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SEMI C54-1103 © SEMI 2003 11 Buret Figure 1 “Orsat” De vice for the Ass ay Of O 2

SEMI C54-1103 © SEMI 2003 10

11.4.4 Operating Procedures

11.4.4.1 Flow settings should not be changed once

established.

11.4.4.2 Introduce the zero gas and adjust the

instrument per manufacturer’s recommendations to read

the quantity known to be in the zero gas.

11.4.4.3 Introduce the span gas standard and adjust the

instrument per manufacturer’s recommendations to read

the quantity known to be in the span gas. This result

may not exceed specification in Section 7 of this

standard.

11.5 Water — This procedure is for the determination

of trace moisture (water) in O

using a continuous

flowing piezoelectric hygrometer (see Note 5, 6, 7 in

Section 9.4).

11.5.1 Detection Limit — 5 ppb

11.5.2 Flow Requirements — Set the sample pressure

and flow rate in accordance with the instrument

manufacturer’s instructions.

11.5.3 Calibration Standards — Construct a

calibration curve that contains at least three points

covering the range of interest. Verify the standards

employed independently by another analytical method.

11.5.4 Operating Procedure

11.5.4.1 Obtain a continuous flow sample of gas from

the source using a clean and passivated stainless steel

line that has been purged dry after exposure to ambient

moisture.

11.5.4.2 After prepurging with a dry gas, allow the

sample gas to flow through the sampling system and the

piezoelectric moisture hygrometer until a stable reading

is obtained.

11.5.4.3 Determine the moisture content of the oxygen

sample by comparing the reading to calibration curve.

The result may not exceed the specification in Section 7

of this standard.

Buret

Figure 1

“Orsat” Device for the Assay Of O

Figure 2

Relative Position of the Different Vessels for the “Orsat” Device for the Assay of O

Fig. 2c

Fig.2a

Fig. 2b

Fig. 2d

Fig. 2e