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SEMI S20-0303 © SEMI 2003 1 SEMI S20-0303 SAFETY GUIDELINE FOR IDEN TIFICATI ON AND DOCUMENTATION OF ENERGY ISOLATION DEVI CES FOR HAZARDOUS ENERGY CONTROL This safety guideline was techni cal ly approved by the Environm…

SEMI S19-1102 © SEMI 2002 6

10.2 Records

10.2.1 Course records should identify

• The target audience and stated learning

objective(s),

• Sources, materials and references used for training

development,

• Persons designing and developing the training and

their qualifications,

• Training materials developed for the course,

• Regulations, standards or legislation for which the

training is intended to comply,

• Methods for demonstrating competency, and

• Plans for evaluation and continuous improvement

of the course.

10.2.2 Delivery records for each training event should

identify:

• Name and description of the course,

• Date, location, and duration of the training,

• Name, identification number and employer of

students participating in the training,

• Person(s) delivering the training,

• Students successfully completing the training and

completion date (if training event spanned multiple

days),

• Competency demonstration records, and

• The subject matter presented.

10.2.3 Trainer records should include the name,

qualifications, contact information and employer of the

trainer.

10.2.4 Program management records should include

documented periodic evaluations of the training

program and reevaluations of courses.

10.3 Record Confidentiality and Availability

10.3.1 Records should be maintained such that they

meet applicable requirements for availability,

disclosure, confidentiality, and protection of trade

secrets.

10.3.2 The employer should ensure the student is

provided confirmation of successful training

completion within a reasonable time.

10.3.3 If the facility owner is different than the

employer, documentation of training completion and

contact for verification upon request should be made

available to the facility owner in a language acceptable

to the facility owner. Records, such as those identified

within this guideline, are considered documentation that

could be used for verification.

10.3.3.1 Suggested methods of providing

documentation of training completion in the field

include:

• A training passport that summarizes training

received with course completion acknowledged by

the instructor with signature, and

• Training certification cards that identify the

courses and completion dates of training received.

10.3.3.2 When an individual holding a valid training

certification issued by his/her previous employer

changes employers, it is suggested that the new

employer upon verification of the validity of the

training “certification” and associated curriculum, re-

certify its new employee by written examination and

practical demonstration to the current training

guidelines.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the guidelines set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this guideline, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any item

mentioned in this guideline. Users of this guideline are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S20-0303 © SEMI 2003 1

SEMI S20-0303

SAFETY GUIDELINE FOR IDENTIFICATION AND DOCUMENTATION

OF ENERGY ISOLATION DEVICES FOR HAZARDOUS ENERGY

CONTROL

This safety guideline was technically approved by the Environmental, Health, and Safety Committee and is

the direct responsibility of the North American Environmental, Health, and Safety Committee. Current

edition approved by the North American Regional Standards Committee on November 22, 2002. Initially

available at www.semi.org January 2003; to be published March 2003.

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this document and are not intended to

modify or supersede the official guideline. The task

force has supplied them to clarify and to enhance usage

of the guideline by equipment designers.

NOTICE: The intent of the task force that produced

this document is that conformance to the “should”

provisions of this guideline comprises conformance

with this guideline.

1 Purpose

1.1 This guideline is intended to establish a method for

the unique identification of energy isolation devices

(EID) used for lockout/tagout (LOTO). This

identification is intended to occur both at the devices

and at those places in the supplier-provided manuals

where the devices are referenced in tasks or procedures.

NOTE 1: Throughout this document, “LOTO EID” refers to

these devices.

1.2 This document supplements the existing provisions

in SEMI S2 (for Hazardous Energy Isolation) and

SEMI S13 (for providing appropriate documentation)

with a uniform graphical representation and

identification system.

1.3 This document also provides guidance for

developing instructions for operating LOTO EIDs.

2 Scope

2.1 This guideline applies to equipment used to

manufacture, measure, assemble, and test

semiconductor products, and the maintenance and

service procedures associated with the equipment.

2.2 This guideline provides criteria for documentation

and identification of all supplier-specified LOTO EIDs

meeting the criteria of SEMI S2. This includes

isolation devices that the supplier intends to be

provided by the end user.

EXCEPTION: Equipment in which a cord and plug

connection is the only LOTO EID is exempt from this

guideline.

NOTE 2: Isolation devices with locking capability are not

necessarily LOTO EIDs, unless the supplier specifies them as

LOTO EIDs.

NOTE 3: In some jurisdictions, it is the responsibility of the

supplier to specify the energy isolation points that must be

locked out in conjunction with the manufacturer-specified

maintenance procedures. However, the end user is

responsible for the overall hazardous energy control program

for the work site and for the installation of additionally

required facility EIDs. The user is not responsible for EIDs

that are required by regulation to be incorporated within the

equipment.

