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SEMI PR9-0705 © SEMI 2005 10 (A) Package with Shut-off Valve and Mas s Flow Controller (B) Panel in Enclosur e Consistency of Six Packages. Applications Include Gas Chromatography, Analytical Instrume ntation, Semiconduc…

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SEMI PR9-0705 © SEMI 2005 9
9.4.9 Test for shock and vibration. Check for operation and leak integrity before and after testing. MIL-STD 810
9.4.10 Test for performance at maximum and minimum voltages based on product specifications.
9.4.11 Perform electrical testing and validation. Check for power consumption, response time, noise, dielectric
breakdown, resistance fluctuations, others?
9.4.12 Test for compatibility with typical, operating and/or specified fluids for validation testing.
9.4.12.1 See Figures 1–4 of a MEMS System with subsystem fluidic interface features.
9.4.12.2 Courtesy Redwood MicroSystems
Figure 1
Mechanical Drawing Showing MEMS System
SEMI PR9-0705 © SEMI 2005 10
(A)
Package with Shut-off
Valve and Mass Flow Controller
(B)
Panel in Enclosure Consistency of Six
Packages. Applications Include Gas
Chromatography, Analytical
Instrumentation, Semiconductor
Processing.
Figure 2
Figure 3
Mechanical Drawing Showing MEMS Subsystem and Fluidic Adaptor
SEMI PR9-0705 © SEMI 2005 11
Figure 4
Microvalve in Fusion Reactor
9.5 Purpose — To be developed.
9.6 Scope — To be developed.
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