semi合集-English.pdf - 第2950页
SEMI E109-0305 © SEMI 2001, 2005 60 Variable Name Descripti on Type Access Comment PortAssociationState i The association state of the i th load port. Enumerated: ASSOCIATED, NOT ASSOCIATED RO PortAssociationState- List …
SEMI E109-0305 © SEMI 2001, 2005 59
Variable Name Description Type Access Comment
BufferPartitionInfo
i
The related information for
the i
th
buffer partition.
Structure of 4 items
PartitionID
i
PartitionType
i
AvailPartitionCapacity
i
PartitionCapacity
i
RO Only applicable to internal
buffer production equipment.
BypassReadID Enables or disables automatic
ID acceptance when the
PodID reader is unavailable.
Boolean RW If TRUE, the ID provided
with Bind is used
automatically.
PodID The ID of the pod. Text RO
PodID
I
The PodID at the i
th
locationID.
Text RO
PodLocationMatrix A list all the pods at/in the
equipment. Both internal to
the equipment, and on
equipment load ports.
List of n pairs of items
1. LocationID
1
PodID
1
.
.
n. LocationID
n
PodID
n
RO The PodID
i
shall be null if
there is no pod at the
locationID
i
. If a pod is at
LocationID
i
, but the PodID
i
is
not known, the value of
PodID
i
shall be
“UNKNOWN”.
LocationID The ID of a pod location. Text RO Pod locations are any location
at/in the production equipment
where a pod may rest.
LocationID
i
The LocationID
of the i
th
pod
location.
Text RO Pod locations are any location
at/in the production equipment
where a pod may rest.
PartitionCapacity The total PartitionCapacity
for a logical internal buffer
partition.
Positive integer RO Only applicable to internal
buffer production equipment.
PartitionCapacity
i
The PartitionCapacity for the
i
th
PartitionID of the internal
buffer.
Positive integer RO Only applicable to internal
buffer production equipment.
PartitionID The ID of a logical internal
buffer partition.
Text RO Used to identify separate
material types in an internal
buffer.
PartitionID
i
The ID of the i
th
logical
partition of the internal
buffer.
Text RO Used to identify separate
material types in an internal
buffer.
PartitionType The type of a logical partition
within an internal buffer.
Text RO Only applicable to internal
buffer production equipment.
Some examples of logical
buffer PartitionType are
Product, Dummy, Substrate,
and Seed.
PartitionType
i
The PartitionType
corresponding with the i
th
PartitionID.
Text RO Only applicable to internal
buffer production equipment.
Some examples of logical
buffer PartitionType are
Product, Dummy, Substrate,
and Seed.
PortAssociationState The association state of a
load port.
Enumerated:
ASSOCIATED,
NOT ASSOCIATED
RO
SEMI E109-0305 © SEMI 2001, 2005 60
Variable Name Description Type Access Comment
PortAssociationState
i
The association state of the i
th
load port.
Enumerated:
ASSOCIATED,
NOT ASSOCIATED
RO
PortAssociationState-
List
The current association state
for all load ports.
A list of n items
1. PortAssociationState
1
.
.
n. PortAssociationState
n
RO This can be used to re-
synchronize the host.
PortID ID of a load port. Positive integer RO
PortID
I
ID of the load port where the
pod transfer is taking place.
One PortID exists for each
load port.
Positive integer RO
PortStateInfo The PortAssociationState
combined with the
PortTransferState.
List of 2 items
PortAssociationState
PortTransferState
RO A combination of both port
states.
PortStateInfo
i
The PortAssociationState
combined with the
PortTransferState for the i
th
load port.
List of 2 items
PortAssociationState
i
PortTransferState
i
RO A combination of both port
states.
PortStateInfoList List of PortStateInfo for all
load ports.
List of n items
1. PortStateInfo
1
.
.
n PortStateInfo
n
RO A list of all the port states for
all the ports.
PortTransferState The current transfer state of a
load port.
Enumerated:
OUT OF SERVICE,
TRANSFER BLOCKED,
READY TO LOAD, READY
TO UNLOAD
RO Super states are not included,
only sub states.
PortTransferState
i
The current transfer state of
the i
th
load port.
Enumerated:
OUT OF SERVICE,
TRANSFER BLOCKED,
READY TO LOAD, READY
TO UNLOAD
RO Super states are not included,
only sub states.
PortTransferStateList The current Load Port
Transfer State for all load
ports.
A list of n items
1. PortTransferState
1
.
.
n. PortTransferState
n
RO This can be used to re-
synchronize the host.
Reason The reason for transition 15,
SLOT MAP NOT READ to
WAITING FOR HOST.
Enumerated:
VERIFICATION NEEDED,
VERIFICATION BY
EQUIPMENT
UNSUCCESSFUL,
READ FAIL,
IMPROPER WAFER
POSITION
RO Information to aid host in
deciding appropriate action.
SEMI E109-0305 © SEMI 2001, 2005 61
Variable Name Description Type Access Comment
Reject Reason The reason a reticle is
rejected.
Enumerated:
ID Verification
failedParticle qualification
failed
Rejected By Host
Rejected By Operator
Inspection Results Expired
RO Information to aid the host in
understanding why a reticle is
rejected.
#1
These are defined in the Alarm Information table.
#2
For all the variables defined as lists of port information (such as states), the port information should be placed in the list in numerical order by
PortID, from lowest to highest.
22 Alarms
22.1 This section includes specific alarms that are required to be implemented by RPMS compliant equipment.
22.2 Alarm List Table
22.2.1 Table 57 is a listing of required alarms for both fixed buffer and internal buffer equipment. This list is only a
subset of the pod transfer alarms. There may be more pod transfer related alarms that are not listed here.
Table 57 Alarm List
Equipment Danger Affected
Configuration Alarm Text Potential Imminent Operator Equipment Material
Fixed & Internal
Pod Buffer
Equipment
PIO Failure X X X X
Access Mode Violation X X X X
Attempt To Use Out Of Service Load Port X X X
Pod Placement Error X X X X
Pod Open/Close Failure X X X
Fixed and Internal
Pod Buffer
Equipment
Duplicate PodID X X
Fixed & Internal
Pod Buffer
Equipment
Pod Removal Error X X X X
Duplicate Reticle
ID
A duplicate reticle is detected. X X
Pod Pick/Place
error
The internal robot that moves the Pods failed
to pick or place a pod. Can be triggered if the
state of the system after a pick or place is
inconsistent (i.e., both robot and pod think
they are empty).
X X X
Reticle Pick/Place
error
The internal robot that moves the reticles
failed to pick or place a reticle. Can be
triggered if the state of the system after a pick
or place is inconsistent (i.e. both robot and
pod think they are empty).
X X X
Automation Error Automation errors that do not fit other
categories have been detected.
X X X X