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SEMI E142-0705 © SEMI 2005 6 Table 4 XYDimensions Type Attribute Name Definition Access Reqd Form X The physical offset from the origin along the X axis, according to the values of SubstrateMap coordinate attributes; Sub…

SEMI E142-0705 © SEMI 2005 5

Table 2 Layout Attributes

Attribute Name Definition Access Reqd Form

LayoutId The layout identifier. This must be unique within the

scope of MapData.

RO Y Text

DefaultUnits The units in which physical dimensions and coordinates

are represented unless otherwise specified.

RO Y Text

Dimension The number of columns (X-axis) and rows (Y-axis) in the

layout.

If this is the top level layout then X = 1, Y = 1.

RO Y LogicalCoordinates

(see Table 3)

DeviceSize The X and Y dimensions of the device.

If this is the top level layout, then this defines the size of

the substrate itself.

If not present, then DeviceSize is not defined.

RO N XYDimensions

(see Table 4)

StepSize The distance from a reference point on one device to the

same reference point on the adjacent device. StepSize –

DeviceSize is equal to the “street” width between devices.

If not present, then StepSize is not defined.

RO N XYDimensions

(see Table 4)

LowerLeft The distance in microns of the lower left corner of this

layout from the lower left corner of the parent layout.

If this is the top level layout, then LowerLeft.X = 0 and

LowerLeft.X = 0.

If not present, then LowerLeft.X = 0 and LowerLeft.X =

RO N XYDimensions

(see Table 4)

Z The logical and physical height of the device above (or

below) the parent layout.

If this is the top level layout, then Z.Order = 0 and

Z.Height = 0.

If not present, then Z.Order = 0 and Z.Height = 0.

RO N ZDimensions

(see Table 5)

TopImage Name of an image file showing the top side of an

individual device in the layout.

RO N Text

BottomImage Name of an image file showing the bottom side of an

individual device in the layout.

RO N Text

ProductId Product identifier for a device in this layout. RO N Text

TopLevel TopLevel = True implies that this is a top level layout.

TopLevel = False implies that this layout is the child of

another layout.

If this is the top level layout, then TopLevel = True.

If not present, then TopLevel = False. TopLevel may be

omitted from child layouts.

RO N Boolean

Table 3 LogicalCoordinates Type

Attribute Name Definition Access Reqd Form

X The column or X logical coordinate, according to the

values of SubstrateMap coordinate attributes;

SubstrateSide, Orientation, OriginLocation, and

AxisDirection.

RO Y Integer

Y The row or Y logical coordinate, according to the values

of SubstrateMap coordinate attributes; SubstrateSide,

Orientation, OriginLocation, and AxisDirection.

RO Y Integer

SEMI E142-0705 © SEMI 2005 6

Table 4 XYDimensions Type

Attribute Name Definition Access Reqd Form

X The physical offset from the origin along the X axis,

according to the values of SubstrateMap coordinate

attributes; SubstrateSide, Orientation, OriginLocation, and

AxisDirection.

RO Y Floating point value

Y The physical offset from the origin along the Y axis,

according to the values of SubstrateMap coordinate

attributes; SubstrateSide, Orientation, OriginLocation, and

AxisDirection.

RO Y Floating point value

Units The units in which X and Y coordinates are represented.

If omitted then the Layout, DefaultUnits is used.

RO N Text

Table 5 ZDimensions Type

Attribute Name Definition Access Reqd Form

Order The order of the layouts in the Z dimension, according to

the values of SubstrateMap coordinate attributes;

SubstrateSide, and Orientation.

Layouts with higher values for Order are in front of those

with smaller values.

If this is the top level layout, then Order =0

If not present, then Order =0.

RO N Integer

Height The height of the device above (or below) the parent

layout, according to the values of SubstrateMap

coordinate attributes; SubstrateSide, and Orientation.

If this is the top level layout, then Height =0

If not present, then Height =0.

RO N Floating point value

Units The units in which Height is represented.

If omitted then the Layout.DefaultUnits is used.

RO N Text

11 Substrate

11.1 The Substrate object identifies a substrate to which a SubstrateMap may be assigned. A Substrate object may

have one or more AliasId objects.

Table 6 Substrate Attributes

Attribute Name Definition Access Reqd Form

SubstrateType The type of substrate. A choice of ‘Wafer’, ‘Frame’,

‘Strip” or ‘Tray”.

RO Y Text

SubstrateId The substrate identifier. RO Y Text 1 to 32 characters

LotId Production lot identifier for this data. RO N Text 1 to 32 characters

CarrierType The type of wafer carrier, e.g. ‘Cassette’, ‘FOUP’, etc. RO N Text

CarrierId A character code that may be printed or encoded on the

substrate carrier, which uniquely identifies the substrate

carrier.

RO N Text 1 to 32 characters

SlotNumber This identifies the slot in the carrier in which the substrate

is placed.

RO N Positive Integer

SubstrateNumber Identifies the substrate within a lot. RO N Positive Integer

Attribute Name Definition Access Reqd Form

GoodDevices The total number of “good” devices on the substrate. The

definition of “good” is beyond the scope of this document.

RO N Positive Integer

SupplierName Name of the supplier of the substrate. RO N Text

CreateDate Date and time when the map data is acquired: formatted a

YYYYMMDDhhmmsscc (year-month-date-hour-minute-

second-centisecond).

RO N Text

LastModified Date and time when the map data was last modified:

formatted as YYYYMMDDhhmmsscc (year-month-date-

hour-minute-second-centisecond).

RO N Text

Status Status of map data supplying process or preceding

process.

RO N Text

11.2 AliasId

11.2.1 The AliasId object contains other substrate identifiers that may be used to trace the substrate throughout the

substrate’s life cycle.

Table 7 AliasId Attributes

Attribute Name Definition Access Reqd Form

Type Type of identifier, e.g. “FrontsideId”, “BacksideId”,

“WaferId”, “FrameId” .

RO Y Text

Value Value of the identifier. RO Y Text 1 to 32 characters

12 SubstrateMap

12.1 The SubstrateMap object relates to a single substrate and layout and contains a list of one or more Overlay

objects. It may also include a substrate type specific object depending on the value of [SubstrateType].

12.2 If there are more than one SubstrateMap assigned to a Substrate and Layout combination they should differ in

either their Orientation, OriginLocation or both. For example there may be a map for the top side and one for the

bottom side of a Layout.

Table 8 SubstrateMap Attributes

Attribute Name Definition Access Reqd Form

SubstrateType A reference to the type of substrate to which the map data

applies.

RO Y Text

SubstrateId A reference to the substrate identifier to which the map

data applies.

RO Y Text 1 to 32 characters

LayoutSpecifier A reference to the layout to which the map data applies.

The LayoutSpecifier defines the full path, using / as a

delimiter from the top level layout to the layout to be

specified for example; ”WaferLayout/L1/DeviceLayout”.

RO Y Text

SubstrateSide Coordinate system attribute that defines the side of the

substrate. Restricted to the values;

TopSide*

Bottom Side

* Default value if this item is not present.

RO N Text