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SEMI D31-1102 © SEMI 2002 1 SEMI D31-1102 DEFINITION OF MEASUREMENT INDEX (SEMU) FOR LUMINANCE MURA IN FPD IMAGE QUALITY INSPECTION This definition was technically a pproved by the Global Flat Panel Di spla y Committee a…

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SEMI D30-1101 © SEMI 20013
9.6.1.2 Visual observation by a floodlight from front
side.
9.6.1.3 Microscope observation of color filter with
transmitted illumination.
9.6.1.4 Microscope observation of color filter with
reflected illumination.
9.6.1.5 Surface roughness measurement using a stylus-
type surface roughness measurement device, AFM or
laser microscope.
9.7 Measure the color changes according to the
following procedures.
9.7.1 Measure the spectral transmittance and
chromaticity of each color layer after the light
resistance test using the method described in SEMI
D22. (Measurements must be taken at the same
location as before the test.)
9.7.2 Before and after the test, calculate the color
difference E*ab or E*uv, in each color layer,
according to ISO 7724, from the chromaticity of each
color layer.
10 Reporting Results
10.1 Report the following items:
10.1.1 report date,
10.1.2 test date,
10.1.3 light exposure apparatus type and conditions of
use,
10.1.4 condition of specimens (with/without
Transparent Conductive Film (ITO etc.), size, etc.),
10.1.5 conditions of test (light source, brilliance, length
of time, etc.),
10.1.6 existence of change in outward appearance,
10.1.7 chromaticity of each color layer before and after
thermal treatment (number of measuring points),
10.1.8 color difference of each color layer before and
after thermal treatment, and
10.1.9 change in spectral transmittance at specified
wavelength (e.g. back-light peak wavelength, etc.).
11 Related Documents
11.1 SEMI Standards
SEMI D13 — Terminology for FPD Color Filter
Assemblies
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
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consent of SEMI.
SEMI D31-1102 © SEMI 2002 1
SEMI D31-1102
DEFINITION OF MEASUREMENT INDEX (SEMU) FOR LUMINANCE
MURA IN FPD IMAGE QUALITY INSPECTION
This definition was technically approved by the Global Flat Panel Display Committee and is the direct
responsibility of the Japan Flat Panel Display Committee. Current edition approved by the Japan Regional
Standards Committee on July 19, 2002. Initially available at www.semi.org October 2002; to be published
November 2002.
1 Purpose
1.1 This standard will define the index of measurement
for mura in FPD image quality inspection.
1.2 Conventionally, inspection of FPD image quality
has been sensory, mainly conducted via the human eye,
and among the items detected, there has been no
common standard for mura and other associated
defects. For this reason, when panel makers and their
users who conduct business with a fixed quality level
set a mura acceptance level, limit samples are used as
necessary.
1.3 Operational problems with limit samples include:
Level of mura cannot be determined without
viewing the sample. Due to this, it is not possible
to express the level via written documentation or
telephone.
The sample settings are subjectively decided by the
setter, and lack objectivity.
It is difficult to setup and maintain a consistent
sample level at multiple locations.
1.4 Etc. — Above all, in a market complicated by
multiple panel makers and multiple users, where
presently there is no fixed standard for expressing mura
level, we have to say that it is extremely difficult to
ensure a fixed level for panel quality.
1.5 In this standard, using ergonomics approach, we
will investigate the human eye’s sensitivity regarding
mura, and by expressing the relation between mura area
and contrast, propose an index to express the level of
mura.
2 Scope
2.1 This standard is applicable to FPD (Flat Panel
Displays) excluding CRT and HMD (Head Mount
Displays). The display sizes targeted are typically from
Type 8 (8" (20.3 cm) diagonal) to Type 30 (30" (76.2
cm) diagonal).
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Limitations
3.1 In the first edition of this standard, the target of
measurement, mura, is limited as below.
3.1.1 Line defects narrower than 300 µ m and pixel dot
defects are not the subject of this standard.
