semi合集-English.pdf - 第2379页

SEMI E84-0305 © SEMI 1999, 2005 23 READY (P->A ) HO_AVBL (P->A ) ES (P->A ) CS_0 (A->P ) CS_1 (A->P ) VALID (A->P ) TR_RE Q (A->P ) BUSY (A->P ) COMPT (A->P ) HO_AVBL is Confirmed OFF End of Ha…

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SEMI E84-0305 © SEMI 1999, 2005 22
HO_AVBL signal may be turned OFF independently of the other SEMI E84 signals, prior to or during the handoff.
The active stocker is expected to confirm the HO_AVBL signal in the following period:
a) From the time at which the TR_REQ signal is turned ON to the time at which the READY signal is turned ON.
6.2.8.2 Figures 27 through 29 are diagrams explaining the above item a) and showing examples of potential
HO_AVBL signal activity. The active stocker stops transferring when the active stocker detects that the HO_AVBL
signal has been turned OFF by the passive OHS. By turning off the AM_AVBL signal, the active Stocker closes the
transfer sequence. In such a case, the TR_REQ signal must go OFF as the transfer sequence has ended. Also, the
passive OHS must turn OFF the VS_0 and VS_1 signals. Next, the passive OHS must turn ON the HO_AVBL
signal after the VA signal has gone OFF (the L_REQ or U_REQ must be set OFF).
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
CS_0
(A->P)
CS_1
(A->P)
VALID
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL is
Confirmed
OFF
End of
Handshake
CONT
(A->P)
TD0
step numbers are
for reference only
1
2
6
3
4
5
NOTE 1: The HO_AVBL signal turns OFF while the active equipment is confirming the signal in step 3.
Figure 20
Example of Handoff Available Signal
SEMI E84-0305 © SEMI 1999, 2005 23
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
CS_0
(A->P)
CS_1
(A->P)
VALID
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL is
Confirmed
OFF
End of
Handshake
CONT
(A->P)
TD0
step numbers are
for reference only
1
2
6
3
4
5
L_REQ
(P->A)
NOTE 1: The HO_AVBL signal turns OFF after the VALID signal is turned ON. The active equipment confirms the signal is
OFF in step 3.
Figure 21
Example of Handoff Available Signal
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
CS_0
(A->P)
CS_1
(A->P)
VALID
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL is
Confirmed
OFF
End of
Handshake
CONT
(A->P)
TD0
step numbers are
for reference only
1
2
6
3
4
5
NOTE 1: The HO_AVBL signal turns OFF just before the active equipment arrives. The active equipment confirms the signal is
OFF in step 3.
Figure 22
Example of Handoff Available Signal
SEMI E84-0305 © SEMI 1999, 2005 24
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
CS_0
(A->P)
CS_1
(A->P)
VALID
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL is
Confirmed
OFF
End of
Handshake
CONT
(A->P)
TD0
step numbers are
for reference only
1
2
6
3
4
5
NOTE 1: The HO_AVBL signal turns OFF before the active equipment arrives. The active equipment confirms the signal is OFF
in step 3.
Figure 23
Example of Handoff Available Signal
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
CS_0
(A->P)
CS_1
(A->P)
VALID
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
CONT
(A->P)
HO_AVBL is
Confirmed
OFF
End of
Handshake
TD0
TA1
TP1
step numbers are
for reference only
1
2
3
5
4
7
8
9
6
10
NOTE 1: The HO_AVBL signal turns OFF while the active equipment is confirming the signal in step 5.
Figure 24
Example of Handoff Available Signal