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SEMI T6-0697 © SEMI 1997, 2004 28 Segment: STA Statistics Level: Detail Loop: STA Usage: Optional Max Use: 1 Purpose: To provide summar y statistics related to a specif ic collection of test result valu es. Data Element …

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SEMI T6-0697 © SEMI 1997, 2004 27
Segment: REF Reference Numbers
Level: Detail
Loop: MEA
Usage: Optional
Max Use: 10
Purpose: To specify identifying numbers.
Syntax Notes: 1 At lease one of REF02 or REF03 is required.
Comments: May be used when describing serialized or positional-dependent data.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M REF01 128 Reference Number Qualifier M ID 2/2
Code qualifying the Reference Number.
55 Sequence Number
6K Zone
Wafer site or other measurement location identification.
BG Beginning Serial Number
EG Ending Serial Number
QQ Unit Number
Used to identify the parameter sample size.
SE Serial Number
Serialization reference number applicable to the measurement.
SJ Set Number
Reference to the laser mark on a wafer (verbatim).
X REF02 127 Reference Number X AN 1/30
Reference number or identification number as defined for a particular Transaction Set,
or as specified by the Reference Number Qualifier.
X REF03 352 Description X AN 1/80
A free-form description to clarify the related data elements and their content.
SEMI T6-0697 © SEMI 1997, 2004 28
Segment: STA Statistics
Level: Detail
Loop: STA
Usage: Optional
Max Use: 1
Purpose: To provide summary statistics related to a specific collection of test result values.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M STA01 950 Statistic Code M ID 2/2
A code specifying the specific statistic being reported.
Complete list from Standard is available. Typical parameters are indicated. Other
parameters may be defined to accommodate proprietary statistical formats.
01 Cusum Delta
02 Cusum - H
03 Cusum - K
04 Capability Ratio
05 F - Test
06 Control Limit Lower - Individual
07 Control Limit Upper - Individual
08 T - Test
09 Grand Average (Double X-Bar)
10 Kurtosis
11 Mean Average
12 Median
13 Minimum Average
14 Median Range
15 Maximum Average
16 Process Capability Upper
17 Process Capability Lower
18 Process Capability CPK
19 Range Average (R-Bar)
20 Control Limit Lower R-Bar
21 Control Limit Upper R-Bar
22 Range Value (Total Range)
23 Standard Deviation
24 Standard Error
25 Skewness
26 Control Limit Lower X-Bar
27 Control Limit Upper X-Bar
28 Failure Rate in Time (failures over time determined by the equation
(failure rate*10^9))
29 Mode
30 Average
SEMI T6-0697 © SEMI 1997, 2004 29
31 Mean
32 Minimum Value
The least or smallest value; the allowed lower limit
33 Maximum Value
The largest value; the allowed upper limit
AD Anderson Darling Test
CF Cochran's Procedure
CS Chi-Square Test
See Appendix 2 EC Equivalent Cpk (Add definition)
See Appendix 2 PE Percentile
See Appendix 2 GM Geometric Mean
See Appendix 2 GS Geometric Sigma
HG Histogram
See Appendix 2 HC Histogram Class Count (Count of classes or bars)
See Appendix 2 HS Histogram Start (Left side of first class or bar)
See Appendix 2 HW Histogram Width (Width of class or bar)
KS Kolmogrov-Smirnov Test
See Appendix 2 OC Outlier Count
See Appendix 2 PK Peak Value of Distribution Curve
SK Moment Tests, Skewness and Kurtosis (Weighted Average)
SW Shapiro-Wilk Test
ZZ Mutually Defined
M STA02 739 Measurement Value M R 1/20
The value of the measurement.
O STA03 C001 Composite Unit of Measure O
To identify a composite unit of measure (see figures in appendix for example of use).
M C00101 355 Unit or Basis for Measurement Code M ID 2/2
Code specifying the units in which a value is being expressed, or manner in which a
measurement has been taken.
Refer to 003050 Data Element Dictionary for acceptable code values.
O C00102 1018 Exponent O R 1/15
Power to which a unit is raised.
O C00103 649 Multiplier O R 1/10
Value to be used as a multiplier to obtain a new value.
O STA04 738 Measurement Qualifier O ID 1/3
Code identifying a specific product or process characteristic to which a meas. applies.
Refer to 003050 Data Element Dictionary for acceptable code values.
O STA05 737 Measurement Reference ID Code O ID 2/2
Code identifying the broad category to which a measurement applies.
H
R
Historical Result
LS Lot Status
LT Lot Limits
Limits set on test results from all product contained in a single
shipment (which may involve any multiple or fraction
oftransportation carrier units) to one customer.
TS Single Test Limits