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SEMI D39-0704 © SEMI 2004 1 SEMI D39-0704 SPECIFICATION FOR MARKERS ON FPD POLARIZING FILMS This specification was technically approved by the Global Flat Panel Displa y – Color Filter & Optical Elements Committee an…
SEMI D38-0304 © SEMI 2004 1
SEMI D38-0304
GUIDE FOR QUALITY AREA OF LCD MASKS
This guide was technically approved by the Global Flat Panel Display – Materials & Components Committee
and is the direct responsibility of the Japanese Flat Panel Display – Materials & Components Committee.
Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially
available at www.semi.org February 2004; to be published March 2004.
1 Purpose
1.1 This guide defines the quality area of LCD masks.
2 Scope
2.1 This guide applies to masks that are principally
used in fabricating liquid crystal displays. The mask
size specifies range from 202.8 × 202.8 mm to 700 ×
800 mm.
2.2 Substrates with an edge length less than 200 mm
follow the specifications for a semiconductor mask (see
SEMI P1).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI D6 — Specification for Edge Length and
Thickness for Liquid Crystal Display (LCD) Mask
Substrates
SEMI P1 — Specification for Hard Surface Photomask
Substrates
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
None.
5 Quality Area of LCD Masks
5.1 For Mask Size ≤ 550 × 650 mm:
10 mm from (peripheral) edge of blanks
5.2 For Mask Size > 550 × 650 mm, ≤ 700 × 800:
20 mm from (peripheral) edge of blanks
5.3 The quality area should be within the area of the
writing pattern.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI D39-0704 © SEMI 2004 1
SEMI D39-0704
SPECIFICATION FOR MARKERS ON FPD POLARIZING FILMS
This specification was technically approved by the Global Flat Panel Display – Color Filter & Optical
Elements Committee and is the direct responsibility of the Japanese Flat Panel Display – Color Filter &
Optical Elements Committee. Current edition approved by the Japanese Regional Standards Committee on
April 30, 2004. Initially available at www.semi.org June 2004; to be published July 2004.
1 Purpose
1.1 Markers on FPD polarizing films, originally used
for indicating optical direction of the films, have
expanded the variety of products, such as identification
for both sides of films, and for equipment. This also
complicated the variety of shapes and colors for
markers.
1.2 This standard establishes specification for unifying
markers used for indicating direction of FPD polarizing
films.
1.3 This specification may be applied to manufacturing
process, quality control, and designing of Liquid
Crystal Display (LCD) panel.
2 Scope
2.1 This document specifies markers on FPD
polarizing films.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 None.
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 None.
5 Requirements
5.1 Markers on FPD polarizing films shall be used for
indicating specific direction of the films.
5.2 Markers Specification
5.2.1 Makers shall be simple sign on the specific
location of protective film, as follows:
Circle:
Triangle:
Arrow:
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI D40-0704 © SEMI 2004 1
SEMI D40-0704
TERMINOLOGY FOR FPD SUBSTRATE DEFLECTION
This standard was technically approved by the Global Flat Panel Display - Factory Automation Committee
and is the direct responsibility of the Japanese Flat Panel Display - Factory Automation Committee. Current
edition approved by the Japanese Regional Standards Committee on April 30, 2004. Initially available at
www.semi.org June 2004; to be published July 2004.
1 Purpose
1.1 This document provides the terms and definitions
of a physical transformation when flat panel display
(FPD) substrates are maintained statically.
2 Scope
2.1 These terms and definitions are applicable to both
front and back substrates used in FPD fabrication.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This standard is not applicable to sag at
transportation between substrate venders and FPD
manufacturers.
4 Referenced Standards
4.1 SEMI Standards
SEMI D9 Terminology For FPD Substrates
SEMI D25 Specification For Flat Panel Display
Substrate Shipping Case
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 Displacement Terminology — The displacement
is generated by sag and lift caused by the supporting
positions and/or locations of the FPD substrate. The
displacement is defined by the values of two-
dimensional sag and lift. Two dimensional maximum
displacement is also defined by values of two-
dimensional maximum sag and lift, and the thickness of
the FPD substrate.
5.1.1.1 support plain — a support plain is defined as a
horizontally ideal flat plain which is enhanced from a
horizontally straight line defined from the top position
of the support members, as shown in Figure 1.
5.1.1.2 support member support member is a
support device such as a support pin to support FPD
substrates, as shown in Figure 1.
5.1.1.3 support span support span is defined as at
least the distance between two support members, as
shown in Figure 1.
Support Member
Support plain
Support Span
Figure 1
Definitions of Support Span, Support Member and
Support Plain
5.1.1.4 lift lift is defined as the displacement to the
bottom surface of substrate from the support plain. It is
located above position from the support plain, as shown
in Figure 2.
5.1.1.5 sag sag is defined as the generated distance
between the bottom surface of the substrate and the
support plain caused by gravity, as shown in Figure 2.
Substrate
Support Plain
Support Member
Lift
Sag
Sag
Figure 2
Definitions of Lift and Sag
NOTE 1: In case there is sag at the edge of a substrate, sag is
defined by the distance to position “A” from the support
plain. The position “A” is determined by the intersection point
of between the edge of the bottom surface of the substrate and
the edge of the beveled region, as shown in Figure 3.