semi合集-English.pdf - 第845页
0.99 4 0.99 5 0.99 6 0.99 7 0.99 8 0.99 9 0 20 40 60 80 100 120 140 Refection Coeff icient Magnitud e Frequency ( MHz) NOTE 1: This plot is the graphical form of the data shown in Table 2. Figure 5 Example Data of the Ma…
900
920
940
960
980
1000
1020
1040
-200 -150 -100 -50 0 50 100 150 200
Supplier A
Supplier B
Forward Power (W)
Reflection Coefficient Phase Angle (degrees)
VSWR = 2
NOTE 1: The requested power was 1000 W. This plot shows a comparison of two different generators. The “Supplier A” data
(circles with solid curve) is within the required 1.5% variation from requested power (within the error bars), while the
“Supplier B” data (squares with dashed line) is not within the required 1.5% variation from requested power.
Figure 4
Example Data for the Forward Power as a Function of the Reflection Coefficient Phase Angle for a Nearly
Constant Value of VSWR/Reflection Coefficient magnitude (VSWR = 2)
Table 2 Example Data Table (Partial) Showing the Frequency Response of a Chuck Assembly
Test Frequency, MHz Refection Coefficient Magnitude Refection Coefficient. Phase, degrees
1.0 0.99973 –9.702
1.3365 0.99969 –12.95
1.673 0.99959 –16.18
.
.
.
.
.
.
.
.
.
41.097 0.9974 –180
.
.
.
.
.
.
.
.
.
135.2635 0.99488 25.94
135.6 0.99490 25.36
NOTE 1: The first column is the test frequency, the second column is the magnitude of the reflection coefficient, and the third column is the
phase angle of the reflection coefficient.
SEMI E113-1104 © SEMI 2001, 2004 10
0.994
0.995
0.996
0.997
0.998
0.999
0 20 40 60 80 100 120 140
Refection Coefficient Magnitude
Frequency (MHz)
NOTE 1: This plot is the graphical form of the data shown in Table 2.
Figure 5
Example Data of the Magnitude of the Reflection Coefficient of the Chuck Assembly Plotted as a Function of
Frequency
-200
-150
-100
-50
0
50
100
150
200
0 20 40 60 80 100 120 140
Refection Coefficient Phase (degrees)
Frequency (MHz)
NOTE 1: This plot is the graphical form of the data shown in Table 2.
Figure 6
Example Data of the Phase Angle of the Reflection Coefficient of the Chuck Assembly Plotted as a Function
of Frequency
SEMI E113-1104 © SEMI 2001, 2004 11
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