semi合集-English.pdf - 第1072页
SEMI E5-1104 © SEMI 1982, 2004 14 Name Format Description Values Where Used CEPVAL 0, 10, 11, 20, 21, 3(), 4(), 5() Command Enhanced Parameter Value. A specific application of CEPVAL shall always be identified with a spe…
SEMI E5-1104 © SEMI 1982, 2004 13
Name Format Description Values Where Used
BYTMAX 3(), 5() Byte Maximum
Maximum length of process
program. A value of zero
indicates no limit. Negative
values are invalid.
S7F22
CAACK 51 Carrier Action Acknowledge
Code, 1 byte
0 = Acknowledge, command has
been performed.
1 = Invalid command
2 = Can not perform now
3 = Invalid data or argument
4 = Acknowledge, request will
be performed with completion
signaled later by an event.
5 = Rejected. Invalid state.
6 = Command performed with
errors.
7-63 Reserved.
S3F18, F20,
F22, F24, F26,
F30, F32
CARRIERACTION 20 Specifies the action requested
for a carrier
S3F17
CARRIERID 20 The identifier of a carrier
S3F17
CARRIERSPEC 20 The object specifier for a
carrier. Conforms to
OBJSPEC.
F29, F31
CATTRDATA 0, 10,
20, 3(),
4(), 5(),
11
The value of a carrier
attribute
S3F17
CATTRID 20 The name of a carrier
attribute
S3F17
CCODE 20, 32,
34, 52,
54
Command Code
Each command code corresponds to
a unique process operation the
machine is capable of
performing.
S7F22, F23,
F26, F31, F39,
F43
CEED 11 Collection event or trace
enable/disable code, 1 byte
FALSE = Disable
TRUE = Enable
S2F37;
S17F5
CEID 20, 3(),
5()
Collected event ID
S2F35, F37;
S6F3, F8, F9,
F11, F13, F15,
F17;
S17F5, F9, F10,
F11, F12
CEPACK 0, 51 Command Enhanced
Parameter Acknowledge. If a
specific value of CPNAME is
defined to have a CEPVAL
that is a LIST, then CEPACK
shall have the same structure
as the corresponding list
format of CEPVAL as used in
S2,F49. Otherwise CEPACK
will be a 1 byte integer.
Enumerated:
0 = No error
1 = Parameter name (CPNAME)
does not exist
2 = Illegal value specified for
CEPVAL
3 = Illegal format specified
for CEPVAL
4 = Parameter name (CPNAME) not
valid as used
5-63 Reserved
S2F50
SEMI E5-1104 © SEMI 1982, 2004 14
Name Format Description Values Where Used
CEPVAL 0, 10,
11, 20,
21, 3(),
4(), 5()
Command Enhanced
Parameter Value. A specific
application of CEPVAL shall
always be identified with a
specific value of CPNAME.
A CEPVAL has the following
forms: a single (non-list)
value (e.g., CPVAL), a list of
single items of identical
format and type, or a list of
items of the form.
L,2
1. CPNAME
2. CEPVAL
S2F49
CKPNT 54 Checkpoint as defined by the
sending system
S13F3, F6
CMDA 31, 51 Command acknowledge code
0 = Completed or done
1 = Command does not exist
2 = Cannot perform now
>2 = Other equipment-specific
error
3-63 Reserved
S2F22, F28
CMDMAX 3(), 5() Command Maximum
Maximum number of commands to be
allowed in a process program. A
value of zero indicates no
limit. Negative values are
invalid.
S7F22
CNAME 20 Command Name = 16
characters
Text string unique among other
CNAMEs in PCD which describes
the processing done by the
equipment for the corresponding
CCODE.
S7F22
COLCT 5() Column count in die
increments
S12F1, F4
COLHDR 20 Text description of contents
of TBLELT.
1–20 characters
S13F13, F16
COMMACK 10 Establish Communications
Acknowledge Code, 1 byte
0 = Accepted
1 = Denied, Try Again
2-63 Reserved
S1F14
CONDITION 20 Provides condition
information for a subsystem
component.
Used in the data item in the
CONDITIONLIST.
See
CONDITION-
LIST
CONDITIONLIST 0 A list of CONDITION data
sent in a fixed order.
CONDITIONLIST has the
following form:
L,s
1.<CONDITION1>
.
s.<CONDITIONs>
S18F16
CPACK 10 Command Parameter
Acknowledge Code, 1 byte
1 = Parameter Name (CPNAME)
does not exist
2 = Illegal Value specified for
CPVAL
3 = Illegal Format specified
for CPVAL
>3 = Other equipment-specific
error
4-63 Reserved
S2F42
SEMI E5-1104 © SEMI 1982, 2004 15
Name Format Description Values Where Used
CPNAME 20, 3(),
5()
Command Parameter Name
S2F41, F42,
F49, F50;
S4F21, F29;
S16F5, F27
CPVAL 10, 11,
20, 21,
3(), 5()
Command Parameter Value
S2F41, F49;
S4F21, F29;
S16F5, F27;
S18F13
CSAACK 10 Equipment
Acknowledgement code, 1
byte
0 = Everything correct
1 = Busy
2 = Invalid SPID
3 = Invalid data
>3 = Equipment-specific error
4-63 Reserved
S2F8
CTLJOBCMD 51 Control Job command codes
are assigned as follows:
1 = CJStart
2 = CJPause
3 = CJResume
4 = CJCancel
5 = CJDeselect
6 = CJStop
7 = CJAbort
8 = CJHOQ
S16F27
CTLJOBID 20 Identifier for Control Job.
Conforms to OBJID.
S16F27
DATA 20 A vector or string of
unformatted data
S3F29, F31;
S18F6, F7
DATAACK 10 Acknowledge code for data
0 = Acknowledge
1 = Unknown DATAID
2 = At least parameter is
invalid
3–63 Reserved
S14F22
DATAID 20, 3(),
5()
Data ID
S2F33, F35,
F39, F45, F49;
S3F15, F17;
S4F19, F25;
S6F3, F5, F7,
F8, F9, F11,
F13, F16, F18,
F27;
S13F11, F13,
F15;
S14F19, F21,
F23;
S15F27, F29,
F33, F35, F37,
F39, F41, F43,
F45, F47, F49;
S16F1, F3, F5,
F11, F13;
S17F1, F5, F9
DATALENGTH 3(), 5() Total bytes to be sent
S2F39;
S3F15, F29,
F31;
S4F25;
S6F5;
S13F11;
S14F23;
S16F1, F11;
S18F5, F7