semi合集-English.pdf - 第5686页
SEMI P10-0705 © SEMI 1990, 2005 181 END_PATTERN_DEFINITION 1000001 END_PATTERN_GROUP FLD_2_PG ! ! BARCODE Component PATTERN_GROUP _ID BARCODES END_PATTERN_GROUP_OPTIONS BARCODES ! LEVEL_ID 1000001 PA TTERN_NAME FILENAME0…
SEMI P10-0705 © SEMI 1990, 2005 180
!
PATTERN_GROUP_INSTANCE LOGO
START_PLACEMENT LG_1
LOCATION 10000, 7500
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT LG_1
END_PATTERN_GROUP_INSTANCE LOGO
!
END_CELL MASK_PATTERNS
!------------------------------------------
!
! The PATTERN_GROUP_ID section relates patterns to specific groups of Masks. The LEVEL_ID
! value MUST agree with a specific MASK_ID value. When multiple Masks are ordered, there
! will be multiple LEVEL_ID sections within each PATTERN_GROUP_ID section.
!
! The PATTERN_NAME values should agree with those listed in the DATA_MEDIUM section.
!
!----------PATTERN_GROUPS-----------------
! Field 1
PATTERN_GROUP_ID FLD_1_PG !refers to PATTERN_GROUP_INSTANCE FLD_1_PG
END_PATTERN_GROUP_OPTIONS FLD_1_PG
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME01.1$
START_PATTERN_OPTIONS FLD_1_1
PATTERN_ADDRESS_SIZE 0.25
SCALE_FACTOR 1.0
DIGITIZED_DATA_DARK T
UNSCALED_PATTERN_SIZE 15000.0, 15000.0
MIRROR_PATTERN F
END_PATTERN_OPTIONS FLD_1_1
END_PATTERN_DEFINITION 1000001
END_PATTERN_GROUP FLD_1_PG
!
! Field 2
PATTERN_GROUP_ID FLD_2_PG !refers to PATTERN_GROUP_INSTANCE FLD_2_PG
END_PATTERN_GROUP_OPTIONS FLD_2_PG
!
LEVEL_ID 100001
PATTERN_NAME FILENAME01.2$
START_PATTERN_OPTIONS FLD2_2
PATTERN_ADDRESS_SIZE 0.25
SCALE_FACTOR 1.0
DIGITIZED_DATA_DARK F
UNSCALED_PATTERN_SIZE 15000.0, 15000.0
MIRROR_PATTERN F
END_PATTERN_OPTIONS FLD2_2
SEMI P10-0705 © SEMI 1990, 2005 181
END_PATTERN_DEFINITION 1000001
END_PATTERN_GROUP FLD_2_PG
!
! BARCODE Component
PATTERN_GROUP_ID BARCODES
END_PATTERN_GROUP_OPTIONS BARCODES
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME02.1$
START_PATTERN_OPTIONS BC1
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS BC1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP BARCODES
!
! BOJ Component
PATTERN_GROUP_ID BOJ
END_PATTERN_GROUP_OPTIONS BOJ
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME03.50
START_PATTERN_OPTIONS BJ1
PATTERN_ADDRESS_SIZE 0.250
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS BJ1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP BOJ
!
! EOJ Component
PATTERN_GROUP_ID EOJ
END_PATTERN_GROUP_OPTIONS EOJ
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME04.50
START_PATTERN_OPTIONS EJ1
PATTERN_ADDRESS_SIZE 0.250
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS EJ1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP EOJ
!
! Fiducial Component
PATTERN_GROUP_ID FID
END_PATTERN_GROUP_OPTIONS FID
SEMI P10-0705 © SEMI 1990, 2005 182
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME05.S$
START_PATTERN_OPTIONS FL1
PATTERN_ADDRESS_SIZE .25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS FL1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP FID
!
! LOGO Component
PATTERN_GROUP_ID LOGO
END_PATTERN_GROUP_OPTIONS LOGO
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME06.25
START_PATTERN_OPTIONS LO1
PATTERN_ADDRESS_SIZE .25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS LO1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP LOGO
!------------------------------------------
!
END_MASK_GROUP UT1X_GROUP_1
!
END_MASK_SET ABC123
!
END_ORDER ORDER1111
CHECKSUM 0