 2002, 2004 4 Parameter Name Parameter Range SECS-II Data Item PodPropertiesList List of Attr ibuteID and AttributeData L,n 1.L,2 1.<AT TRID 1 > 2.<AT TRDATA 1 > : n.L,2 1.<AT TRID n…
SEMI E109.1-0704 © SEMI 2002, 2004 3
Parameter Name Parameter Range SECS-II Data Item
ArrivingReticleList List of n structures, where
n = capacity
Reticle ID
ReticleRemovalinstruction
ReticlePropertiesList
When a slot in a pod contains no reticle, the value for Reticle ID
should be null, the ReticleRemovalInstruction
n
should be PASS
BY, and the ReticlePropertiesList
,
should be a zero length list.
L,n
1. L,3
1.<RETICLEID
1
>
2.< RETREMOVEINSTR
1
>
3. L,m
1. L,2
1. <ATTRID
1,1
>
2. <ATTRDATA
1,1
>
:
m. L,2
1.<ATTRID
1,m
>
2.<ATTRDATA
1,m
>
:
n. L,3
1.<RETICLEID
n
>
2. <RETREMOVEINSTR
n
>
3. L,m
1. L,2
1. <ATTRID
n,1
>
2. <ATTRDATA
n,1
>
:
m. L,2
1. <ATTRID
n,m
>
2. <ATTRDATA
n,m
>
CMAcknowledge Enumerated CAACK
CMStatus Structure L,2
1.<CAACK>
2.Status
Data 1–80 characters DATA
DataSeg 1–80 characters DATASEG
DataSize 0–65,535 (integer) DATALENGTH
DepartingReticleList List of n structures, where
n = capacity
Reticle ID
ReticlePlacementInstruction
When a slot in a pod contains no reticle and will not have a reticle
placed, the value for Reticle ID
should be null and the
ReticlePlacmentInstruction
n
should be PASS BY.
L,n
1. L,2
1.<RETICLEID
1
>
2.<RETPLACEINSTR
1
>
:
n. L,2
1.<RETICLEID
n
>
2.<RETPLACEINSTR
n
>
DestinationLocation 1–80 characters RPMDESTLOC
ErrorCode Enumerated ERRCODE
ErrorText 1–80 characters ERRTEXT
InputPortID U1(0, 101–255) INPTN
OutputPortID U1(0, 101–255) OUTPTN
PodAttributeData Any ATTRDATA
PodAttributeID 1–40 characters ATTRID
PodID 1–64 characters PODID
SEMI E109.1-0704 © SEMI 2002, 2004 4
Parameter Name Parameter Range SECS-II Data Item
PodPropertiesList List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.<ATTRID
n
>
2.<ATTRDATA
n
>
PortID U1(101–255) PTN
PortList List of PortID L,n
1.<PTN
1
>
:
n.<PTN
n
>
ReticleAttributeData Any ATTRDATA
ReticleAttributeID 1–40 characters ATTRID
ReticleLocation-
AttributeData
Any ATTRDATA
ReticleLocation-
AttributeID
1–40 characters ATTRID
ReticlePlacement-
Instruction
Enumerated:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
RETPLACEINSTR
ReticlePodLocationID 1–80 characters CATTRID
ReticleRemoval-
Instruction
Enumerated:
0 = REMOVE
1 = PASS BY
RETREMOVEINSTR
ReticleID 1–64 characters RETICLEID
ReticleLocation-
PropertiesList
List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.<ATTRID
n
>
2.<ATTRDATA
n
>
ReticlePropertiesList List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.< ATTRID
n
>
2.< ATTRDATA
n
>
SEMI E109.1-0704 © SEMI 2002, 2004 5
Parameter Name Parameter Range SECS-II Data Item
RPMAcknowledge Enumerated:
0 = Acknowledge, service has been performed
1 = Service does not exist
2 = Cannot perform now
3 = At least parameter is invalid
4 = Acknowledge, service will be performed with completion
notified later with parameters for response
5 = Service is not completed or prohibited
6 = no such objects exist
7–63 Reserved
SVCACK
RPMStatus List of RPMAcknowledge and Status L,2
1.<SVCACK>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
:
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
ServiceStatus “ServiceStatus” PARAMNAME
ServiceStatusValue Enumerated:
OUT OF SERVICE = 0
IN SERVICE = 1
PARAMVAL = U1
SourceLocation 1–80 characters RPMSOURLOC
Status List of n errors L,n
1.L,2
1.<ERRCODE
1
>
2.<ERRTEXT
1
>
:
n.L,2
1.<ERRCODE
n
>
2.<ERRTEXT
n
>
5.4 Object Service Parameter Mapping
5.4.1 Table 3 maps the SEMI E109 service parameters that use S14F19 to SECS-II data items.
Table 3 Object Service Parameters for SECS-II
Parameter Name Format SECS-II Data Item SECS-II
Format
ObjectAction “CancelMoveReticle”
“MoveReticle”
“OktoUseReticle”
“RejectReticle”
“Re-qualifyReticle”
SVCNAME 20
ObjectAction-
ParameterRequest
List of one or more arguments (parameters) providing
additional information concerning the action requested.
Structure composed of ServiceParameterName and
ServiceParameterValue
L,n
1. L,2
1. <SPNAME
1
>
2. <SPVAL
1
>
:
m. L,2
1. <SPNAME
m
>
2. <SPVAL
m
>