semi合集-English.pdf - 第5559页

SEMI P10-0705 © SEMI 1990, 2005 54 <xs:sequence minOccurs="0"> <xs:element name="CdDeviationFromMean" type="xs:double"/> </xs:sequence> <xs:sequence minOccurs="0&qu…

100%1 / 7923
SEMI P10-0705 © SEMI 1990, 2005 53
<xs:element name="CdRange" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdThreeSigma" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDeviationFromTarget"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDeviationFromMean"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdStd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdCorrelationId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdEquipReqd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EquipSiteReqd" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdDefinition"/>
</xs:complexType>
<xs:complexType name="CdSetType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdGroupName" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdQualityId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdTolerance" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdRange" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdThreeSigma" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDeviationFromTarget"
type="xs:double"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 54
<xs:sequence minOccurs="0">
<xs:element name="CdDeviationFromMean"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdStd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdCorrelationId" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdSet"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdSet"/>
</xs:complexType>
<xs:complexType name="CdXyDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdXGroup" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdYGroup" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdXySite" type="CdXySiteType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdXyTolerance" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdXyDeviation" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdXyReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdXyDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdXyDefinition"/>
</xs:complexType>
<xs:complexType name="CdXySiteType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="CdHorizontalId"
type="xs:string"/>
</xs:sequence>
<xs:element name="CdHorizontalLocation"
type="XYType"/>
<xs:sequence minOccurs="0">
<xs:element name="CdVerticalId"
type="xs:string"/>
SEMI P10-0705 © SEMI 1990, 2005 55
</xs:sequence>
<xs:element name="CdVerticalLocation" type="XYType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdXySite"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdXySite"/>
</xs:complexType>
<xs:complexType name="CdIsoDenseDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdIsoGroup" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdDenseGroup" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdIsoDenseTolerance"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdIsoDenseReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdIsoDenseDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdIsoDenseDefinition"/>
</xs:complexType>
<xs:complexType name="OpcDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpcType" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="OpcMinimumFeatureSize"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpcMinimumGap"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpcPatternSeparate"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpcPatternModifiable"
type="xs:boolean"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>