semi合集-English.pdf - 第898页
SEMI E116.1-1104 © SEMI 2003, 2004 4 5 Events Mapping 5.1 Table 2 s h ows the specific SE CS-II streams and functions th at shall be us ed for SECS-II im plementations of t he events defined in EPT. A single coll ection …
SEMI E116.1-1104 © SEMI 2003, 2004 3
“PreviousTaskType” 51 (U1) PreviousTaskType
where the values are enumerated as:
0 = No Task
1 = Unspecified
2 = Process -- adding value (e.g., exposing)
3 = Support -- incapable of adding value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g., Equipment-initiated clean cycle)
5 = Equipment Diagnostics (e.g., Equipment-initiated health check)
6 = Waiting (e.g., chamber waiting for a robot to remove a substrate)
“TaskName” 20 (A[0..80]) TaskName
Usage is equipment defined. Examples: “Loading”, “Etching”, “Pumping Down”
“TaskType” 51 (U1) TaskType
where the values are enumerated as:
0 = No Task
1 = Unspecified
2 = Process -- adding value (e.g., exposing)
3 = Support -- incapable of adding value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g., Equipment-initiated clean cycle)
5 = Equipment Diagnostics (e.g., Equipment-initiated health check)
6 = Waiting) e.g., chamber waiting for a robot to remove a substrate)
“TransitionTimeStamp” 20 (A[16])
YYYYMMDDhhmmsscc
YYYY=Year 0000 to 9999
MM=Month 01 to 12
DD=Day 01 to 31
hh=Hour 00 to 23
mm=Minute 00 to 59
ss=Second 00 to 59
cc= Centisecond 00 to 99
“Transition” 51 (U1) Transition
where the values are enumerated as:
1 = Transition 1
2 = Transition 2
.
.
.
9 = Transition 9
“TrackerEventID” 54 (U4) TrackerEventID
where:
This is identical to EPTStateChangeEvent
i
corresponding to this object (see the Events
Mapping section in this document)
“DisableEventOnTransition” L,n
1. 51 (U1) <Transition Number>
2. 51 (U1) <Transition Number>
…
n. 51 (U1) <Transition Number>
where the elements of this list are can only have values in the range 1..9, in order, with no
repeats. This list may be empty.
SEMI E116.1-1104 © SEMI 2003, 2004 4
5 Events Mapping
5.1 Table 2 shows the specific SECS-II streams and functions that shall be used for SECS-II implementations of the
events defined in EPT. A single collection event is generated for each of the equipment and the modules to report
transitions occurring within the state model. This approach differs from state models that are defined in other 300
mm-related SEMI standards, which utilize a unique CEID for each transition in the state model. For example, a
piece of equipment with 3 EPT modules would have 4 associated CEIDs. The CEID indexed 0 would report
equipment-level events and 3 CEIDs corresponding to the equipment’s 3 EPT modules indexed 1…3 would report
EPT module-level events.
Table 2 Event Mapping Table
Event Name Stream, Function SECS-II Message Name
EPTStateChangeEvent
i
S6F11/F12 Event Report Send/Acknowledge
6 Variable Data Item Mapping
6.1 Table 3 shows the specific SECS-II data classes, and formats needed for SECS-II implementations of SEMI
E116 EPT variable data items. The data variables must be updated as specified in the E116 standard when a
transition occurs in the state-model for any of the EPTTracker objects implemented on the equipment. The Variable
Names below match the object Attribute Names from which the variables are to be updated (see the section on EPT
Tracker Object SECS-II Attribute Definitions)
These variables are tied to the occurrence of transitions in the state model and are not impacted by the
DisableEventOnTransition attribute in the EPTTracker object.
