semi合集-English.pdf - 第154页
SEMI E19.5-0996 © SEMI 1978, 2003 3 The requi rements and dimensions for the design of 300 mm standard mechani cal interface ports and pods are given in this section. All external dimensions of the interf ace between a p…
SEMI E19.5-0996 © SEMI 1978, 2003 2
4.1 box — A protective portable container for a
cassette and/or substrate(s) (as defined in SEMI E44).
4.2 cassette — An open structure that holds one or
more substrates (as defined in SEMI E44).
4.3 horizontal datum plane — A plane that is parallel
to the floor and coincides with the tool interface
surface. A more detailed definition will be included in a
companion document currently under development.
4.4 guide rail — A component of a port plate that
provides coarse and final location for placing the pod
on the port assembly.
4.5 hold-down latch — A mechanism for securing the
pod to the port plate.
4.6 kinematic socket (pod door) — Grooves in the
bottom of the pod door that fit over kinematic pins on
the top of the port door when the pod is placed on the
port door.
4.7 kinematic pins (port door) — Pins that provide
fixed position and orientation between the port door and
pod door. The kinematic pins fit into the kinematic
sockets in the bottom of the pod door.
4.8 latch pins — Pins that engage the pod door latch
and accomplish the pod door lock/unlock functions.
Latch pins are carried by the port door.
4.9 pod — A box having a Standard Mechanical
Interface (as defined in SEMI E19, SEMI E44).
4.10 pod door — A removable bottom for the pod that
contains a means for properly positioning the wafer
cassette.
4.11 pod lock — A mechanical latch that holds the pod
door to the pod until activated by the latch mechanism
pins. Upon activation, the pod door is released from the
pod.
4.12 port assembly — An assembly of the port plate
and port door.
4.13 port door — A door for the port plate opening that
provides a mating surface for the bottom of the pod
door when the pod is in place on the port plate. The port
door contains the kinematic location pins and the pod
door latch pins.
4.14 port plate — A horizontal mating surface for the
base of the pod that provides a seal surface for the
bottom surface of the pod perimeter. The port plate
contains the guide rails and the pod hold-down latches.
5 Requirements
(See Table 1 for 300 mm (12-inch) port dimensions.)
Table 1 Port Dimensions for 300 mm (12-inch) Wafer Cassette
Port Door: A1 185.00 mm rad. ± 0.13 mm (7.283 in. rad. ± 0.005 in.)
Guide Rails: B1 208.71 mm rad. ± 0.13 mm (8.217 in. rad. ± 0.005 in.)
B2 106.00 mm ± 0.13 mm (4.190 in. ± 0.005 in.)
B3 119.00 mm ± 0.13 mm (4.690 in. ± 0.005 in.)
B4 25.00 mm max. (0.984 in. max.)
B5 70.0 mm max. (2.75 in. max.)
Latch Pins: C1 16 deg. ± 0 deg. 30 min. (16 deg. ± 0 deg. 30 min.)
C2 86 deg. ± 0 deg. 30 min. (86 deg. ± 0 deg. 30 min.)
C3 26.72 mm dia. ± 0.05 mm (1.052 in. dia. ± 0.002 in.)
C4 3.175 mm dia. ± 0.025 mm (0.125 in. dia. ± 0.001 in.)
C5 ----------- ----------
C6 9.14 mm ± 0.25 mm (0.360 in. ± 0.010 in.)
C7 Full Spherical Radius Full Spherical Radius
Pod Hold-Down Latches: D1 22.10 mm ± 0.25 mm (0.870 in. ± 0.010 in.)
D2 10 deg. ± 0 deg. 30 min. (10 deg. ± 0 deg. 30 min.)
Pod in Place Sensor: E1 26.92 mm ± 0.25 mm (1.060 in. ± 0.010 in.)
E2 12.70 mm ± 0.25 mm (0.500 in. ± 0.010 in.)
Activation Height: E3 4.32 mm min. (0.170 in. min.)
Latch Pin Force (Torque): F1 8.08 kg cm min. (7 lbs. in. min.)
17.27 kg cm max. (15 lbs. in. max.)
SEMI E19.5-0996 © SEMI 1978, 2003 3
The requirements and dimensions for the design of 300 mm standard mechanical interface ports and pods are given
in this section. All external dimensions of the interface between a pod and port are specified in SEMI E15.1.
5.1 Port Design Requirements — The general design of the port is shown in Figures 2 and 3. Design requirements
for the interface components are provided in Sections 5.1.1 through 5.1.6.
Figure 2
Port Dimensions
Figure 3
Port Detail
SEMI E19.5-0996 © SEMI 1978, 2003 4
5.1.1 Port Door — Dimension Al specifies the port
door radius. The gap between port door and port plate is
not specified, but should be kept to a minimum distance
to restrict particle transport.
5.1.2 Pod Guide Rails — The inside feature of the pod
guides rails of the port are specified by B1, B2, and B3.
The features provide alignment for the pod top.
5.1.3 Pod Hold-Down Latches — The available latch
area is specified by dimensions B1, B4, and B5 in
Figure 2. Latch detail dimensions are specified by D1
and D2 in Figure 3.
5.1.4 Pod Door Latch Pins — Two latch pins are
located around the port door center and are specified by
C1, C2, and C3.
5.1.5 Kinematic Pins — Three kinematic pins provide
registration of the pod door to port plate. Details and
locations of the kinematic pins are not specified in this
standard. They are being addressed in a separate
document currently under development.
5.1.6 Pod in Place Sensor — An optional sensor, for
the sensing of proper pod placement shall be located on
the port door as specified by E1 and E2. The sensor
shall have a minimum activation height of E3 and full
travel to the port plate.
5.2 Pod — The bottom surfaces of the pod body and
pod door shall conform to the specified port
dimensions. Although the pod dimensions are not
explicitly specified by this standard, the following
requirements apply. (Pod dimensions are being
addressed in a separate document currently under
development.)
5.2.1 The upper part of the pod body and the top
surface of the pod door must fit and hold in place the
wafer cassette, which will be specified in a separate
document currently under development.
5.2.2 The center of the wafers and pod door shall
coincide. The top surface of the pod door incorporates
kinematic features that position the cassette on the pod
door.
5.2.3 The bottom surface of the pod door at its
perimeter shall match the radius of the port door top
(dimension Al). The tolerances shall be chosen so that
the pod door does not extend over the port door in any
instance, even when the port door is built to its minimal
acceptable dimensions and potential variance between
kinematic pins and socket is considered. This is to
ensure an interference-free passage of the pod door
through the port opening.
5.2.4 The base of the pod body shall fit freely but with
close tolerance between the pod guide rails, which not
only hold the pod in place while the port is open, but
also provide proper alignment for closure of the pod at
the end of the open/close cycle.
6 Related Documents
The following articles describe the standard mechanical
interface concept:
6.1 “The Challenge to Control Contamination: A
Novel Technique for the IC Process,” The Journal of
Environmental Sciences, (May/June, 1984), page 23.
6.2 “SMIF, A Technology for Wafer Cassette Transfer
in VLSI Manufacturing,” Solid State Technology,
(July, 1984), page l11.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.