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SEMI E87-0705 © SEMI 1999, 2005 45 Variable Name Desc ription Type Acc ess Comment Reason The reason for transition 14, SLOT MAP NOT READ to WAITING FOR HOST. Enumerated: VERIFICATION NEEDED, VERIFICATION BY EQUIPMENT UN…

SEMI E87-0705 © SEMI 1999, 2005 44

Variable Name Description Type Acc

ess

Comment

PartitionType The type of a logical partition

within an internal buffer.

Text RO Only applicable to internal

buffer production equipment.

Some examples of logical

buffer PartitionType are

Product, Dummy, Substrate,

and Seed.

PartitionType

The PartitionType corresponding

with the i

PartitionID.

Text RO Only applicable to internal

buffer production equipment.

Some examples of logical

buffer PartitionType are

Product, Dummy, Substrate,

and Seed.

PortAssociationState The association state of a load

port.

Enumerated:

ASSOCIATED,

NOT ASSOCIATED

PortAssociationState

The association state of the i

load

port.

Enumerated:

ASSOCIATED,

NOT ASSOCIATED

PortAssociationState-

List

The current association state for

all load ports.

A list of n items

1. PortAssociationState

n. PortAssociationState

RO This can be used to re-

synchronize the host.

PortID ID of a load port. Positive integer RO

PortID

ID of the load port where the

carrier transfer is taking place.

One PortID exists for each load

port.

Positive integer RO

PortStateInfo The PortAssociationState

combined with the

PortTransferState.

List of 2 items

PortAssociationState

PortTransferState

RO A combination of both port

states.

PortStateInfo

The PortAssociationState

combined with the

PortTransferState for the i

load

port.

List of 2 items

PortAssociationState

PortTransferState

RO A combination of both port

states.

PortStateInfoList List of PortStateInfo for all load

ports.

List of n items

1. PortStateInfo

n PortStateInfo

RO A list of all the port states for

all the ports.

PortTransferState The current transfer state of a load

port.

Enumerated:

OUT OF SERVICE,

TRANSFER BLOCKED,

READY TO LOAD,

READY TO UNLOAD

RO Super states are not included,

only sub states.

PortTransferState

The current transfer state of the i

load port.

Enumerated:

OUT OF SERVICE,

TRANSFER BLOCKED,

READY TO LOAD,

READY TO UNLOAD

RO Super states are not included,

only sub states.

PortTransferStateList The current Load Port Transfer

State for all load ports.

A list of n items

1. PortTransferState

n. PortTransferState

RO This can be used to re-

synchronize the host.

SEMI E87-0705 © SEMI 1999, 2005 45

Variable Name Description Type Acc

ess

Comment

Reason The reason for transition 14,

SLOT MAP NOT READ to

WAITING FOR HOST.

Enumerated:

VERIFICATION NEEDED,

VERIFICATION BY

EQUIPMENT

UNSUCCESSFUL,

READ FAIL,

IMPROPER SUBSTRATE

POSITION

RO Information to aid host in

deciding appropriate action.

SlotMapStatus State of the carrier slot map status. Enumerated:

SLOT MAP NOT READ,

[SLOT]WAITING FOR

HOST,

SLOT MAP

VERIFICATION OK,

SLOT MAP

VERIFICATION FAILED

UnAllocatedPartition-

Capacity

The current unallocated capacity

for a logical partition inside

internal buffer equipment,

(PartitionCapacity - # of carriers

in partition - # of carriers allocated

for the partition (via reception of a

Bind, CarrierIn,

CarrierNotification,

ReserveAtPort, or

ProceedWithCarrier service). Any

carriers allocated for a partition

will be de-allocated if the

corresponding Cancel service is

received (for example Bind-

CancelBind, CarrierNotification –

CancelCarrierNotification,

ReserveAtPort –

CancelReservationAtPort,

ProceedWithCarrier –

CancelCarrier).

Non-negative integer RO Only applicable to internal

buffer equipment.

UnAllocatedPartition-

Capacity

The UnallocatedPartitionCapacity

for the i

Partition ID within the

internal buffer

Non-negative integer RO Only applicable to internal

buffer equipment.

20 Alarms

20.1 This section includes specific alarms that are required to be implemented by CMS compliant equipment.

20.2 Alarm List Table

20.2.1 Table 38 is a listing of required alarms for both fixed buffer and internal buffer equipment. This list is only a

subset of the carrier transfer alarms. There may be more carrier transfer related alarms that are not listed here.

Table 38 Alarm List

Equipment Danger Affected

Configuration Alarm Text Potential Imminent Operator Equipment Material

Fixed & Internal

Buffer Equipment

PIO Failure X X X X

Access Mode Violation X X X X

Equipment Danger Affected

Configuration Alarm Text Potential Imminent Operator Equipment Material

Carrier Verification Failure X X

Slot Map Read Failed X X X X

Slot Map Verification Failed X X X

Attempt To Use Out Of Service Load Port X X X

Carrier Presence Error X X X X

Carrier Placement Error X X X X

Carrier Dock/UnDock Failure X X X

Carrier Open/Close Failure X X X

Fixed and Internal

Buffer

Duplicate CarrierID X X

Internal Buffer

Equipment Only

Internal Buffer Carrier Move Failure X X X

Fixed & Internal

Buffer Equipment

Carrier Removal Error X X X X

20.3 Duplicate CarrierID

20.3.1 If the equipment receives a carrier with a CarrierID that is the same as that of another carrier present at the

equipment, the following rules shall apply:

1. The second carrier with a CarrierID shall not be processed.

2. If processing on the first carrier with the CarrierID has not begun, it should not be processed.

3. If processing on the first carrier has begun a Duplicate Carrier ID In Process event shall be issued to notify the

host.

21 Requirements for Compliance

21.1 Table 39 provides a checklist for CMS compliance.

Table 39 CMS Compliance Statement

Fundamental CMS Requirements CMS Section Implemented CMS Compliant

Load Port Numbering 9.1  Yes  No  Yes  No

Carrier Slot Numbering 9.2  Yes  No  Yes  No

Load Port Transfer State Model 9.3–9.4.3  Yes  No  Yes  No

Carrier Object Implementation 10  Yes  No  Yes  No

Load Port Reservation State Model

(internal buffer equipment)

12  Yes  No  Yes  No

Load Port/Carrier Association State Model 13  Yes  No  Yes  No

CarrierID Verification Support 14.2  Yes  No  Yes  No

Slot Map Verification Support 14.3  Yes  No  Yes  No

Services Implementation 16  Yes  No  Yes  No

Additional Events Implementation 18  Yes  No  Yes  No

Variable Data Definitions 19  Yes  No  Yes  No

Alarms Implementation 20  Yes  No  Yes  No

Additional CMS Capabilities CMS Section Implemented CMS Compliant

Load Port Reservation State Model

(fixed buffer equipment)

12  Yes  No  Yes  No

Reservation Visible Signal 12.2  Yes  No  Yes  No