3.1.2 Mura background display is limited to
monochrome displays/intermediate gray scale level;
RGB, etc. color background and L0/L63 background
are not the subject of this standard.
4 Referenced Standards
None.
5 Terminology
5.1 Definitions
5.1.1 Gray Scale — Gray scale on image display. In
this standard, indicates level 32 out of 64 level gray
scale.
5.1.2 L0 Display — Gradation 0 out of 64. (Pitch
Black)
5.1.3 L63 Display — Gradation 63 out of 64
(Completely white)
5.2 Abbreviations and Acronyms
5.2.1 JND — Abbreviation for Just Noticeable
Difference. Used in the field of Psychophysics; for a
certain stimulus, the smallest change in stimulus
(luminance, for example) where a difference can be
perceived. Specifically, it is often used to indicate a
statistical value where the probability of the difference
being “perceptible” is 50% and the probability of the
difference “not being perceptible” is 50%. Also
expressed using lower case letters, j.n.d.
5.2.2 Semu — Semi Mura, Measurement index for
mura, defined in this standard.
SEMI D31-1102 © SEMI 2002 2
6 Semu Definition
6.1 Under specific conditions, the below regressive
relationship can be seen between area and contrast for
Human Mura JND. (Refer to Related Information.)
Cjnd = F(Sjnd)
= 1.97/Sjnd
0.33
+ 0.72
Cjnd: Contrast of mura at JND (Unit: % relative to
background = 100%)
Sjnd: Area of mura at above contrast (Units: mm
2
)
6.1.1 In the above equation, contrast at JND is
inversely proportional to area raised to the 0.33 power.
In short, it indicates that as mura area gets smaller, only
darker muras can be sensed.
6.2 For the subject mura, the mura level, Semu, can be
calculated using the below formula.
Semu = | Cx| / Cjnd
= | Cx| / F(Sx)
= | Cx| /(1.97/Sx
0.33
+ 0.72)
Cx: Average contrast of mura being measured
(Unit: % relative to background = 100%)
Sx: Surface area of mura being measured (Units:
mm
2
)
7 Notation
7.1 Semu is a comparison ratio between contrast of the
measurement target and contrast in a JND, and thus has
no unit.
7.2 It is recommended that significant digits be
displayed to one decimal place.
NOTE 1: Notation uses this following methodology.Notation
Example 1: The level of JND mura in this study is Semu =
1.0. Notation Example 2: The level of this mura is Semu 2.5.
8 Test Methods
8.1 Comparative Measurement and Direct
Measurement — The two methods for determining
Semu levels on panels are comparative measurement
and direct measurement.
8.1.1 Comparative Measurement
8.1.1.1 The comparative measurement method involves
a panel and software which can simulate Semu level, to
which a person compares a mura on an actual panel,
making adjustments, until a level which appears similar
is determined. This is a method that can be used in the
actual production site easily using the Semu simulation
panel as the variable level limit sample.
8.1.2 Direct Measurement
8.1.2.1 The direct measurement method captures the
actual panel with a CCD camera, or the like, and is a
method of measuring the Semu level of the mura
section, making it possible to directly determine the
Semu from the area and contrast of the mura section
that is captured.
8.2 Measurement Equipment
8.2.1 Semu measurement consists of measurement of
the area of mura on the display surface and contrast
measurement, and needs to be appropriately calibrated.
8.3 Measurement Environment
8.3.1 Semu measurement will be conducted in a
darkroom environment.
8.4 Display Conditions
8.4.1 Background luminance for Semu measurement
shall be 50 ± 10 cd/m
2
.
8.5 Contrast Measurement
8.5.1 The average contrast of the mura section shall be
measured, and the contrast ratio of the mura section will
expressed as a percentage, for when the background =
100%.
9 Related Documents
9.1 Experiment Overview for Calculation of
Measurement Index for Mura in FPD Image Quality
Inspection. R. Yositake IBM Japan, T.Tamura Tokyo
Institute of Polytechnics Oct. 23/2001
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
The user' s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights and the risk of infringement
of such rights are entirely their own responsibility