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SEMI E40.1-0705 © SEMI 1996, 2005 1 SEMI E40.1-0705 SECS-II SUPPORT FOR PROCES SING MANAGEMENT STANDARD This standard was techni cally approved by the global Information & Control Committee. This edition was approved…
SEMI E40-0705 © SEMI 1995, 2005 25
12.3.1 The services are defined with mechanisms to reject unsupported services and options should they be
requested. This improves robustness and enables sophisticated service-users to adjust their requests to the
capabilities of the particular processing agent.
12.4 Table 21 provides a checklist for Processing Management (PM) compliance.
Table 20 PM Compliance Statement
Fundamental PM Requirements PM Section Implemented PM Compliant
Single Process Job Execution 8.2 Yes No Yes No
Process Job Failure Indication 8.2.1.7 Yes No Yes No
Abort Command 8.2.3.2 Yes No Yes No
Process Job Object Implementation 8.3, 9 Yes No Yes No
Reject Invalid/Incomplete Parameters 8.2.1.2.1 Yes No Yes No
Reject Unsupported Capabilities 11.2 Yes No Yes No
Services Implementation (not per Additional) 10 Yes No Yes No
Additional PM Capabilities PM Section Implemented PM Compliant
Process Job Milestones 8.2.1 (except 8.2.1.2,3) Yes No Yes No
Resource Pre/Post-conditioning Yes No Yes No
Stop, Pause and Resume Commands 8.2.3.3,4,5 Yes No Yes No
Manual Process Start 8.2.3.9 Yes No Yes No
Process Job Queuing 8.3 Yes No Yes No
Process Tuning 7.5, 10.4.9 Yes No Yes No
Processing of Material Groups 7.6 Yes No Yes No
Multiple Concurrent Process Jobs 7.7 Yes No Yes No
Multiple Consecutive Process Jobs 7.8 Yes No Yes No
Process Job with No Material 7.9 Yes No Yes No
Event Notification 8.2.2 Yes No Yes No
Enhanced Job Creation 10.4.2 Yes No Yes No
Multiple Job Creation 10.4.3 Yes No Yes No
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
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consent of SEMI.
SEMI E40.1-0705 © SEMI 1996, 2005 1
SEMI E40.1-0705
SECS-II SUPPORT FOR PROCESSING MANAGEMENT STANDARD
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; last published in
2004.
1 Purpose
1.1 This document maps the services and data of SEMI E40 to SECS-II streams and functions and data definitions.
2 Scope
2.1 This is the standard way to implement the Processing Management, which provides remote control of wafer
processing, using the SECS-II message protocol.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E40 — Standard for Processing Management
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 None.
5 Mapping of Processing Services
Table 1 Processing Management Messages Mapping
Service Message Name Stream, Function SECS-II Name
PRJobCreate request S16F3,F4 Process Job Create Request/Acknowledge
PrJobCommand request S16F5,F6 Process Job Command Request/Acknowledge
PRJobAlert notify If E30 style events:
S6F11,F12
If E40 style alerts:
S16F7,F8
If E53 style events:
S6F11,F12
S6F13,F14
If E30 style events:
Event Report Send/Acknowledge
If E40 style alerts:
Process Job Alert Notify/Confirm
If E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
PRJobEvent notify If E30 style events:
S6F11,F12
If E40 style events:
S16F9,F10
If E53 style events:
S6F11,F12
S6F13,F14
If E30 style events:
Event Report Send/Acknowledge
If E40 style events:
Process Job Event Notify/Confirm
If E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
PRSetMtrlOrder request S16F29,30 Process Job Set Material Order
PRJobCreateEnh S16F11/F12 PRJobCreateEnh
PRJobMultiCreate S16F15/F16 PRJobMultiCreate
SEMI E40.1-0705 © SEMI 1996, 2005 2
Service Message Name Stream, Function SECS-II Name
PRJobDequeue S16F17/F18 PRJobDequeue
PRGetAllJobs S16F19/F20 PRGetAllJobs
PRGetSpace S16F21/F22 PRGetSpace
PRJobSetRecipeVariable S16F23/F24 PRJobSetRecipeVariable
PRJobSetStartMethod S16F25/F26 PRJobSetStartMethod
6 Mapping of Processing Parameter
Table 2 Data Item Mapping
Service Parameter SECS-II Data Item
PrJobID PRJOBID
PRMtlType MF
PRMtlName MID
PRAck ACKA
PRRecipeMethod PRRECIPEMETHOD
RecID RCPSPEC
RecipeVarName RCPPARNM
RecipeVarValue RCPPARVAL
PRProcessStart PRPROCESSSTART
PRCmdName PRCMDNAME
PRJobMilestone If E30 style events:
CEID
If E40 style alerts:
PRJOBMILESTONE
If E53 style events:
CEID
PRJobState PRSTATE
Timestamp TIMESTAMP
PREventID If E30 style events:
CEID
If E40 style events:
PREVENTID
If E53 style events:
CEID
CmdParmName CPNAME
CmdParmVal CPVAL
PRMtrlOrder PRMTRLORDER
ErrorCode ERRCODE
ErrorText ERRTEXT
PREventData V (SV, ECV, DVVAL)
PRJobSpace PRJOBSPACE
PRPauseEvent PRPAUSEEVENT
7 Variable Data Item Mapping
7.1 This section shows the specific SECS-II data classes, and formats needed for SECS-II implementations of
SEMI E40 variable data. According to SEMI E40 §11, all ProcessJob object attributes are to be available as
variables for Process Job state transition events. These variables will be of SEMI E5 data item DVVAL.