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use.

It is the responsibility of the users of this safety

guideline to establish appropriate safety and health

practices and determine the applicability of regulatory

or other limitations prior to use.

3 Limitations

3.1 This document is not intended to provide

guidelines for developing or replacing user-site energy

isolation programs.

3.2 This document is not intended to be used in place

of the need for adequate training of individuals who

perform hazardous energy control.

3.3 This document is not intended to conflict with laws

and regulations on Control of Hazardous Energy.

3.4 This guideline does not contain criteria or

requirements for providing a particular LOTO EID to

be used in a LOTO program.

NOTE 4: The requirements and criteria for providing a

particular LOTO EID for use in a LOTO program may be

found explicitly or implicitly in SEMI S2, equipment design

standards, United States OSHA requirements, or in various

good engineering practices.

3.5 This document is not intended to replace or

supersede SEMI S2 or any other SEMI Safety

Guideline.

3.6 This document is not intended to be applied

retroactively, i.e., to designs already in the field.

SEMI S20-0303 © SEMI 2003 2

3.7 This document does not apply to the labeling of

hazards, which is the function of SEMI S1.

4 Referenced Standards

4.1 SEMI Standards

SEMI S1  Safety Guideline for Equipment Safety

Labels

SEMI S2  Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S8  Safety Guidelines for Ergonomics

Engineering of Semiconductor Manufacturing

Equipment

SEMI S13  Safety Guidelines for Operation and

Maintenance Manuals Used With Semiconductor

Manufacturing Equipment

4.2 ANSI Standards

ANSI Z535.1  Color Coding for Labels

4.3 Code of Federal Regulations - United States of

America

29 CFR 1910.147  The Control of Hazardous Energy

(lockout/tagout)

29 CFR 1910.147



Appendix A “Typical Minimal

Lockout Procedure”

4.4 ISO Standards

ISO 3864  Safety Colours and Safety Signs

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbrevitions and Accronyms

5.1.1 LOTO  acronym for lockout/tagout.

NOTE 5: Also equivalent to the term Hazardous Energy

Isolation (HEI), which may be used in some jurisdictions.

5.2 Definitions

5.2.1 blocking (v)  preventing flow of material as

through piping or preventing energies (such as

1 American National Standards Institute, New York Office: 11 West

42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;

Fax: 212.398.0023 Website: www.ansi.org

2 Available from Occupational Safety and Health Administration,

U.S. Department of Labor, http://www.osha.gov

3 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch

suspended weights or springs) held in a suspended state

from movement.

5.2.2 clean room compatible materials — materials

approved for use within a fabrication facility, including:

laminated card stock or paper, clean room paper,

electronic media or other approved media.

5.2.3 Energy Isolation Device (EID)  a mechanical

device that physically prevents the transmission or

release of energy, including but not limited to the

following: a manually operated electrical circuit

breaker; a disconnect switch; a manually operated

switch by which the conductors of a circuit can be

disconnected from all ungrounded supply conductors,

and, in addition, no pole can be operated independently;

a line valve; a block; and any similar device used to

block or isolate energy. Push buttons, selector

switches, and other control devices are not energy

isolation devices. [OSHA 29 CFR 1910.147]

NOTE 6: Lockout devices (elsewhere defined in this

document) are not energy isolation devices.

5.2.4 graphical  using an image or multiple image

representation that reflects the equipment as assembled

and is used for indicating the location of the individual

LOTO EIDs in relation to the equipment being

maintained. Images include labeled drawings, or

photographs enhanced with labels.

5.2.5 graphical reference guide — the merger of text

instructions and graphical representations of the

equipment in a manner that provides a clear description

of the task and a simple means of locating the correct

devices.

5.2.6 lockout  the placement of a lockout device on

an energy isolation device, in accordance with an

established procedure, ensuring that the energy

isolation device and the equipment being controlled

cannot be operated until the lockout device is removed.

[OSHA 29 CFR 1910.147]

5.2.7 lockout device  a lock and associated hardware

used to secure an EID in the safe position and prevent

energy flow.

NOTE 7: Energy isolation devices (elsewhere defined in this

document) are not lockout devices.

5.2.8 maintenance  planned or unplanned activities

intended to keep equipment in good working order.

(See also definition for service.) [SEMI S2]

5.2.9 marked — identified by the use of a label,

engraving, silk screening, etching, or other physical and

durable indication; placed near components or on

systems for the purpose of matching to identifying

documentation.