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SEMI E125-0305 © SEMI 2003, 2005 50 RELATED INFORMATION 7 STATE MACHINES NOTICE : This rel ated infor mation is not an official part of SEMI E125 and was derived from the wo rk of the originating committee. Th is related…

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SEMI E125-0305 © SEMI 2003, 2005 49
RELATED INFORMATION 6
OBJTYPES
NOTICE: This related information is not an official part of SEMI E125 and was derived from the work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R6-1 Examples
R6-1.1 Figure R6-1 shows an abbreviated example of how to describe the E87 Carrier ObjType using the classes
from Section 10.10. Not all events and attributes available for the Carrier ObjType are shown for clarity, only the
ObjType, ObjId, and ContentMap attributes, and the creation/destruction events for the Carrier. Note that the names
and types of the attributes of the ObjType conform to the name and typing conventions described in Sections
10.4.11 and 10.5.7. ParameterTypeDefinitions have been omitted for clarity. See Related Information Section R5-1
for an example of the corresponding ParameterTypeDefinitions.
standardVers ion = E87-1101
objType = Carrier
Carrier : SEMIObjType
name = ObjType
description = The type name for this ObjType
: Parameters::Parameter
name = ObjId
description = The instance id for instances of this ObjType
: Parameters::Parameter
name = Conten tMap
desc ript ion = E87 c ontent map at tribute
: Parameters::Parameter
desc ription = Sent w hen a c arrier ins tantiates
: As sociat ions:: Event ToParamet erMap
desc ription = Sent w hen a c arrier is dest royed
: Associations ::EventToParameterMap
attributes
event s
availableParameters
availableParameters
name = urn:semi-org:event:E87-1101:1:Initial-Carrier
id = CarrierCreated
: Stat eMac hines:: Event
name = urn:semi-org: event :E87-1101:21: Carrier-Final
id = CarrierDestroyed
: StateMachines: :Ev ent
ev ent
event
Figure R6-1
E87 Carrier ObjType Example
SEMI E125-0305 © SEMI 2003, 2005 50
RELATED INFORMATION 7
STATE MACHINES
NOTICE: This related information is not an official part of SEMI E125 and was derived from the work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R7-1 Examples
R7-1.1 Simple Pump
R7-1.1.1 Figure R7-1 shows an example state machine that could be described by the StateMachine mechanism
described in Section 10.9. The example is for a very simple vacuum pump that is either pumping down or idle.
Figure R7-1
Example — Vacuum Pump State Machine
SEMI E125-0305 © SEMI 2003, 2005 51
R7-1.1.2 Figure R7-2 shows how the example state machine could be represented using the StateMachine, State,
and Transition classes. The top level state, Pump, is represented as a State that contains two substates corresponding
to Idle and PumpingDown. Three transitions have been defined, corresponding to the three transitions shown in
Figure R7-2.
name = Vacuu m PumpStateMac hine
id = urn: supplier: stat e-m achine:Pump
desc ript ion = Describes t he beh avior of a va cuum pump.
: StateMachine
name = Pump
id = Pump
description = T he t op level s tate for the vac uum pump s ystem
: State
top
name = Idle
id = Pump.Idle
description = The device is idle
: State
name = Pum pingDown
id = Pump. PumpingD ow n
des cription = Th e device is pumping down to vacuum
: State
s ubstates
na m e = In it ialize
id = T1
description = Pump is pow ered up
: T ransition
name = Activate
id = T2
description = T he pump has started pumping
: Transition
name = Sto p
id = T 3
description = The pump has stopped
: Transition
transitions
name = Initial
id = Pump.Initial
description = T he initial stat e for the vacuum pump.
: State
s ource
target
source
target
source
target
na m e = In it ialized
id = pev-01
: Event
name = Active
id = pev-02
: Ev ent
name = Idle
id = pev -03
: Event
trans itions
transitions transitions
events
Figure R7-2
Example Representation of the Vacuum Pump State Machine