semi合集-English.pdf - 第1946页

SEMI E54.3-0698 © SEMI 1998, 2004 3 Integer(range of 1 to 31) 5.2.6 double integer (DINT) — an integer, four bytes long, in the range -2 31 to 2 31 –1. 5.2.7 enumerated byte — a by te with assigned meaning to the values …

SEMI E54.3-0698 © SEMI 1998, 2004 2

3.5 Operation over the entire range specified for an

attribute within a specific object instance is not a

requisite for compliance with this specification.

4 Referenced Standards

4.1 SEMI Standards

SEMI E12 — Standard for Standard Pressure,

Temperature, Density, and Flow Units Used in Mass

Flow Meters and Mass Flow Controllers

SEMI E18 — Guideline for Temperature Specifications

of the Mass Flow Controller

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services

SEMI E52 — Practice for Referencing Gases and Gas

Mixtures Used in Digital Mass Flow Controllers

SEMI E54.1 — Standard for Sensor/Actuator Network

Common Device Model

4.2 IEEE Document

IEEE 754 — Floating Point Definition

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Terminology Defined in Standard for

Sensor/Actuator Network Common Device Model

(SEMI E54.1)

5.1.1 Attribute

5.1.2 Behavior

5.1.3 Byte

5.1.4 Character

5.1.5 Device

5.1.6 Device Manager (DM) Object

5.1.7 Device Model

5.1.8 Instance

5.1.9 Nibble

5.1.10 Object

5.1.11 S, A, and C Objects

5.1.12 Sensor Actuator Controller (SAC) Object

5.1.13 Service

1 Institute of Electrical and Electronics Engineers, IEEE Operations

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Website: www.ieee.org

5.1.14 State Diagram

5.2 Definitions

5.2.1 boolean (BOOL) — a binary bit representing 0

and 1 corresponding to FALSE and TRUE or

DISABLE and ENABLE respectively.

5.2.2 common device model (CDM) — refers to

Sensor/Actuator Network Common Device Model

(SEMI E54.1).

5.2.3 data type — an unsigned short integer formatted

as an enumerated byte to specify attribute data format.

The intended use of this attribute type is in cases where

an attribute, or set of attributes, may be defined,

allowing for more than one level of support (e.g., INT

or REAL). The following values are defined:

0 = INT

1 = REAL

2 = USINT

3 = SINT

4 = DINT

5 = LINT

6 = UINT

7 = UDINT

8 = ULINT

9 = LREAL

10–99 = reserved for CDM

100–199 = reserved for SDMs

200–255 = manufacturer-specified

5.2.4 data units — an unsigned integer formatted as an

enumerated byte to specify attribute data units. The

intended use of this attribute type is in cases where an

attribute, or set of attributes, may be defined, allowing

for more than one unit’s context. The values are defined

in an appendix of this document.

5.2.5 date — a data structure of four bytes used to

represent a calendar date. Table 1 defines the format of

the date data type.

Table 1 Date Format

Data # Description Range

0–1 Year Unsigned Integer

2 Month Unsigned Short

Integer(range of 1 to 12)

3 Day Unsigned Short

SEMI E54.3-0698 © SEMI 1998, 2004 3

Integer(range of 1 to 31)

5.2.6 double integer (DINT) — an integer, four bytes

long, in the range -2

to 2

–1.

5.2.7 enumerated byte — a byte with assigned meaning

to the values 0 through 255. May take on one of a

limited set of possible values.

5.2.8 full scale range — the defined 100% value of an

attribute in its assigned units. This value is not

necessarily the maximum value for the attribute. As an

example, the indicated flow attribute value may attain

120% of the full scale range.

5.2.9 gas calibration — a reference to a set of

parameters or methods which are used to calibrate or

correct the device for a particular gas type, range, and

units.

5.2.10 gas standard number — a number that refer-

ences a gas type. The number and its referenced gas

type are defined in SEMI E52.

5.2.11 gas standard symbol — a text symbol that

references a gas type. The symbol and its referenced

gas type are defined in SEMI E52.

5.2.12 last valid value (LVV) — the most recent value

successfully assigned to an attribute.

5.2.13 long integer (LINT) — an integer, eight bytes

long, in the range -2

to 2

-1.

5.2.14 long real (LREAL) — a double floating point

number, eight bytes long, as defined in IEEE 754.

5.2.15 manufacturer — in the context of this docu-

ment, this refers to the manufacturer of the device.

5.2.16 mass flow controller (MFC) — a self-contained

device, consisting of a mass flow transducer, control

valve, and control and signal-processing electronics,

commonly used in the semiconductor industry to

measure and regulate the mass flow of gas.

5.2.17 mass flow device (MFD) — a device which is

either a mass flow controller or mass flow meter.

