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SEMI E81-0600 © 1999, 2 000 9 • A produ ction job is created, al ong with a g rouping structure f or the target product. • A production job is split into subj obs and maybe merged ag a in. • A produ ction job is rerou te…

Object Communications (CORBA or DCOM)

Object

Sub-

Component

Object

Object Object Object Object

Object

Application 1 Application N

Component

Events Names Persist

Transact

. . .

Component

Sub-

Component

Sub-

Component

Sub-

Component

Figure 3

Components and Sub-Components

6.4.3 Thus, a component is “In MES” scope and

within the CIM Framework scope, if

• it provides a job abstraction to manage work

currently in progress across the manufacturing

facility,

• it represents the convergence of product and

process specifications, material, and manufacturing

resources through execution of production jobs,

• it provides facility level planning and scheduling of

manufacturing production activities,

• it provides access to historical data and reporting of

occurrences that changed the state of the products,

the production facility or its resources,

• it allows coordinated actions to control factory

resources,

• it allows abstraction representations of production

facilities and their resources,

• it enables automated update of manufacturing

parameters (settings) through data collection and

analysis of manufacturing processes, and

• it supports quality management through capture of

key metrics (e.g., yield, throughput, cycle-time and

utilization).

6.4.4 A component is “Outside MES” scope, thus

outside CIM Framework scope, if

• it controls or manipulates the internal state or

operation of a piece of manufacturing equipment,

• it deals with the business interactions between the

manufacturing enterprise and external enterprises

such as customers or suppliers,

• it manipulates the product or process definition

with a focus on product design rather than

execution of the manufacturing process,

• it focuses on the creation and manipulation of

what-if models of factory or product state,

• it isn’t directly concerned with transforming

material from an initial (raw or partially

completed) state to a more valuable product, and

• it is primarily used in support of laboratory analysis

that is not directly integrated into the

manufacturing process (e.g., off-line metrology).

6.4.5 Examples applying the MES definition and

scoping criteria might be derived from the following

high-level interactions.

6.4.5.1 “In MES” Scope

• A product request for production of goods (partial

or finished) is offered to one facility which

responds with a delivery commitment.

• A production job is created, along with a grouping

structure for the target product.

• A production job is split into subjobs and maybe

merged again.

• A production job is rerouted to a different resource

due to specific circumstances.

• A production job is assigned to a set of resources,

allocated required material, and dispatched for

execution.

• A change in state of product, resources or material

resulting in a change to delivery commitments is

reported.

• A change to a manufacturing process results in

alteration of the execution of a production job.

• A production job is assigned to specific set of

manufacturing machines due to their machine

resource capabilities.

• A value for a process specification is changed due

to gathered values of a influencing quality control

process.

• Material is made available for use or is moved to a

new physical location within the facility.

• Material is exchanged between different positional

containers due to e.g., contamination control

(cleaning of a positional container).

• A manufacturing machine is taken down for main-

tenance and becomes unavailable for job execution.

• A resource of a multiple resource machine is taken

down and becomes unavailable, but not the whole

machine.

6.4.5.2 “Outside MES” Scope

• A product is defined and engineered for production

 Product and Process Engineering.

• A facility is qualified to produce a given product

 Release for Production.

• An order is released for production  represented

as a demand from Order Management System.

• A consumable is running out of stock  an order is

released for delivery to the facility  Enterprise

Resource Tracking.

• The facilities (or series of facilities) capable of

producing the needed product are analyzed and the

demand is matched with available supply

(including capacity for future production) 

Enterprise Planning System.

• A piece of manufacturing equipment obtains a

recipe and enacts a manufacturing process on

material  Equipment Automation.

• Material movement equipment controls the

transport of material to a specified destination 

Equipment Automation.

• Modeling data representing a hypothetical change

in factory state is manipulated and analyzed to

determine the effects of the changes  Modeling

and Simulation.

• Material is packed for transport from the front-end

facility to the back-end facility and a carrier is noti-

fied of shipping order  Transportation Logistics.

• A customer order is divided into two product

requests involving two facilities to meet the

requested delivery date  Release for Production.

• The layout of equipment locations within the

factory is modified to accommodate a new tool 

Factory Design.

6.4.6 Multiple levels of packaging framework

functionality are supported by the specification so that a

variety of applications from multiple suppliers with

potentially intersecting capabilities can be

accommodated. This means that, given a specific

framework binding to a set of computer and software

system technologies, an application can be instantiated

and executed in this environment and will register itself

as a set of well-known objects that provide a core set of

framework specified services.

6.4.7 The CIM Framework specification defines a set

of functional components designed to work together to

form an integrated manufacturing system. The CIM

Framework components cover the functionality of

Manufacturing Execution Systems (MES). MES is a

factory-wide function that drives material processing on

equipment to produce products, and it manages all the

resources to accomplish this.

6.4.8 Figure 4 shows the functional scope of the CIM

Framework. The left-hand side represents engineering

aspects of manufacturing systems, such as configura-

tion, while the right-hand side indicates where MES

falls within manufacturing operations. The CIM Frame-

work covers operations of manufacturing execution to a

larger degree and configuration to a lesser degree.

Enterprise

Manufacturing Execution

Equipment

Modeling,

Configuration,

Simulation,

Analysis

Manufacturing

Operations

Manufacturing

System

Engineering

Figure 4

Boundaries of the CIM Framework: Manufacturing

Execution

6.4.9 The CIM Framework specifies the MES

functional responsibilities for semiconductor wafer

fabrication. It does not include responsibilities for

semiconductor packaging, assembly and test, but it was

designed to accommodate extensions into this phase of

semiconductor manufacturing.

6.4.10 Using the definition of component as found in

Section 6.3.3, the components of the CIM Framework

provide the following functionality found within MES

configuration and execution:

• Product Management: manages product material

and material groups.

• Durables Management: manages durable materials

such as reticles and material carriers.

• Consumables Management: manages consumable

materials such as gases and chemicals.

• Specification: manages product specifications and

process flows.

• Factory Operations: drives efficient use of factory

resources to manufacture products while meeting

overall factory objectives.

• Scheduling: supports factory operations and other

functions to optimize use of resources in manu-

facturing products and meeting factory objectives.

• Equipment Tracking and Maintenance: tracks

equipment state and usage and manages equipment

maintenance.

• Production Machine: manages execution of

manufacturing process steps on process and

metrology equipment.

• Recipe Management: provides factory-wide

management and use of processing recipes.

• Advanced Process Control: executes run-to-run

process control and fault detection strategies.

• Material Transport and Storage: moves and stores

material.

• Factory Labor: manages labor resources and

qualifications.

• Factory Services: provides support functions

common across components, such as access

security, document management/change control,

and history storage and retrieval.

6.4.11 Section 7 lists the functional responsibilities of

each of these components by MES configuration (called

build-time) and execution (called run-time). The

separation of the CIM Framework into components

reflects anticipated boundaries of MES products,

enabling integration of products from multiple suppliers

into a coherent, integrated MES.

Advanced

Process

Control

Production

Machine

Transport

and

Storage

Object Communications (CORBA or DCOM)

Factory

Services

Product

Management

Specification

Factory

Labor

Equipment

Tracking &

Maintenance

Factory

Operations

Planning Finance Distribution

Metrology

Equipment

Process

Equipment

Transport

Equipment

Storage

Equipment

Manufact.

System

Engineering

Process

Engineering

Device

Engineering

Manufacturing

Execution

Equipment

Enterprise

Engineering

SEMI equipment

integration standards

(SECS, GEM, ARAMS,

RMS, MMMS, etc.)

Figure 5

MES Component Integration