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SEMI E127-0705 © SEMI 2003, 2005 43 Table 26 List of Services Operation Description Type Reqd Control #1 ChangeService The Control Client reques ts to change the Service stat e of the IMM. R Y Y ClientConnect Request to …

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SEMI E127-0705 © SEMI 2003, 2005 42
16 Requirements for Objects Defined in Other Standards
16.1 Substrate Object
16.1.1 SEMI E90 defines a generic set of substrate attributes needed for basic manufacturing and substrate tracking.
The integration of measurement into a process tool requires additional information be available, both to the IMM
itself when a substrate is received and to advanced process control systems that depend on the measurement results.
16.1.2 Substrate Attributes
16.1.2.1 Table 25 defines the additional substrate attributes required by this standard. By providing them with the
substrate, they are available as context information for the IMM measurement tables defined below.
Table 25 Additional Substrate Attribute Definitions
Attribute Name Definition Access Reqd Form
ProcessFlowStep Identifies exposure-level step in product
fabrication process.
RW Y User-supplied text.
OrientationIn Shows the orientation of the substrate as
loaded.
RO Y Floating point, in radians.
OrientationOut Shows the orientation of the substrate as
unloaded.
RO Y Floating point, in radians.
ProcessToolID Name of last process tool or ObjID of
last tool process module.
RW Y User-supplied text. Shall conform to SEMI E39
restrictions on ObjID.
ProcessRecipeID Name of recipe used in last process step. RW Y User-supplied text.
SubstSide Indicates the side of the substrate
measured, as determined by the
measurement recipe.
RO Y Enumerated:
Front
Back
Both
Unknown
16.2 Process Job Management
16.2.1 Requirements
16.2.1.1 The IMM shall be able to receive a Process Job Create request specifying a recipe, variable parameters,
and list of one or more substrates, and it shall either accept or reject the request.
16.2.1.2 A Process Job Create request may be rejected if another Process Job still is active, or if there is an error in
the request message.
16.2.1.3 A Process Job in the PROCESSING state shall transition to PROCESS COMPLETE when it has
completed all measurement activities and stored the raw data. Upon this transition, the substrate may be removed
from the IMM, and all IMM Raw Data objects generated are ready for use. The conversion of data may still be in
process at this point.
17 Event and Exception Management
17.1.1 All data is defined either as the attributes of an object or as the attributes of an event. Data that must be
available at the time of an associated event is defined for each type of object. The data provided with an event or
alarm report shall be the new value that results from the event.
18 Message Service Definitions
18.1 List of Services
18.1.1 This section defines the content of service messages specified in this document and details the parameters for
each message. Table 26 provides an alphabetical list of all services specified in this standard. Services marked with
a Y in the column labeled “Control” shall be rejected if received from a Data Client.
SEMI E127-0705 © SEMI 2003, 2005 43
Table 26 List of Services
Operation Description Type Reqd Control
#1
ChangeService The Control Client requests to change the Service state of the
IMM.
R Y Y
ClientConnect Request to be a client for either control or data services. R Y —
ClientDisconnect Request to discontinue client relationship. R Y —
Delete Request by Control Client to delete a Substrate Object
(SEMI E39). (See ¶12.6.7 for detail.)
R Y
Y
RequestRetentionConditions Request for the current retention rules and retention time for the
requesting client.
R Y —
SetRetentionConditions Request to set or clear the client’s current retention conditions. R Y —
SetAutoTableSend Set or clear automatic sending of completed tables for this
client.
R Y —
TableRequest Request for a table or table subset (SEMI E58). R Y —
TableSend Request to send a table or table subset (SEMI E58). R Y —
TransferPathCalibration R Y Y
UpdateSubstrateObject Request by Control Client to create a Substrate Object and
p
opulate its attributes with the attributes provided. Also sent by
the STPO for unloading the substrate.
R Y Y
XfrCmdListRequest Request to send an ordered list of micro commands to be
returned individually to the IMM STPO to affect a substrate
hand-off.
R Y Y
XfrCommand Message sent by the Control Client to an STPO to request a
certain action (micro command) be performed. A response is
sent when the action has been completed.
R Y Y
XfrVerify Message sent by the Control Client to a STPO when all
necessary actions have been completed to effect a transfer of a
substrate and asking for confirmation.
R Y Y
XfrHalt Message sent by either partner to stop all activities. This
message ends the transfer procedure and requires manual
intervention to clear.
R Y Y
#1
Identifies services that may only be sent from the Control Client.
18.2 Service Parameters
18.2.1 Table of Parameters and Parameter Elements — Table 27 defines the parameters of the services defined in
this document.
Table 27 Definitions for Parameters and Parameter Elements
Parameter Definition Form
AutoSendRawData Enables (T) or disables (F) automatic sending for Raw
Data Tables.
Boolean.
AutoSendConvertedData Enables or disables automatic sending for Converted
Data Tables.
Boolean.
AutoSendCalibrationData Enables or disables automatic sending for Calibration
Data Tables.
Boolean.
ClientID An identifier used by the IMM to manage individual
reports.
Text.
ClientInterfaceVersion Identifies the version of the communication interface
required by the client.
Text.
SEMI E127-0705 © SEMI 2003, 2005 44
Parameter Definition Form
ClientConnectStatus Identifies the success or errors. Structure consisting of
ConnectConnectAck
List of 0+ pairs of
ErrorCode
ErrorText
ClientConnectAck Indicates the success (T) or failure (F) of a connection
or disconnection request.
Boolean.
ClientType Identifies the type of client. Enumerated: Control or Data.
Deltas An ordered list of discrepancies for the differences in
(x,y,z) between the expected position of the center of
the incoming substrate and the actual position
(expected value minus actual value).
Ordered list of 3 floating point values for
(x,y,z) discrepancies.
ErrorCode Contains the code for the specific error found. Enumerated. Service-dependent.
ErrorText Text in support of the error code. Text.
OrientationIn Specifies orientation of substrate to be loaded. Floating point.
OrientationOut Specifies orientation of substrate to be unloaded. Floating point.
Properties A list of attribute name/value pairs. List of 0+ structures consisting of
Attr.
RetentionRules 0–2 level list of retention rules. List or nested list of name/value pairs of
retention rules.
ServiceAck Indicates the success or failure of a service request. Enumerated:
Service performed with no errors
Can not perform now
At least one parameter is invalid.
Status Identifies the success or errors for a service request. Structure consisting of
ServiceAck
List of 0+ pairs of
ErrorCode
ErrorText
XfrAck Indicates success or failure. Boolean.
XfrCmdList An ordered list of XfrCmdName to be used for either a
load or an unload operation.
List of 1+ text.
XfrCmdName Indicates specific action requested. Text.
XfrHaltAccept True if halt accepted. May be denied only if the
specified transfer procedure does not exist.
Boolean.
XfrLink Transfer identifier. Unsigned integer.
XfrStatus Information about the success or failure of a Calibrate
Transfer Path service request.
Structure of:
XfrAck
List of 0+ pairs of
ErrorCode
ErrorText
18.2.2 RetentionRules Parameter Elements — The elements within a list of RetentionRules are defined in Table 28.
Table 28 Definitions for RetentionRule Parameter Elements
Name Definition Form
AfterTransfer The table may be deleted after transfer to the client. Non-negative integer. A value of zero
disables this rule, and any positive value
enables it.