semi合集-English.pdf - 第1842页

SEMI E42-0704 © SEMI 1995, 2004 111 16 Glossary of Terms The list of terms in this sectio n is intended only as a guide. Form al definitions are provi ded in the ma in body of the document. agent — A type of resource sys…

SEMI E42-0704 © SEMI 1995, 2004 110

15.9.1 Recipe Executor Compliance Table — Table 15.16 provides a statement of compliance for the recipe

executor.

Table 15.16 RMS Compliance Statement

RMS Compliance Statement

Fundamental RMS Requirements Implemented RMS Compliant

RMS Compliant Execution Recipe ❒ Yes ❒ No

Basic Requirements ❒ Yes ❒ No

OSS Services for Execution Recipe ❒ Yes ❒ No

OSS Services for Recipe Executor ❒ Yes ❒ No

Unique Recipe Identifier ❒ Yes ❒ No

Protection of Recipe Execution Area ❒ Yes ❒ No

Change Control ❒ Yes ❒ No

Recipe Download and Verify ❒ Yes ❒ No

❒ Yes

❒ No

Fundamental RMS Requirements Implemented RMS Compliant

Recipe Verify ❒ Yes ❒ No

Recipe Rename ❒ Yes ❒ No

Get Available Storage ❒ Yes ❒ No

Recipe Delete ❒ Yes ❒ No

Recipe Select ❒ Yes ❒ No

Recipe De-Select ❒ Yes ❒ No

Recipe Validation ❒ Yes ❒ No

Variable Parameters ❒ Yes ❒ No

Recipe Upload ❒ Yes ❒ No

Get Recipe Descriptors ❒ Yes ❒ No

Action Complete Notification ❒ Yes ❒ No

Additional Capabilities Implemented RMS Compliant

Recipe Delegation ❒ Yes ❒ No ❒ Yes ❒ No

Recipe Creation ❒ Yes ❒ No ❒ Yes ❒ No

Recipe Compression ❒ Yes ❒ No ❒ Yes ❒ No

Recipe Modification ❒ Yes ❒ No ❒ Yes ❒ No

Save Last Values ❒ Yes ❒ No ❒ Yes ❒ No

SEMI E10 Productive State Minimum Approval ❒ Yes ❒ No ❒ Yes ❒ No

SEMI E10 Productive State Minimum Certification ❒ Yes ❒ No ❒ Yes ❒ No

Cycle Units ❒ Yes ❒ No ❒ Yes ❒ No

Change Notification ❒ Yes ❒ No ❒ Yes ❒ No

Do not mark YES unless all fundamental RMS requirements are implemented.

Additional capabilities may not be marked RMS compliant unless all fundamental RMS requirements are implemented.

SEMI E42-0704 © SEMI 1995, 2004 111

16 Glossary of Terms

The list of terms in this section is intended only as a

guide. Formal definitions are provided in the main body

of the document.

agent — A type of resource system in a factory that

includes both hardware and software components, at

least some of which are also resources.

Examples of agents include recipe namespace servers,

cells, stations, clusters, attached cluster modules,

equipment, and smart equipment subsystems. Agents

are associated with a physical system or a collection of

physical systems, including computer platforms.

agent-specific attribute — A recipe attribute that

applies only to a specific agent.

agent-specific parameter — A variable parameter that

has been “tuned” for a specific agent by modifying its

original initial value and/or restrictions and placing the

result in the agent-specific attribute AgentSpecific

LinkParam.

agent-specific recipe — A recipe stored in the default

namespace of a specific agent.

agent-specific dataset — The recipe component

containing the set of agent-specific attributes that have

been set for that recipe for a specific agent.

approve — The operation that sets a recipe's

ApprovalLevel

attribute to a non-zero value.

approved — A recipe is approved whenever its

ApprovalLevel

attribute is non-zero.

approval level — (1) Used to reflect different degrees

of recipe development and qualification; (2) The value

of the attribute ApprovalLevel

attribute — Information concerning an object that may

be used either for internal or external purposes.

attribute length — The length of an individual attribute,

calculated as the sum of the lengths of the attribute

name and the attribute value, exclusive of formatting

information.

attribute length attribute — An attribute that contains

the sum of the lengths of the attributes. A managed

recipe, agent-specific dataset, and execution recipe

each have their own attribute length attribute.

attribute timestamp attribute — The timestamp of the

last change to any of a recipe's attributes.

authorized user — A user who is able to identify him or

herself to the host or equipment as having the level of

authority required for a particular activity, such as

certifying a recipe for that equipment.

body — See recipe body.

centralized namespace — A recipe namespace that is

not distributed.

certification-level — The value of the attribute

Certified

certified — (1) Factory-level approval that a recipe

produces the expected results on a particular instance of

equipment; (2) A recipe for which the Certified

attribute is defined and given a non-zero value for a

specific agent.