Table 3 Event Variable Data Item Mapping Table
Variable Name Class Format
EPTState DVVAL 51 (U1)
PreviousEPTState DVVAL 51 (U1)
EPTStateTime DVVAL 54 (U4)
TaskName DVVAL 20 (A[0..80])
TaskType DVVAL 51 (U1)
PreviousTaskName DVVAL 20 (A[0..80])
PreviousTaskType DVVAL 51 (U1)
BlockedReason DVVAL 51 (U1)
BlockedReasonText DVVAL 20 (A)
Table 4 Additional Data Item Mapping Table
Variable Name SECS-II Data Item
Clock CLOCK
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consent of SEMI.
SEMI E117-1104 © SEMI 2002, 2004 1
SEMI E117-1104
SPECIFICATION FOR RETICLE LOAD PORT
This specification was technically approved by the Global Physical Interfaces and Carriers Committee and is
the direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition
approved by the North American Regional Standards Committee on August 16, 2004. Initially available at
www.semi.org September 2004; to be published November 2004. Originally published November 2002;
previously published March 2003.
1 Purpose
1.1 This specification defines dimensional
requirements and options of reticle load ports on reticle
stockers, lithography exposure equipment, and reticle
inspection equipment. It is intended to promote a
uniform physical interface between equipment and the
factory, to facilitate the use of automated RSP transport
systems, and/or to meet ergonomic requirements for
manually loaded equipment.
2 Scope
2.1 This standard covers only load ports for reticle
SMIF pods (RSPs) as specified in SEMI E100, E111,
and E112. Similar requirements and options covering
load ports for wafers are covered in SEMI E15 (for 200
mm wafers and smaller) and in SEMI E15.1 (for 300
mm wafers).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load
Port
SEMI E19.3 — Port Standard for Mechanical Interface
of Wafer Cassette Transfer, 150 mm (6 inch) Port
SEMI E19.4 — 200 mm Standard Mechanical Interface
(SMIF)
SEMI E72 — Specification and Guide for 300 mm
Equipment Footprint, Height, and Weight
SEMI E100 — Specification for a Reticle SMIF Pod
(RSP) Used to Transport and Store 6 inch or 230 mm
Reticles
SEMI E111 — Provisional Mechanical Specification
for a 150mm Reticle SMIF Pod (RSP150) Used to
Transport and Store a 6 Inch Reticle
SEMI E112 — Provisional Mechanical Specification
for a Multiple 150 mm Reticle SMIF Pod (MRSP150)
Used to Transport and Store 6 Inch Reticles
NOTICE: As listed or revised, all documents cited
shall be the latest publications of adopted standards.
4 Terminology
4.1 Definitions
4.1.1 150 mm Multiple Reticle SMIF Pod (MRSP150)
— a minienvironment compatible carrier (as defined in
SEMI E112) that is capable of holding six 6 inch
reticles in a horizontal orientation during transport and
storage and is compatible with a Standard Mechanical
Interface (SMIF) per SEMI E19.3.
4.1.2 150 mm Reticle SMIF Pod (RSP150) — a
minienvironment compatible carrier (as defined in
SEMI E111) that is capable of holding one 6 inch
reticle in a horizontal orientation during transport and
storage and is compatible with a Standard Mechanical
Interface (SMIF) per SEMI E19.3.
4.1.3 200 mm Reticle SMIF Pod (RSP200) — a
minienvironment compatible carrier (as defined in
SEMI E100) that is capable of holding one 6 inch
reticle or one 230 mm reticle in a horizontal orientation
during transport and storage and is compatible with a
Standard Mechanical Interface (SMIF) per SEMI
E19.4.
4.1.4 Reticle SMIF Pod (RSP) — a minienvironment
compatible carrier that is capable of holding either one
or six reticles in a horizontal orientation during
transport and storage and is compatible with a Standard
Mechanical Interface (SMIF) per SEMI E19.3 or SEMI
E19.4.
NOTE 1: All other terminology from SEMI E100, E111,
E112, and E15 also apply (except that in SEMI E15, the
substrate must be assumed to be a reticle and not a wafer).
5 Ordering Information
5.1 The user must specify which RSPs will be used:
RSP200, RSP150, MRSP150, or both RSP150 and
MRSP150.