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SEMI E95-1101 © SEMI 2000 , 2001 1 SEMI E95-1101 SPECIFIC A TI ON FOR HUMAN INTERFACE FOR SEMICONDUCTOR MANUFACTURI NG EQUIPMENT This s pecif ication was te chnically approv ed by the G lobal Inform ation and Control Com…

SEMI E94.1-1104 © SEMI 2001, 2004 6

Attribute Name Attribute Data Form: SECS-II Structure

“ProcessOrderMgmt” 51 (U1) ProcessOrderMgmt

ProcessOrderMgmt is enumerated as follows:

1 = ARRIVAL

2 = OPTIMIZE

3 = LIST

“PRJobStatusList”

L,n n = number of process jobs defined in the control job

1. L,2

1. <PRJOBID

2. <PRSTATE

n. L,2

1. <PRJOBID

2. <PRSTATE

“StartMethod” 11 (BOOLEAN) StartMethod

StartMethod is as follows:

TRUE – Auto

FALSE – UserStart

“State” 51 (U1) State

State is enumerated as follows:

0 = QUEUED

1 = SELECTED

2 = WAITINGFORSTART

3 = EXECUTING

4 = PAUSED

5 = COMPLETED

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

SEMI E95-1101 © SEMI 2000, 20011

SEMI E95-1101

SPECIFICATION FOR HUMAN INTERFACE FOR SEMICONDUCTOR

MANUFACTURING EQUIPMENT

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the North American Information and Control Committee. Current edition approved

by the North American Regional Standards Committee on August 27, 2001. Initially available at

www.semi.org September 2001; to be published November 2001. Originally published February 2000.

1 Purpose

1.1 This standard addresses the area of processing

content with the direct intention of developing common

software standards, so that problems involving operator

training, operation specifications, and efficient develop-

ment can be resolved more easily.

1.2 This standard is written to be “tool-neutral” without

reference to, or reliance on, specific capabilities of

platforms or operating systems. Neither is it intended

that choices of software tools or detailed implement-

ation strategies be dictated.

1.3 Note that all figures in this standard are schematic,

are not drawn to scale, and unless otherwise specified,

are not intended to provide implementation details

about number of buttons, button sizes, panel sizes, etc.

2 Scope

2.1 This standard specification applies to

manufacturing equipment used in the production of

semiconductors.

2.2 This standard may be applicable to other areas such

as the manufacture of flat panel displays, but specific

application to these areas is outside the scope of this

document.

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Referenced Standards

None.

4 Terminology

4.1 condition — a property of a displayed object or

value (textual or numeric) that visually indicates, if

applicable, whether the current state of an object or the

current value violates the defined bounds of normal

operational states or parameters, whether that violation

is categorized as a minor exception (a caution) or a

severe exception (an alarm), and provides no visual

indication if no exception has occurred.

4.2 display objects — user interface elements

displayed on the screen, such as function selection

buttons, keyboard input buttons, graphics representing

the equipment, etc.

4.3 functional area — a grouping of one or more views

presenting information and control capabilities to the

user.

4.4 icon — an icon (diagrammatic image) is a bitmap

or other image used in GUI environments such as

windowing systems to show different types of objects,

improve operability, and help the user better understand

the functionality underlying buttons.

4.5 navigation model — the navigation model

determines how a user interacts with a system to access

functionality and information.

4.6 salience — a salience is a solid (or textured),

colored border shown around a display object to

indicate an alarm, caution, or other condition, or to

draw the user’s attention to the display object.

5 Requirements

5.1 Each of the following sections is designated with

one of the following labels:

5.1.1 Sections designated:

Description

provide background information and set

the context for subsequent specifica-

tions;

Mandatory provide a specification of a requirement

which shall both be present and imple-

mented as specified;

Conditional

provide a specification of a requirement

which shall be implemented as specified

if such a feature is implemented on the

tool;

Recommended

provide a recommended capability and

implementation of that capability, but

neither their presence nor their imple-

mentation is required.

