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SEMI E30.5-0302 © SEMI 2001, 2002 24 12.8 Remote Command and Proces sing State Rel ationship Table 14 Remote Command s versus Proc essing St ates T able Command ABO R T CLEANUP PP-ASSIGN NEXT -MA TERIAL PA U S E PP- SEL …

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SEMI E30.5-0302 © SEMI 2001, 200223
12.7 Remote Commands and Associated Host Command Parameters
This table describes the allowable
command parameters (CPNAME) for each remote command (RCMD). Equipment must support all parameters.
The column marked Req/Opt, specifies which parameters are required to be sent by the host and which parameters
may be optionally sent by the host.
Table 13 Remote Command and Associated Host Command Parameters Table
Parameter(s)Remote
Command
CPNAME Req/opt Description
ABORT CP-ABORT-LEVEL O
CLEANUP CP-LOCATIONID
CP-SLOTID
O
O
Location and SLOT may be used to define
a different cassette / slot destination for
the substrates.
NEXT-MATERIAL CP-LOCATIONID
CP-SLOTID
O
O
If no command parameters are specified,
then the substrate is returned to its original
source carrier and slot.
If a CP-SLOT command parameter is
specified, then the substrate is placed in
that slot of its original source carrier.
If a CP-LOCATIONID command
parameter is specified, then the substrate is
placed in an available slot of the carrier at
the specified location.
If both CP-SLOT and CP-LOCATION
command parameters are specified, then
the substrate is placed in specified slot of
the carrier at the specified location.
PAUSE None N/A None
PP-ASSIGN CP-PRIORITY
CARRIERBLD*
O
R
* More than one CARRIERBLD may be
specified. There may be more than one
PROCESS-BLD-GROUP in each
CARRIERBLD.
PP-SELECT CARRIERBLD* R * More than one CARRIERBLD may be
specified. There may be more than one
PROCESS-BLD-GROUP in each
CARRIERBLD.
PP-UNASSIGN CP-LOCATIONID
CP- CARRIERID
R*
R*
* At least one is required.
PP-UPDATE CP-SLOTLIST
CP-SITELIST
CP-ALIGNLIST
R*
R*
R*
* At least one is required. By default use
the current active input port.
RESTAGE CP-LOCATIONID R* * Some equipment may not support this
feature.
RESUME None N/A None
START None N/A None
STOP None N/A None
SEMI E30.5-0302 © SEMI 2001, 2002 24
12.8 Remote Command and Processing State Relationship
Table 14 Remote Commands versus Processing States Table
Command
ABORT
CLEANUP
PP-ASSIGN
NEXT-MATERIAL
PAUSE
PP-SELECT
PP-UPDATE
RESUME
START
STOP
PROCESSING STATE
IDLE X X
PROCESSING ACTIVE
PROCESS
SETTING UP X X X X
READY X X X X X
EXECUTING X
LOAD X X X X
WORKING
ALIGN X X X X X
MEASURING X X X X X
TAKE MEASURE X X X X X
TAKE SAMPLE X X X X X
SAMPLE COMPLETE X X X X X
MEAS COMPLETE X X X X X
UNLOAD X X X X
STOPPING X X
PAUSE
PROCESS PAUSE
PAUSING X X X
PAUSED X X X X X
CHECKING X X X
ALARM PAUSED X X X
ABORTED X X
SEMI E30.5-0302 © SEMI 2001, 200225
13 Scenarios
13.1 The purpose of this section is to document any MSEM specific scenarios that must be performed by this class
of equipment.
13.2 Normal Reporting
COMMENTS HOST EQUIPMENT COMMENTS
The equipment is in the IDLE processing state and in the
ONLINE REMOTE control state. Material arrives on input
port 1.
PP-ASSIGN S2,F63-->
<--S2,F64 Positive Acknowledge.
<--S6,F11 IDLE -> SETTING UP
Positive Acknowledge. S6,F12-->
<--S6,F11 SETTING UP -> READY
Positive Acknowledge. S6,F12-->
START S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 READY -> LOAD.
Positive Acknowledge. S6,F12-->
[WHILE] Not End of Run
1) LOAD->WORKING
2) Sample and/or Site level data reporting.
3) WORKING->UNLOAD
4) Substrate level data reporting.
5) UNLOAD->LOAD.
[ENDWHILE].
<--S6,F11 LOAD->STOPPING.
Positive Acknowledge. S6,F12-->
Run level data reporting.
<--S6,F11 STOPPING->IDLE.
Positive Acknowledge. S6,F12-->
13.3 ABORT/ CLEANUP Remote Command Scenario
Host issues the ABORT/CLEANUP remote command
COMMENTS HOST EQUIPMENT COMMENTS
ABORT S2,F41--> ("CLEANUP" not specified)
<--S2,F42 Positive Acknowledge.
<--S6,F11 Transition to ABORTED.
Positive Acknowledge. S6,F12-->
CLEANUP S2,F41-->
<--S2,F42 Positive Acknowledge.
Equipment performs cleanup activities.
<--S6,F11 CEID is posted.
[IF] cleanup is successful:
Transition to IDLE
[ELSE]
Remain in the ABORTED state.
[ENDIF].
Positive Acknowledge. S6,F12-->