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SEMI E112-0305 © SEMI 2001, 2005 11 RFID PLACEM ENT ZONE Figure 11 Detail E: RFID Placement Zone Table 2 External and Internal Dimensio ns for MRSP150 Symbol Used Figure Value Spe cified Reference Measured From F…
SEMI E112-0305 © SEMI 2001, 2005 10
Figure 9
Detail D: Reticle Contact Surface
Figure 10
Exterior Bottom View of MRSP150
SEMI E112-0305 © SEMI 2001, 2005 11
RFID PLACEMENT ZONE
Figure 11
Detail E: RFID Placement Zone
Table 2 External and Internal Dimensions for MRSP150
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
1 45° ± 0.5° facial reference plane sides of orientation notches
1 45° ± 0.5° facial reference plane edge of side handling flange chamfer
2 45° ± 0.5° facial reference plane sides of side handling flange
orientation notches
5 45° ± 1° bilateral and facial plane
intersection
surface of the center hole in the top
robotic handling flange
r65 n/a 1 mm (0.039 in.)
maximum
not applicable all required concave features (radius)
r66 n/a 2 mm (0.079 in.)
maximum
not applicable all required convex features (radius)
r67 11 5 mm (0.197 in.)
minimum
info pad center perimeter of info pad
d63 5 35.0 + 0.9 /
0.1 mm
(1.378 + 0.035 /
0.004 in.)
centered on bilateral and
facial plane intersection
top robotic handling flange hole
design feature
x41 1 30 ± 1 mm
(1.181 ± 0.039 in.)
bilateral reference plane orientation notch center
x42 1 50 ± 1 mm
(1.969 ± 0.039 in.)
bilateral reference plane orientation notch center
x43 1 50 ± 1 mm
(1.969 ± 0.039 in.)
bilateral reference plane orientation notch center
x44 1 53 mm (2.087 in.)
maximum
bilateral reference plane side of robotic handling flange
column
x45 1 65.3 ± 1 mm
(2.571 ± 0.039 in.)
bilateral reference plane orientation notch tip
x46 1 71 ± 1 mm
(2.795 ± 0.039 in.)
bilateral reference plane edge of robotic handling flange
x47 1 58 mm (2.283 in.)
minimum
bilateral reference plane edge of robotic handling flange
corner beveling
x100 1 92.5 mm (3.642 in.)
minimum
bilateral reference plane edge of recess
x114 None 0 ± 1 mm
(0 ± 0.039 in.)
bilateral reference plane reticle bisecting plane
x119
4
65.2 mm (2.567 in.)
minimum
bilateral reference plane edge of pellicle exclusion volume
SEMI E112-0305 © SEMI 2001, 2005 12
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
x129 2 5.68 ± 0.25 mm
(0.224 ± 0.039 in.)
side edge of side handling
flange
side handling flange alignment notch
tip
x223 1, 3 106.5 ± 1 mm
(4.193 ± 0.039 in.)
bilateral reference plane edge of side handling flange
x227 1 107.5 mm (4.232 in.)
maximum
bilateral reference plane side of pod
x236 3 100 mm (3.937 in.)
maximum
bilateral reference plane edge of side handling exclusion
volume
x238 4 68.2 mm (2.685 in.)
maximum
bilateral reference plane edge of end-effector exclusion
volume
x239 4 78.3 mm (3.083 in.)
maximum
bilateral reference plane edge of end-effector exclusion
volume
x240 4 85.3 mm (3.358 in.)
minimum
bilateral reference plane edge of end-effector exclusion
volume
x241 4 90 mm (3.543 in.)
maximum
bilateral reference plane edge of safety rail exclusion volume
x242 7 56 mm (2.205 in.)
maximum
bilateral reference plane edge of rear retainer volume
x243 4 77.35 mm (3.045 in.)
minimum
bilateral reference plane edge of lift clearance exclusion
volume
x245 8 67.7 mm (2.665 in.) bilateral reference plane center of reticle contact surface
x246 9 0.5 mm (0.019 in.)
maximum
center of reticle contact
surface
edge of reticle contact surface
x247 10 104.5 mm (4.114 in.)
maximum
bilateral reference plane edge of conveyor rail surface
x248 10 107.5 +0 0.5 mm
(4.232 +0
0.020 in.)
bilateral reference plane edge of conveyor rail surface
x249 7 36 mm (1.417 in.)
maximum
bilateral reference plane edge of reticle backstops
x250 7 45 mm (1.772 in.)
minimum
bilateral reference plane edge of reticle backstops
x251 11 94 mm (3.700 in.)
minimum
bilateral reference plane edge of RFID exclusion volume
x252 11 105 mm (4.134 in.)
maximum
bilateral reference plane edge of RFID exclusion volume
x253 11
27.25 0.5 mm
(1.073 0.039 in.)
bilateral reference plane center of info pads A and B
x254 11
45.75 0.5 mm
(1.801 0.039 in.)
bilateral reference plane center of info pads C and D
y44 1 53 mm (2.087 in.)
maximum
facial reference plane side of robotic handling flange
column
y45 1 65.3 ± 1 mm
(2.571 ± 0.039 in.)
facial reference plane orientation notch tip
y46 1 71 ± 1 mm
(2.795 ± 0.039 in.)
facial reference plane edge of robotic handling flange
y47 1 58 mm (2.283 in.)
minimum
facial reference plane edge of robotic handling flange
corner beveling
y106 1 92.5 mm (3.642 in.)
minimum
facial reference plane edge of recess
y126 1 71.1 ± 1 mm
(2.799 ± 0.039 in.)
facial reference plane depth of side handling flange