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SEMI E21.1-1296 © SEMI 1992, 2002 3 Figure 2 Proposed 300 mm Interface Plane
SEMI E21.1-1296 © SEMI 1992, 2002 2
Figure 1
Proposed 300 mm Wafer Transport Plane Elevation
SEMI E21.1-1296 © SEMI 1992, 2002 3
Figure 2
Proposed 300 mm Interface Plane
SEMI E21.1-1296 © SEMI 1992, 2002 4
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
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