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SEMI C26-0699 E © SEMI 19 83, 2000 H EXA METH YLD I SIL A Z A N E 4 Previous SEMI Re ference # C1.23-94 C7.10-94 Grade 1 Tier A (Specif ication) (Guideline) Silver ( Ag) 0.1 ppm max 10 ppb m ax Sodium (Na) 0.5 ppm m a x …
HEXAMETHYLDISILAZANE SEMI C26-0699
E
© SEMI 1983, 20003
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. Until
standardized test methods are published, test
methodology shall be determined by user and producer.
The Process Chemicals Committee considers a test
method to be valid only if there is a documented
recovery study showing a recovery of 75 - 125%.
Recovery is for a known sample spike at 50% of the
specified level.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
Table 1 Impurity Limits and Other Requirements for Hexamethyldisilazane
Previous SEMI Reference # C1.23-94 C7.10-94
Grade 1 Tier A
(Specification) (Guideline)
Assay 99.0% 99.5% min
Color (APHA) 10 max 10 max
Trailing Impurities (area % max) 0.1% 0.2%
Residue after Evaporation 10 ppm max 10 ppm max
UV absorbance units at 270 nm 0.25 max 0.25 max
Turbidity 1.0 NTU units 1.0 NTU units max
Chloride (Cl) 2 ppm max 0.3 ppm max
Aluminum (Al) 0.1 ppm max 10 ppb max
Antimony (Sb) -- 10 ppb max
Arsenic (As) -- 10 ppb max
Arsenic and Antimony (as As) 10 ppb max --
Barium (Ba) -- 10 ppb max
Beryllium (Be) -- 10 ppb max
Bismuth (Bi) -- 10 ppb max
Boron (B) 0.1 ppm max 10 ppb max
Cadmium (Cd) -- 10 ppb max
Calcium (Ca) 0.1 ppm max 10 ppb max
Chromium (Cr) -- 10 ppb max
Cobalt (Co) -- 10 ppb max
Copper (Cu) 0.1 ppm max 10 ppb max
Gallium (Ga) 0.1 ppm max 10 ppb max
Germanium (Ge) 0.1 ppm max 10 ppb max
Gold (Au) 0.1 ppm max 10 ppb max
Iron (Fe) 0.05 ppm max 10 ppb max
Lead (Pb) 0.1 ppm max 10 ppb max
Lithium (Li) 0.1 ppm max 10 ppb max
Magnesium (Mg) 0.1 ppm max 10 ppb max
Manganese (Mn) -- 10 ppb max
Molybdenum (Mo) -- 10 ppb max
Nickel (Ni) 0.1 ppm max 10 ppb max
Potassium (K) 0.1 ppm max 10 ppb max
SEMI C26-0699
E
© SEMI 1983, 2000 HEXAMETHYLDISILAZANE4
Previous SEMI Reference # C1.23-94 C7.10-94
Grade 1 Tier A
(Specification) (Guideline)
Silver (Ag) 0.1 ppm max 10 ppb max
Sodium (Na) 0.5 ppm max 10 ppb max
Strontium (Sr) 0.1 ppm max 10 ppb max
Tantalum (Ta) 0.1 ppm max 10 ppb max
Thallium (Tl) -- 10 ppb max
Tin (Sn) -- 10 ppb max
Titantium (Ti) -- 10 ppb max
Vanadium (V) -- 10 ppb max
Zinc (Zn) -- 10 ppb max
Zirconium (Zr) -- 10 ppb max
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
HYDROCHLORIC ACID SEMI C27-0301 © SEMI 1978, 20011
SEMI C27-0301
SPECIFICATIONS AND GUIDELINES FOR HYDROCHLORIC ACID
These specifications and guidelines were technically approved by the Global Process Chemicals Committee
and are the direct responsibility of the North American Process Chemicals Committee. Current edition
approved by the North American Regional Standards Committee by letter ballot dated October 17, 1999.
Initially available at www.semi.org February 2001; to be published March 2001. This document replaces
SEMI C1.7, C7.2, C8.2, C11.6, and C12.2 in their entirety. Originally published in 1978, 1990, 1992, 1996,
and 1995 respectively; previously published June 2000.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for hydrochloric acid used in the
semiconductor industry and testing procedures to
support those standards. Test methods have been shown
to give statistically valid results. This document also
provides guidelines for grades of hydrochloric acid for
which a need has been identified. In the case of the
guidelines, the test methods may not have been
statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of
hydrochloric acid used in the semiconductor industry.
2.2 The VLSI grade purity level is typically required
by semiconductor devices with geometries of 0.8–1.2
microns.
2.3 These specifications and guidelines do not purport
to address safety issues, if any, associated with their
use. It is the responsibility of the users of these
specifications and guidelines to establish appropriate
safety and health practices and determine the
applicability of regulatory limitations prior to use.
3 Limitations
3.1 None.
4 Referenced Standards
4.1 SEMI Standards
SEMI C1 — Specifications for Reagents
4.2 ASTM Standards
1
ASTM D5127 — Standard Guide for Ultra Pure Water
Used in the Electronics and Semiconductor Industry
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555. Website:
www.astm.org
5 Terminology
5.1 None.
6 Physical Property (for information only)
Density at 25°C
1.19 g/mL
7 Requirements
7.1 The requirements for hydrochloric acid for Grades
1 and 2, VLSI Grade, and Tiers B and C are listed in
Table 1.
8 Grade 1 Procedures
NOTE 2: Each laboratory is responsible for verifying the
validity of the method within its own operation.
8.1 Assay — Accurately weigh a glass-stoppered
conical flask containing about 30 mL of water. Deliver
from a pipet about 3 mL of sample near the water
surface, stopper immediately, and reweigh. Dilute to
about 50 mL with water, add methyl orange indicator
solution, and titrate with standardized 1 N sodium
hydroxide to a red-to-yellow color change.
%Assa
y
=
mL
×
N
of NaOH
×
3.646
Weight of sample g
()
8.2 Color — Dilute 2.0 mL of platinum-cobalt stock
solution (APHA No. 500) to 100 mL with water.
Compare this standard (APHA No. 10) with 100 mL of
sample in Nessler tubes. View vertically over a white
background. The sample must be no darker than the
standard.
8.3 Extractable Organic Substances — Cool 110 mL
of sample in an ice bath. Add 5 mL of 2,2,4-
trimethylpentane and 100 mL of water to each of two
250 mL separatory funnels. To a third funnel add 100
mL of water and 5 mL of the standard (see below). To
the first funnel add 100 mL of the cooled sample, and
100 mL of water to each of the remaining two. Stopper,
shake well, and allow the layers to separate. Inject 1.0
µL of each of the 2,2,4-trimethylpentane extracts into a
gas chromatograph with a flame ionization detector.
The following conditions have been found to be
satisfactory: Column — 20% Carbowax 20 M on