semi合集-English.pdf - 第2964页

SEMI E109.1-0704 © SEMI 2002, 2004 10 Attribute Name Attribute Da ta Form: SECS-II Structure QualificationTerminati onTime YYYYMMDDHHMMSSCC ReticleStatus 51 (U1) ReticleStatus 0 “RETICLE NOT P RESENT” 1 “WAITING QUALIFIC…

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SEMI E109.1-0704 © SEMI 2002, 2004 9
Table 6 Reticle Pod Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType 1. “ReticlePod”
“ObjID” 1. <PODID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
“Capacity” 51 (U1) Capacity
Capacity Range: 1..6
Capacity Examples: 1, 6
“ReticlePodAccessingStatus” 51 (U1) ReticlePodAccessingStatus
ReticlePodAccessingStatus enumerated per Variable
ReticlePodAccessingStatus
0: “NOT AVAILABLE”
1: “AVAILABLE”
2: “IN ACCESS”
3: “COMPLETE”
“PodIDStatus” 51 (U1) PodIDStatus
PodIDStatus enumerated per Variable PodIDStatus
0: “ID NOT READ”
1: “WAITING FOR HOST ON ID STATUS”
2: “ID VERIFICATION OK”
3: “ID VERIFICATION FAILED”
“ContentMap” L,n n = Capacity
1. ReticleID
n. ReticleID
“ReticlePodLocationID” 20 (A) ReticlePodLocationID
ReticlePodLocationID conforms to the restrictions of ObjID as specified in SEMI
E39.1, Section 6.
“ReticlePodLockingStatus” 51 (U1) ReticlePodLockingStatus
ReticlePodLockingStatus enumerated per VariableReticlePodLockingStatus
0: “NOT LOCKED”
1: “RELEASED AND LOCKED”
2: “HOLD”
“SlotMap” L,n n = Capacity
1.51 (U1) enumerated
…
n.51 (U1) enumerated
Enumerated
0: “UNDEFINED”
1: “EMPTY”
2: “CORRECTLY OCCUPIED”
“SlotMapStatus” 51 (U1) SlotMapStatus
SlotMapStatus enumerated per Variable SlotMapStatus.
0: “SLOT MAP NOT READ”
1: “WAITING FOR HOST ON SLOT MAP STATUS”
2: “SLOT MAP VERIFICATION OK”
3: “SLOT MAP VERIFICATION FAILED”
Table 7 Reticle Object Attribute Definition
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 1. “Reticle”
“ObjID” 1. <RETICLEID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
# of Exposures 51 (U1) # of Exposures
QualificationIntervalTime 52 (U2) 0–99999 / 0 is not limit.
SEMI E109.1-0704 © SEMI 2002, 2004 10
Attribute Name Attribute Data Form: SECS-II Structure
QualificationTerminationTime YYYYMMDDHHMMSSCC
ReticleStatus 51 (U1) ReticleStatus
0 “RETICLE NOT PRESENT”
1 “WAITING QUALIFICATION”
2 “READING ID”
3 “QUALIFIED”
4 “IN USE”
5 “REJECTED”
6 “RETICLE WAITING FOR HOST
7 “ PARTICLE INSPECTION”
ReticleAllocationStatus 51 (U1) RetcileAllocationStatus
0 “NOT ALLOCATED”
1 “ALLOCATED”
ReticleLocationID 20 (A) ReticleLocationID
ReticleLocationID conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.
ReticleType Equipment dependent
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SEMI E120-0705 © SEMI 2003, 2005 1
SEMI E120-0705
SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org June 2005 and on CD-ROM in July 2005. Originally published March 2003;
previously November 2004.
1 Purpose
1.1 The purpose of this specification is to provide a generally applicable object model of semiconductor equipment
structure. This object model is intended to be used in the following ways:
As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host.
As a base model to be used and extended by other SEMI equipment communication standards.
As a reference for the creation of technology-specific object model definitions, such as XML schema.
2 Scope
2.1 This specification provides a common set of constructs that can be used by the equipment manufacturer to
model their equipment structure.
2.2 This specification defines the classes, attributes, relationships, and other detail appropriate for the model of an
equipment’s structure as viewed by a factory host application through the available communication interfaces.
2.3 The model contained in this specification documents features of the equipment structure considered necessary
for more than one (current or future) equipment communication standards.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This specification does not define “object diagrams” (that is, instances) of equipment. These are the
responsibility of the equipment supplier to define in conformance with the model.
3.2 This specification does not define the behavior of objects/classes. Behavior definition of classes defined in this
specification is left to other equipment communication standards.
3.3 This specification does not define any specific messaging between equipment and factory host. It is expected
that communication related to the Common Equipment Model will be defined by other standards.
3.4 This specification addresses only the host view of the equipment. No other part of the factory is modeled by
this document.
4 Referenced Standards and Documents
uuid: ISO/IEC 11578:1996 Information technology - Open Systems Interconnection — Remote Procedure Call
(RPC), http://www.iso.ch/cate/d2229.htm.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CEM — Common Equipment Model