semi合集-English.pdf - 第2190页
SEMI E54.16-0705 © SEMI 2005 35 Table 53 Extended S AC Object Instance Network Variables Sensor Actuator Controller (SAC) Profile ID = 00, Instance ID = 01 Sequence Number Name Storage Class SDM Tag Standard NV or CP Dat…

SEMI E54.16-0705 © SEMI 2005 34
Device Manager (DM)
Profile ID = 00, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
132 Laser Status NVO A36 Typedef unsigned byte SNVT_laser_status
(*)
#1
133 Flow Path CP A37 Typedef unsigned int SCPTflowPath (*)
#1
134 Volume NVO A38 SNVT_vol_f
135 Volume Units CP A39 SCPTnvType
136 Leak Status NVO A40 Typedef unsigned byte SNVT_leak_status
(*)
#1
137 Time Stamp NVO A41 SNVT_time_stamp
138 LaserSwitch NVI A42 Typedef unsigned int SNVT_switch (*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
Table 52 Extended Device Manager Object Instance Network Services
Device Manager (DM)
Profile ID = 00, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
33 Laser On S1 LaserSwitch: state=1
34 Laser Off S2 LaserSwitch: state=0
9.3.2 Service Requests Code — The service request is implemented as a network variable update containing a file
request to an nviSemiReq input to the Extended Device Manager Object functional block of a device. This input is
defined by the SNVT_semi_req type as follows:
typedef enum {
struct {
CMD_LASER_ON = 33,
CMD_LASER_OFF = 34,
} semi_request_t;
typedef struct {
unsigned int flblock_index;
semi_request_t service_code;
unsigned int parameter; // Optional parameter
} SNVT_semi_req;
9.3.3 Sensor Actuator Controller — The presentation of the extended ISPM Sensor Actuator Controller (SAC)
object instance attributes are as indicated in Table 53. The presentation of SAC object services are indicated in Table
54.

SEMI E54.16-0705 © SEMI 2005 35
Table 53 Extended SAC Object Instance Network Variables
Sensor Actuator Controller (SAC)
Profile ID = 00, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
139 Number of Bins CP SacA65 Typedef unsigned int SCPTnumBins (*)
#1
140 Count Mode CP SacA66 Typedef unsigned byte SCPTcountMode
(*)
#1
141 Duration CP SacA67 Typedef float SCPTduration (*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
Table 54 Extended SAC Object Instance Network Services
Sensor Actuator Controller (SAC)
Profile ID = 00, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
35 Clear Counts S33 SAC Object
RQ_CLEAR_COUNTS(*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
9.3.4 Service Requests Code — The service request is implemented as a network variable update containing a file
request to an nviSemiReq input to the Extended SAC Object functional block of a device. This input is defined by
the SNVT_semi_req type as follows:
typedef enum {
struct {
CMD_CLEAR_COUNTS = 35,
} semi_request_t;
typedef struct {
unsigned int flblock_index;
semi_request_t service_code;
unsigned int parameter; // Optional parameter
} SNVT_semi_req;
9.3.5 Sensor-AI-LCS — The presentation of the Sensor Analog Input Laser Sensor (Sensor-AI-LCS) object instance
attributes are as indicated in Table 55. The presentation of Sensor-AI-LCS object services are indicated in Table 56.
Table 55 Sensor-AI-LCS Object Instance Network Variables
Sensor-AI-LCS
Profile ID = 180.16, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Reading Valid NVO LcsA1 SNVT_switch
129 Full Scale CP LcsA2 SCPTmaxRange
130 Alarm Settling Time CP LcsA3 SCPTalrmSetT2
131 Warning Settling Time CP LcsA4 SCPTalrmSetT1

SEMI E54.16-0705 © SEMI 2005 36
Table 56 Sensor-AI-LCS Object Instance Network Services
Sensor-AI-LCS
Profile ID = 180.16, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.6 Sensor-AI-SLS — The presentation of the Sensor Analog Input Stray Light Sensor (Sensor-AI-SLS) object
instance attributes are as indicated in Table 57. The presentation of Sensor-AI-SLS object services are indicated in
Table 58.
Table 57 Sensor-AI-SLS Object Instance Network Variables
Sensor-AI-SLS
Profile ID = 180.17, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Reading Valid NVO SlsA1 SNVT_switch
129 Full Scale CP SlsA2 SCPTmaxRange
130 Alarm Settling Time CP SlsA3 SCPTalrmSetT2
131 Warning Settling Time CP SlsA4 SCPTalrmSetT1
Table 58 Sensor-AI-SLS Object Instance Network Services
Sensor-AI-SLS
Profile ID = 180.17, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.7 Sensor-AI-MNS — The presentation of the Sensor Analog Input Medium Noise Sensor (Sensor-AI-MNS)
object instance attributes are as indicated in Table 59. The presentation of Sensor-AI-MNS object services are
indicated in Table 60.
Table 59 Sensor-AI-MNS Object Instance Network Variables
Sensor-AI-MNS
Profile ID = 180.21, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Reading Valid NVO MnsA1 SNVT_switch
129 Full Scale CP MnsA2 SCPTmaxRange
130 Alarm Settling Time CP MnsA3 SCPTalrmSetT2
131 Warning Settling Time CP MnsA4 SCPTalrmSetT1