semi合集-English.pdf - 第3661页
SEMI E142-0705 © SEMI 2005 23 <Dimension X="2" Y="1" /> <LowerLeft X="10.00" Y="6.67" /> <DeviceSize X="25.00" Y="33.00" /> <StepSize X=&qu…
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</ReferenceDevice>
</ReferenceDevices>
<BinCodeMap BinType="Ascii" NullBin="." >
<BinDefinitions>
<BinDefinition BinCode="1" BinCount="5" BinQuality="Pass"
BinDescription="Tested Ok" Pick="true" />
<BinDefinition BinCode="2" BinCount="3" BinQuality="Fail"
BinDescription="Test Failed" Pick="false" />
</BinDefinitions>
<BinCode>.12.</BinCode>
<BinCode>1112</BinCode>
<BinCode>.21.</BinCode>
</BinCodeMap>
</Overlay>
</SubstrateMap>
<SubstrateMap SubstrateType="Wafer" SubstrateId="Wafer2"
LayoutSpecifier="WaferLayout/Devices" >
<Overlay MapName="SortGrade" MapVersion="1" >
<BinCodeMap BinType="Ascii" NullBin="." >
<BinCode X="1" Y="2">12</BinCode>
<BinCode X="0" Y="1">1112</BinCode>
<BinCode X="1" Y="0">21</BinCode>
</BinCodeMap>
</Overlay>
</SubstrateMap>
<SubstrateMap SubstrateType="Wafer" SubstrateId="Wafer3"
LayoutSpecifier="WaferLayout/Devices" >
<Overlay MapName="SortGrade" MapVersion="1" >
<BinCodeMap BinType="Ascii" NullBin="." >
<BinCode>.12.1112.21.</BinCode>
</BinCodeMap>
</Overlay>
</SubstrateMap>
<SubstrateMap SubstrateType="Wafer" SubstrateId="Wafer4"
LayoutSpecifier="WaferLayout/Devices"
Orientation="180" >
<Overlay MapName="SortGrade" MapVersion="1" >
<BinCodeMap BinType="Ascii" NullBin="." >
<BinCode X="1" Y="2">1</BinCode>
<BinCode X="2" Y="2">2</BinCode>
<BinCode X="0" Y="1">1</BinCode>
<BinCode X="1" Y="1">1</BinCode>
<BinCode X="2" Y="1">1</BinCode>
<BinCode X="3" Y="1">2</BinCode>
<BinCode X="1" Y="0">2</BinCode>
<BinCode X="2" Y="0">1</BinCode>
</BinCodeMap>
</Overlay>
</SubstrateMap>
</SubstrateMaps>
</MapData>
R1-2 Strip Map Example
R1-2.1 The example strip map below contains a more complex nested layout, one strip substrate, and three data
maps.
<?xml version="1.0" encoding="utf-8" ?>
<MapData xmlns="urn:semi-org:xsd.4032.V0804.SubstrateMap">
<Layouts>
<Layout LayoutId="StripLayout" DefaultUnits="100Microns" >
<Dimension X="1" Y="1" />
<DeviceSize X="2510.00" Y="414.02" />
<ChildLayouts>
<ChildLayout LayoutId="SRAM" />
</ChildLayouts>
</Layout>
<Layout LayoutId="SRAM" DefaultUnits="100Microns">
<Dimension X="10" Y="3" />
<LowerLeft X="7.00" Y="8.33" />
<DeviceSize X="75.00" Y="46.67" />
<StepSize X="78.00" Y="49.67" />
<Z Order="0" Height="500" Units="microns" />
<ChildLayouts>
<ChildLayout LayoutId="FLASH" />
</ChildLayouts>
</Layout>
<Layout LayoutId="FLASH" DefaultUnits="100Microns">
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<Dimension X="2" Y="1" />
<LowerLeft X="10.00" Y="6.67" />
<DeviceSize X="25.00" Y="33.00" />
<StepSize X="30.00" Y="0.00" />
<Z Order="1" Height="300" Units="microns" />
</Layout>
</Layouts>
<Substrates>
<Substrate SubstrateType="Strip" SubstrateId="Strip1" />
</Substrates>
<SubstrateMaps>
<SubstrateMap SubstrateType="Strip" SubstrateId="Strip1"
LayoutSpecifier="StripLayout/SRAM"
Orientation="180">
<Overlay MapName="SortGrade" MapVersion="1" >
<BinCodeMap BinType="Ascii" NullBin="." >
<BinDefinitions>
<BinDefinition BinCode="1" BinCount="24" BinQuality="Pass"
BinDescription="Bond Ok" Pick="true" />
<BinDefinition BinCode="2" BinCount="3" BinQuality="Fail"
BinDescription="Bond Failed" Pick="false" />
</BinDefinitions>
<BinCode>.111121111</BinCode>
<BinCode>.111111121</BinCode>
<BinCode>.112111111</BinCode>
</BinCodeMap>
</Overlay>
<Overlay MapName="2D Matrix Mark" MapVersion="1" >
<DeviceIdMap>
<Id X="0" Y="7">Device1</Id>
<Id X="0" Y="5">Device2</Id>
</DeviceIdMap>
</Overlay>
<Overlay MapName="WaferToStrip" MapVersion="1" >
<TransferMap FromSubstrateType="Wafer" FromSubstrateId="Wafer1" >
<T FX="1" FY="2" TX="1" TY="0"/>
<T FX="0" FY="1" TX="1" TY="1"/>
</TransferMap>
</Overlay>
</SubstrateMap>
</SubstrateMaps>
</MapData>
R1-2.2 Figure R1-1 shows a portion of the layout for the strip in the example above. The strip contains “SRAM”
devices with “Flash” devices stacked on top of them.
R1-2.3 Figure R1-2 illustrates one DeviceId element of the map.
R1-2.4 Figure R1-3 illustrates one Transfer element of the map.
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SRAM
FlashFlash
30.00
75.00
78.00
33.00
46.67
49.67
3.00
5.00
SRAM Layout
Dimension (X=32, Y =8)
LowerLef t (X=7.00, Y =8.33)
StepSize (X=78.00, Y=49.67)
Dev iceSize (X=75.00, Y =46.67)
Height = 5.00
ZOrder = 0
25.00
7.00
8.33
Flash Layout
Dimension (X=2, Y =1)
LowerLef t (X=10.00, Y=6.67)
StepSize (X=30.00, Y=0.00)
Dev iceSize (X=25.00, Y =33.0)
Height = 3.00
ZOrder = 1
6.67
10.00
Figure R1-1
Strip Map Example – Layout
Strip
X = 1
Y = 1
OriginLocation (0,0) ="LowerLeftTop"
DeviceId
Figure R1-2
Strip Map Example – DeviceIdMap