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SEMI E40-0705 © SEMI 1995, 2005 15 # Current State Trigge r New State Action(s) 6 PROCESSING Material processing completed. PROCESS COMPLETE PR Job Processing Complete event is triggered. The processing resource p e rfor…

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8.3.2.10.1 The order that jobs become active is dependent upon whether the equipment supports job queuing and/or
job pooling. Example methods for job activation include FIFO (first-in/first-out) order, material arrival order, and
host ordering of jobs (provided by additional services). The equipment may support only one method of selecting
jobs for activation, or more than one method allowing only one method to be used at a time or more than one
method to be used at a time.
8.3.2.10.2 All process jobs pass through this state. If the processing resource supports queuing/pooling, jobs may
remain in this state for prolonged periods. In any case, a process job remains queued/pooled until the material
positions (of the processing resource) needed for the process are available or are already occupied by the material to
be processed.
8.3.2.11 STOPPING (ACTIVE Substate) — While the PR Job is in the STOPPING substate, the processing resource
is performing a stop procedure to terminate processing in an orderly manner. It is the responsibility of the processing
resource to cease the current activity at the next safe, convenient point, preserving material integrity. For processing
equipment this may require sending all related substrates to its output destination. This implies that each material is
processed as specified in the recipe or not at all.
8.3.2.12 WAITING FOR START (EXECUTING Substate) — The substate WAITING FOR START is used only in
manual start process jobs. It is entered once SETUP is complete and a PR Job Start Process has not yet been
received by the processing resource. Manual start is defined by the supervisor in PR Job Create.
8.3.2.12.1 The job remains in this state, ready to process the material, until the PR Job Start Process is received or
Abort or Stop terminates the job.
8.3.2.13 POST ACTIVE — This is the parent state of those states that refer to the final state (completion) of the
process jobs. Process jobs that have completed, stopped or aborted should remain in this state until the trigger to
transition to extinction is detected (see Table 1). If there is no Control Job associated with the process job, as in the
case of the inline stepper/scanner, the process job should remain until all material associated with the process job has
left the equipment or a process job specifying the same material replaces it.
8.3.2.14 STOPPED (POST ACTIVE substate) — This is the final state for those jobs that have been in the
STOPPING state.
8.3.2.15 ABORTED (POST ACTIVE substate) — This is the final state for those jobs that have been in the
ABORTING state.
8.3.3 Process Job State Transitions — The detailed state definitions are defined in Table 1.
Table 1 Process Job State Transition Table
# Current State Trigger New State Action(s)
1 (no state) The processing resource accepts a
Process Job create request.
QUEUED/ POOLED The job is placed the job queue/pool.
Acknowledge the Process Job creation.
2 QUEUED/
POOLED
The processing resource has been
allocated to the Process Job.
SETTING UP The job is removed from the queue/pool.
PR Job Setup event is triggered.
All required resource preconditioning is
performed.
When job material arrives all material
preparation is performed.
3 SETTING UP Job material is present AND the
processing resource is ready to
start the process job AND
PRProcessStart attribute is not set.
WAITING FOR
START
PR Job Waiting for Start event is triggered.
4 SETTING UP Material is present and ready for
processing. PRProcessStart
attribute is set.
PROCESSING PR Job Processing event is triggered.
Material is processed.
5 WAITING FOR
START
Job Start directive PROCESSING PR Job Processing event is triggered.
Material is processed.
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# Current State Trigger New State Action(s)
6 PROCESSING Material processing completed. PROCESS
COMPLETE
PR Job Processing Complete event is
triggered.
The processing resource performs all
required resource post-conditioning.
Await material departure.
7 Any POST
ACTIVE sub-
state
Job material departs from the
equipment OR the process job
becomes extinct because the
process job is replaced by another
process job that specifies the same
material when no control job is
used.
(Extinction) PR Job Complete event is triggered. The
process job is deleted.
8 EXECUTING The processing resource initiated a
process pause action.
(it received a PAUSE command or
initiated an internal pause)
PAUSING The processing resource pauses at the first
convenient time.
9 PAUSING The processing resource paused
the job.
PAUSED None.
10 PAUSE The processing resource resumed
the job.
EXECUTING The processing resource resumes the
activity that was paused.
11 EXECUTING The processing resource initiated a
process stop action.
(it received a STOP command or
initiated an internal stop)
STOPPING The processing resource stops the current
execution activity at the first convenient
time.
12 PAUSE The processing resource initiated a
process stop action.
(it received a STOP command or
initiated an internal stop)
STOPPING The processing resource stops the current
execution activity at the first convenient
time.
13 EXECUTING The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
14 STOPPING The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
15 PAUSE The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
16 ABORTING The abort procedure is completed.
For some equipment, substrates are
moved out into a safe location as
part of the error recovery.
ABORTED
17 STOPPING The stop procedure is completed
and all material is in a safe
condition.
STOPPED
18 QUEUED/
POOLED
“CANCEL,” “ABORT,” or
“STOP” command received.
(no state) Remove the process job from the
queue/pool.
PR Job Complete event is triggered.
Delete the process job.
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9 Object Definitions
9.1 Processing management defines one standard object, the Process Job.
9.2 Process Job Object Definition — The process job is a dynamic object created by the processing resource as
requested by the supervisor. It tracks progress of the operations required and is deleted by the processing resource
automatically upon completion. The process job is uniquely identified by the PRJobID attribute. The object attribute
notation used in the table below is described in Conventions, ¶5.2.
9.2.1 The attributes in Table 2 shall be accessible using Object Services Standard (SEMI E39).
Table 2 Process Job Attributes
Attribute Name Definition Rqmt Access Form
ObjID An identifier for the service user. It is set when the
process job is created.
Y RO Text
ObjType The object type. Y RO Text:
“PROCESSJOB”
PauseEvent List of event identifiers that cause the equipment to
automatically transition to the PAUSING/PAUSED
states when one of the listed events is triggered.
N RO List of:
EventID
PRJobState A unique sub-state of the job according to the process
job state model in Figure 4.
Y RO Enumerated:
QUEUED/POOLED
SETTING UP
WAITING FOR START
PROCESSING
PROCESS COMPLETE
PAUSING
PAUSED
STOPPING
ABORTING
STOPPED
ABORTED
PRMtlNameList List of identifiers of the material being processed. Y RO List of:
PRMtlName
PRMtlType Identifies the type of material being processed. Y RO Enumerated
PRProcessStart Indicates that the processing resource start processing
immediately when ready.
N RO Boolean:
TRUE — Automatic start
FALSE — Manual start
PRRecipeMethod Indication of recipe specification type, whether using
is applied and which method is used.
Y RO Enumerated:
Recipe only
Recipe with Variable Tuning
RecID Identifier of the recipe applied. Y RO Text
RecVariableList List of variables supporting a recipe method. N RO List of: RecipeVariable
9.2.2 A number of the ProcessJob attributes are composite data types. The constituent data is defined in Table 3.
Table 3 Attribute Data Definitions
Data Itentifier Description Form
PRMtlName Textual identifier of the material being processed. Text
RecipeVariable Variables supporting a recipe method. Structure composed of:
RecipeVarName
RecipeVarValue
RecipeVarName The name of the recipe variable. Text
RecipeVarValue Value of the recipe variable. Depends on variable