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SEMI E38-1296 © SEMI 1995 , 1996 21 • Reject incompl ete, inval id, and unsupported requests. Transfer resource capabilities p ermitted, but not to be required, by a service-user: • Stop, Pause, and Res ume o f a transf …
SEMI E38-1296 © SEMI 1995, 1996 20
moved and the source and destination of that
movement (cluster-application-specific). It requests
all the modules involved to perform the appropriate
TM or AM transfer job.
2. The source- and destination-attached modules
inform the transport module that they are prepared
to do their specific activities during the material
transfer. The transport module informs the source-
and destination-attached modules, each at the
appropriate point in time, that it is synchronized for
material handoff.
3. The detailed transactions required to handoff the
material during the transfer are accomplished, first
at the source and then at the destination.
These interactions may require a number of
communications interfaces for intratool material
transfer from the following:
• Cluster controller to transport module
• transfer resource: TM transfer job source AM
to destination AM
• Cluster controller to source-attached module
• intratool port resource: AM transfer job send
• Cluster controller to destination-attached module
• intratool port resource: AM transfer job receive
• Transport module to source-attached module
• intratool port to transfer resource: handoff get
• Transport module to destination-attached module
• intratool port to transfer resource: handoff put
The material movement services define the
communications and behavior required of the attached
module intratool port resource and the transport module
transfer resource. They define the TM transfer job, TM
atomic transfer, AM transfer job, and AM atomic
transfer objects and their operations, as well as the
handoff operations between the transfer resource and
the intratool port resource.
Each interface is described below.
Cluster Controller to Transport Module Interface —
The TM transfer job creation is requested by the cluster
controller using the TRJobCreate service. If the transfer
resource accepts the job, it performs the transfer of the
material to completion, coordinating with the attached
modules. The TM transfer job comprises two atomic
transfers for the material, one to get (receive) it from
the source-attached module and another to put (send) it
to the destination-attached module.
The transfer resource shall support the TRJobCommand
Abort service, which ceases any transfer activity and
terminates the job. The transfer resource reports transfer
job milestones achieved to the cluster controller using
the TRJobAlert service.
The transfer resource coordinates material handoff with
each attached module through the transport
module/attached module interface, described below.
TM transfer job object attributes required to be
accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: transfer job.
TRJobID Identifier for the transfer job.
(Ordered list of)
TRAtomicID
Ordered list of identifiers for the
atomic transfers in the transfer job:
two atomic transfers for the material.
(List of)TRJobState All concurrent substates of the
transfer job.
TM atomic transfer object attributes required to be
accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: atomic transfer.
TRAtomicID Identifier for the atomic transfer.
TRLink Identifier to coordinate handoff.
TRObjType Material Type.
TRObjName Material identifier.
TRRole Role in transfer control: secondary.
TRPartner Identifies partner-attached module.
TRDirection Handoff direction: receive from
source AM, send to destination AM.
TRType Active/passive in transfer: active.
(List of)TRAtomic-
State
All concurrent substates of the atomic
transfer.
Material movement messaging services required:
Message Name Description: Requirements
TRJobCreate Create transfer job: single material,
source to destination AM, auto-start.
TRJobCommand Command on transfer job: abort.
TRJobAlert Notification: started, complete.
Transfer resource capabilities required, but not already
specified above:
• Detect and report success or failure of a transfer
job.
SEMI E38-1296 © SEMI 1995, 199621
• Reject incomplete, invalid, and unsupported
requests.
Transfer resource capabilities permitted, but not to be
required, by a service-user:
• Stop, Pause, and Resume of a transfer job.
• Manual atomic transfer start.
• Transfer job queuing and queued job Cancel.
• Transferring of material groups.
• Multiple concurrent transfer jobs.
• Notification of transfer events.
Cluster Controller to Attached Module Interface — The
AM transfer job creation is requested by the cluster
controller using the TRJobCreate service. If the
intratool port resource accepts the job, it coordinates
with and directs the transport module to achieve the
material handoff. The AM transfer job comprises an
atomic transfer for material which is to receive it from,
or send it to, the transport module.
The intratool port resource shall support the
TRJobCommand Abort service, which ceases any
transfer activity and terminates the job. The intratool
port resource reports transfer job milestones achieved to
the cluster controller using the TRJobAlert service.
The intratool port resource coordinates material handoff
with the transport module through the transport module
to attached module interface, described below.
AM transfer job object attributes required to be
accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: transfer job.
TRJobID Identifier for the transfer job.
(Ordered list of)
TRAtomicID
Ordered list of identifiers for the
atomic transfers in the transfer job:
one atomic transfer for each material.
(List of)TRJobState All concurrent substates of the
transfer job.
AM atomic transfer object attributes required to be
accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: atomic transfer.
TRAtomicID Identifier for the atomic transfer.