certify — The operation of changing the certification-

level of a recipe for an installation of equipment.

class — See recipe class.

clear — An attribute is cleared (reset) by setting its

value to its default value.

component agent — A subordinate agent that provides

services to a supervisory agent.

copy — Originate a recipe by the internal operation of

duplicating a recipe and assigning a new identifier.

create — The operation of entering a recipe body into a

namespace and assigning it a new (unused) identifier.

de-certify — The operation of clearing the certification

level (Certified

attribute) for a specific agent.

dedicated namespace — A recipe namespace with

exactly one member.

default namespace — A dedicated, centralized

namespace that is used by standalone equipment and/or

for hardware-specific (agent-specific) recipes.

default value — A pre-defined value. All non-

mandatory recipe attributes are assigned a default value

as part of their definition. An attribute set to its default

value may be omitted when a recipe is transferred.

delegate — An agent's supervisor delegates a recipe

that is executed by its component agent. The delegating

agent is responsible for ensuring that the component has

access to a current copy of the recipe and that the recipe

is selected, started, and deselected at the proper time.

delete — A recipe is deleted by removing its identifier,

preventing further access, and freeing its storage.

derived object form — An object form of a recipe that

is based upon a recipe in source form and that

represents a more efficient format for execution

purposes. Typically, but not by definition, this is a

“tokenized” form and requires less storage.

descriptor — (1) The length and timestamp attributes of

a recipe's attributes or of one of its components; (2) The

set of all of the individual descriptors of a recipe.

SEMI E42-0704 © SEMI 1995, 2004 112

deselect — The operation that prevents a selected

recipe from subsequent execution without its first being

selected again.

distributed recipe namespace — A namespace that is

capable of using namespace segments provided by

multiple agents.

download — To send a recipe to the recipe executor.

edit — An operation which creates a new recipe body

or changes the body of an existing recipe.

editor — A service which allows a user to create or

modify the contents of the recipe body. Editors are not

defined by RMS and are generally considered as

external to a namespace.

eol — The ASCII line-feed character (0A

) signifying

the end of a line of text.

empty — An attribute with a binary, list, or text format

with no content.

end of line character — See eol.

equipment — An agent with associated hardware that

provides, at a minimum, recipe execution services.

event — A detectable occurrence of interest to a service

user.

exception — An irregular event that indicates some

abnormal or unacceptable condition that requires

attention but does not constitute a safety hazard. Within

RMS, exceptions indicate the abnormal completion of

an operation.

execute — An agent executes a recipe by reading the

recipe contents and implementing its instructions,

process parameters, or other information required for its

own processing.

executing agent — The agent that is capable of

executing a specific recipe.

execution area — The storage location of the recipe(s)

currently selected (ready) for execution.

executable copy — A selected recipe, or “copy” of a

selected recipe, which is in the execution area.

execution recipe — The subtype of recipe that is stored

by the recipe executor.

execution recipe descriptor — Consists of the execution

attribute description, the generic attribute description,

and the body descriptor, in that order.

execution recipe storage — Storage for recipes

provided by the recipe executor for recipes that are not

currently selected.

external reference — (1) The reference which a recipe

makes to another recipe; (2) The list of subrecipes

referenced by a parent recipe.

forced overwrite — The replacement of an existing

execution recipe with a downloaded recipe with the

same identifier.

fundamental requirements — The requirements for

information and behavior that must be satisfied for

compliance to the Recipe Management Standard.

Fundamental requirements apply to specific areas of

application or objects.

generic attribute — A recipe attribute that applies to all

agents capable of executing a specific recipe.

get available storage — The operation that calculates

the amount of remaining recipe storage capacity, in

bytes, exceeding overhead requirements.

header length — The sum of the lengths of the

attributes the header contains at the time the calculation

is performed.

host — A supervisory agent that represents the factory

to its subordinates.

identification attribute — An attribute that is used to

identify a specific object and that is not included in a

recipe section when a recipe is transferred.

identification code — A text string containing a unique

and persistent “signature” for the recipe executor that

last performed verification on a recipe.

identifier — One or more attributes of an object that

uniquely identify it within a specific context.

last value — The setting for a variable parameter

specified by the user when the recipe was last selected

for execution.

link — The operation performed on a main recipe that

collects and resolves external references, and collects

variable parameter definitions, for that recipe and all

referenced recipes.

linked recipe set — The set of recipes identified by the

link operation and specified by the attribute LinkList

logical recipe — A recipe with a particular set of

attributes and a particular body considered

independently from its physical location. A logical

recipe may have multiple instances or copies.

main recipe — (1) The recipe, within a set of one or

more recipes to be linked together, which is not a

subrecipe; (2) The starting recipe or “entry point” for a

set of recipes.

managed recipe — A recipe that is stored with a recipe

namespace.