5.2.18 mass flow meter (MFM) — a self-contained

device, consisting of a mass flow transducer and sig-

nal-processing electronics, commonly used in the

semiconductor industry to measure the mass flow of

gas.

5.2.19 null character — a byte with a value of zero.

5.2.20 programmed gas calibration — a reference to a

particular gas type, range, and units for which the

device is currently calibrated.

5.2.21 real (REAL) — a floating point number, four

bytes long, as defined by IEEE 754.

5.2.22 short integer (SINT) — an integer, one byte

long, in the range -128 to 127.

5.2.23 signed integer (INT) — an integer, two bytes

long, in the range -32768 to 32767.

5.2.24 text string — a string of one-byte characters.

See Section 5.1 for a definition of a character.

5.2.25 unsigned integer (UINT) — an integer, two

bytes long, in the range 0 to 65535.

5.2.26 unsigned short integer (USINT) — an integer,

one byte long, in the range 0 to 255.

6 Requirements

6.1 In order to implement this standard in a Mass Flow

Device, it is necessary to also implement SEMI E54.1

and one of the Sensor/Actuator Network

Communication standards. See Section 2 for more

information on a complete interoperability standard.

7 Conventions

7.1 This document embraces the Harel State Chart

notation, the transition table definition format, the

object attribute representation formats, service message

definition formats, and behavior definition formats as

specified in SEMI E54.1.

7.2 Figure 1 describes the convention for object

representation used throughout this specification.

OBJECT NAME

-------------------------

Attributes

-------------------------

Services

Figure 1

Object Representation

8 Device High Level Structure

8.1 General Description — The high level object view

of a Mass Flow Meter (MFM) device and a Mass Flow

Controller (MFC) Device is shown in Figure 2.

8.1.1 Note that the “MFM” and the “MFC” objects are

depicted in Figure 2 only for the purposes of illustrat-

ing a high level view of the device and its component

objects. In the context of this document, these objects

are not addressable, do not have addressable attributes,

do not have accessible services, nor do they exhibit any

SEMI E54.3-0698 © SEMI 1998, 2004 4

defined behavior. These objects are only included in the

figures to aid in the visualization of the device.

8.1.2 This document defines in detail all of the

component objects unique to the MFC and the MFM

devices. References, rather than definitions, are

included for the DM, the SAC, and other objects

defined in SEMI E54.1.

8.1.3 Many of the objects defined in this document

inherit properties from other objects. The properties

inherited include attribute, service, and behavior

definitions. These other objects are specified here or in

SEMI E54.1.

8.1.4 This document provides for future extensions, as

well as manufacturer-specific enhancements, by

reserving object attribute identifiers and object service

identifiers. Specifically, all object definitions in this

document specify or reserve the first 64 attribute

identifiers (A1 through A64) and the first 64 service

identifiers (S1 through S64), allowing manufacturers to

specify identifiers beyond these ranges. Additionally,

byte-enumerated attributes are specified or reserved

from 0 to 63, allowing manufacturers to specify

enumerations beyond this range (64 to 255).

8.1.5 Mass Flow Meter (MFM) Device Description —

A Mass Flow Meter device profile is composed of the

component objects and object relationships shown in

Figure 2.

8.1.6 Mass Flow Controller (MFC) Device Description

— A Mass Flow Controller device profile is composed

of (1) all of the component objects and object

relationships of the Mass Flow Meter Device in

addition to (2) the component objects and object

relationships as shown in Figure 2.

SAC

(defined in CDM)

MFM Device

Controller

(defined in CDM)

Actuator-AO-MF

--------------------

ValveType

Override

Assembly-MFM

-----------------

Sensor-AI-MF

-------------------------

FlowTotalizer

FlowHours

ZeroingStatus

ZeroOffsetMode

AutoRangeStatus

-------------------------

PerformZeroOffset

AutoRange

QuerySupportedGasType

SelectProgrammedGasType

InsertGasType

DeleteGasType

GetGasCalibrationDataValue

SetGasCalibrationDataValue

MFC Device

Sensor-AI-Aux

------------------

Assembly-MFC

--------------------

SISO-Setpoint

-------------------

RampType

RampRate

Ratio

SISO

------------------

Input

Output

DataType

Sensor-AI

(defined in CDM)

Sensor-AI

(defined in CDM)

Local Link

(defined in CDM)

Local Link

(defined in CDM)

Local Link

(defined in CDM)

Actuator-AO

(defined in CDM)

Sensor-AI-AT

------------------

Sensor-AI

(defined in CDM)

Assembly

(defined in CDM)

Assembly

(defined in CDM)

Figure 2

Mass Flow Meter Device and Mass Flow Controller Device

High Level Structure