semi合集-English.pdf - 第2615页

SEMI E91-0600 © SEMI 1999 , 2000 20 Comme nt Host Equipment Comment ONLINE-REMOTE IDLE Send JOB _CREA TE command S2,F49   S2,F50 Confirm host comma nd  S6,F11 Send Prober Job Cr eated e vent report Confir m ev ent rep…

100%1 / 7923
SEMI E91-0600 © SEMI 1999, 200019
10.6 Restriction on the Operator by Control States
10.6.1 For the remote commands, the operator of the prober or the host is restricted by the control states of the
equipment.
Table 15 Table of Restrictions on the Operator by Control States
Operator Host
Remote Commands
LOCAL REMOTE LOCAL REMOTE
JOB_CREATE O X O O
PP-SELECT O X O O
PRE-DATA _DOWNLOAD X X O O
JOB_CANCEL O X O O
START OXX O
PAUSE O O X O
RESUME O O X O
STOP O O X O
ABORT O O X O
ONLINE-LOCAL X O X O
ONLINE-REMOTE O X O X
O: Operation is allowed.
X: Operation is prohibited.
11 Scenario
11.1 The purpose of this section is to document a typical PSEM specified operation scenario.
11.2 From Power-On to Online Remote
11.2.1 A typical scenario of transition from equipment power-on to online remote is shown below.
Comment Host Equipment Comment
(Equipment power-on)
(Equipment initialization operation)
S1,F13 Communication establishment request
Communication establishment request
confirmation
S1,F14
(Press the online transition switch.)
S1,F1 Are You There Request
Online data S1,F2
(Online transition is completed.)
S6,F11 Send ONLINE-REMOTE transition event
report
Confirm event report S6,F12
S6,F11 Send IDLE transition event report
Confirm event report S6,F12 S6,F12
11.3 1 Lot Processing in Online Remote
11.3.1 A typical scenario from 1 lot p rocessing instruction to processing completion in online remote is shown
below.
SEMI E91-0600 © SEMI 1999, 2000 20
Comment Host Equipment Comment
ONLINE-REMOTE IDLE
Send JOB_CREATE command S2,F49
S2,F50 Confirm host command
S6,F11 Send Prober Job Created event report
Confirm event report S6,F12
(Carry in cassette)
S6,F11 Send material carry-in event report
Confirm event report S6,F12
Send START command S2,F49
S2,F50 Confirm host command
S6,F11 Send Prober Job Started event report
Confirm event report S6,F12
S6,F11 Send SETTING UP transition event
report
Confirm event report S6,F12
(Equipment setup is started.)
(Equipment setup is completed.)
S6,F11 Send Enter Processing event report
Confirm event report S6,F12
S6,F11 Send EXECUTING transition event
report
Confirm event report S6,F12
[DO] “wafer count times”
(Wafer load is completed.)
[IF]
Is Instruction data required?
[THEN]
S6,F11 Send Waiting Previous Data event report
Confirm event report S6,F12
Send PRE-DATA_DOWNLOAD command S2,F49
S2,F50 Confirm host command
[END_IF]
(Wafer processing is started.)
(Wafer processing is completed.)
S6,F11 Send wafer end event report (Result
Data)
Confirm event report S6,F12
(Wafer unload is completed.)
[END_DO]
S6,F11 Send End Processing event report
Confirm event report S6,F12
S6,F11 Send IDLE transition event report
Confirm event report S6,F12
(Carry out cassette)
S6,F11 Send material carry-out event report
Confirm event report S6,F12
NOTE 1: Each event report send order in Prober Job Started and SETTING UP transition, Enter Processing and EXECUTING transition, and
End Processing and IDLE transition may be inverted.
SEMI E91-0600 © SEMI 1999, 200021
12 GEM Addition Request
12.1 The purpose of this section is to specify all GEM addition requests which are required to support the
equipment of this class.
12.2 Requirements
12.2.1 GEM addition requests required of PSEM are as shown below:
• Establish Communications,
• Dynamic Event Report Configuration,
• Variable Data Collection,
• Status Data Collection,
• Alarm Management,
• Remote Control,
• Equipment Constants,
• Process Program Management,
• Equipment Terminal Services,
• Clock,
• Spooling, and
• Control (host-initiated).
NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.