TRLink Identifier to coordinate handoff.
TRPort AMPort through which transfer
occurs.
TRObjType Material type.
Attribute Name Description: Requirements
TRObjName Material identifier.
TRRole Role in transfer control: primary.
TRPartner Identifies partner transport module.
TRDirection Handoff direction: receive or send.
TRType Active/passive in transfer.
(List
of)TRAtomicState
All concurrent substates of the atomic
transfer.
Note that TRLocation is not required to be supported as
it is the responsibility of the attached module to
determine the appropriate location to be used based on
the material identifier.
Material movement messaging services required:
Message Name Description: Requirements
TRJobCreate Create transfer job: single material,
send or receive, auto-start.
TRJobCommand Command on transfer job: abort.
TRJobAlert Notification: started, complete.
Transfer resource capabilities required, but not already
specified above:
• Detect and report success or failure of a transfer
job.
• Reject incomplete, invalid, and unsupported
requests.
Transfer resource capabilities permitted, but not to be
required, by a service-user:
• Stop, Pause, and Resume of a transfer job.
• Manual atomic transfer start.
• Transfer job queuing and queued job Cancel.
• Transferring of material groups.
• Multiple concurrent transfer jobs.
• Notification of transfer events.
Transport Module to Attached Module Interface — The
control interface for the handoff of material between the
end effector of a transport module and any attached
module supports a sequence of three phases:
1. a synchronization phase that establishes that both
the attached module intratool port resource and the
transport module transfer resource are ready to
handoff the material.
2. a physical handoff phase controlled by the intratool
port resource.
SEMI E38-1296 © SEMI 1995, 1996 22
3. a verification phase to determine that actual
handoff took place. This action completes the
handoff.
The transport module is responsible for managing
constraints on the simultaneous opening of isolation
valves as it relates to contamination of the transport
module's environment by that of an attached module, as
well as cross-contamination between modules. The
attached module ensures that its environment will not
contaminate the transport module before synchronizing.
The rules for re-establishing isolation at verification are
determined by the transport module.
The synchronization between the transfer resource and
the intratool port resource is achieved by each,
indicating readiness to transfer the material, using the
HOReady service. Once both partners have received the
HOReady, the intratool port resource directs the
physical handoff. The intratool port resource commands
the transfer resource using the defined HOCommand
services. Once the physical handoff is complete, the
intratool port resource requests verification using the
HOVerify service.
The transfer resource and intratool port resource shall
support the HOCancelReady service which cancels a
previously sent HOReady while still in the
synchronization phase. The transfer resource shall
support the HOHalt service, which ceases any transfer
activity and terminates the handoff.
Material movement messaging services required:
Message Name Description: Requirements
HOReady Synchronize with partner.
HOCommand Command to the transport resource to
perform an activity in the transfer
envelope. Detailed below.
HOVerify Verification of handoff completion
with transfer resource.
HOCancelReady Rescinds previous HOReady
message.
HOHalt Command to the partner to stop all
action.
HOCommands to be supported by the transfer resource:
Command Description: Requirements
Pick Commands the transfer resource to
take all actions necessary to remove
the material from the intratool port.
Place Commands the transfer resource to
take all actions necessary to place the
material in the intratool port.
Command Description: Requirements
Extend Commands the transfer resource to
reach into the intratool port to a
predefined position at which the
material can be accepted or released.
Retract Commands the transfer resource to
withdraw from the intratool port.
Where the robotic hardware does not provide for
vertical motion, Pick and Place are not required to be
supported.
Transfer partner capabilities required, but not already
specified above:
• Detect and report success or failure of handoff
commands.
• Detect and report success or failure of the handoff,
through the verification.
• Reject incomplete, invalid, and unsupported
requests.
Transfer resource capabilities permitted, but not to be
required, by either partner:
• Multiple concurrent handoffs.
• Additional handoff commands.
8.3.2 Intertool Material Movement Services —
Factory-to-cluster tool carrier or single material
input/output management across a cluster tool module
communications interface is achieved using the
intertool material movement services. These services
provide the communications and behavior required of
the intertool port resource by the intertool material
movement models through defining the CM
input/output transfer job object and its operations.
This standard specifies only the required
communication between the cluster controller and the
cassette module and does not assume automated
material movement in the factory. The CM input/output
transfer job is compliant with SEMI E32 (Material
Movement Management) and may be extended to
support automated material movement in the factory.
The CM input/output transfer job creation is requested
by the cluster controller using the TRJobCreate service.
If the intertool port resource accepts the job, it
coordinates with the operator or some entity to achieve
the material handoff. The CM input/output transfer job
comprises an atomic transfer for a cassette or single
material which is to receive it from, or send it to, the
factory.
The intertool port resource shall support the
TRJobCommand Abort service, which ceases any