SEMI E95-1101 © SEMI 2000, 2001 2

5.2 Basic Display Objects Description

5.2.1 This section specifies the general appearance and

behavior of basic display objects used throughout the

interface, including buttons, saliences, and dialog

boxes. It is intended that the use of other types of

display objects (choose lists, data display and data entry

fields, scroll-bars, etc.) is specifically allowed, and their

use is at the discretion of the implementers.

5.2.1.1 There are two types of display objects;

selectable and non-selectable. Some are selectable by

the user to initiate or execute an action. Non-selectable

graphics and user interface elements (such as pipes and

text field labels, respectively) are read only, and no

action is initiated or executed.

5.2.2 Buttons

5.2.2.1 Button Size Mandatory

5.2.2.1.1 When a touchscreen device is used, button

sizes must be large enough to ensure selection on the

targeted display.

5.2.2.2 Button Dimensions Recommended

5.2.2.2.1 It is recommended that buttons shall have a

minimum dimension of approximately 1.5 cm on the

shortest side. If a smaller size is used, the space

between buttons must be increased to avoid selection

errors. For installations where a keyboard and a mouse,

light pen or other pointing device is available, button

sizes in the navigation panel and the command panel

may be made somewhat smaller (approximately 1–1.25

cm), and the size of the information panel increased

proportionally.

5.2.2.3 Button Behavior Mandatory

5.2.2.3.1 One type of button behavior is momentary;

that is, user selection of a button causes a brief display

of the down (selected) state of the button, followed

immediately by a display of the up (unselected) state.

The other button behavior is two-state; the button

remains in the down state after user selection. User re-

selection of the button, and/or selection of another

button, and/or selection of another display object

restores the display of the up state. In some cases, the

software will control the display of the down state or

restore the up state, without direct user interaction.

5.2.2.3.2 For 2-D buttons, the down state shall be

indicated by hatching, cross-hatching, or otherwise

texturing the button in such a manner that does not

obscure the button label.

5.2.2.4 Button Text Mandatory

5.2.2.4.1 Text for all button labels shall have the first

letter of words capitalized unless it is an article or pre-

position not occurring at the beginning or end of the

label, or unless the word’s conventional usage is not

capitalized. Button labels that are all capital letters are

harder to read than mixed case labels. Additionally, text

in all capitals appears larger, and the user may attach

more importance to the button than necessary simply

because the label is visually distracting.

5.2.3 Saliences Conditional

5.2.3.1 Saliences, colored, textured, or both shall be

displayed around buttons and other display objects to

indicate their condition, which may include caution,

alarm, user attention required or requested, processing,

unfinished task notification, and other conditions.

5.2.3.2 A salience is displayed to draw the user’s

attention to a display object when its condition is not

normal or OK (in this case, the absence of a displayed

salience shall indicate a normal or OK condition), or

when the salience provides information that benefits the

user in the performance of tasks or the monitoring of

equipment functions and operations.

5.2.3.3 A salience shall not hide the display object it

surrounds. Saliences shall not be used to indicate the

state (open, closed, on, off, etc.) of display objects.

5.2.3.4 On color displays, alarm saliences shall appear

bright red, caution saliences shall appear bright yellow,

and processing and unfinished task saliences shall

appear medium blue. User attention required or

requested saliences, (for example, “Ready to Load,” or

“Ready to Unload”) shall appear medium green.

5.2.4 Dialog Boxes Description

5.2.4.1 Dialog boxes are secondary windows used to

display supplemental information, solicit information

from the user, or report errors.

5.2.4.2 Dialog boxes are used to provide additional

information to the user; to display detailed information

not shown on the information panel for controlling the

system, and to display detailed information for

monitoring system operation.

5.2.5 Dialog Boxes Mandatory

5.2.5.1 Dialog boxes (which are always temporary) are

displayed in response to some action initiated by the

user. When displayed, a dialog box shall overlay a

portion of the information panel, and shall not obscure

the title panel. If invoked by user selection of a display

object on the information or command panels, all the

display objects on those two panels shall be disabled

until the dialog box is dismissed. The title and

navigation panels remain enabled. At the explicit

request of the user, the dialog box is dismissed, and the

underlying information is refreshed.